Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides

Abstract

Metal grating couplers for Silicon-on-Insulator waveguides are proposed. A silver grating coupler with 33% coupling efficiency is designed. A gold gating coupler prototype is fabricated using Focused Ion Beams demonstrating over 10% coupling efficiency. (C) 2007 Optical Society of Americ