High-precision figure correction of x-ray telescope optics using ion implantation

ABSTRACT Achieving both high resolution and large collection area in the next generation of x-ray telescopes requires highly accurate shaping of thin mirrors, which is not achievable with current technology. Ion implantation offers a promising method of modifying the shape of mirrors by imparting internal stresses in a substrate, which are a function of the ion species and dose. This technique has the potential for highly deterministic substrate shape correction using a rapid, low cost process. Wafers of silicon and glass (D-263 and BK-7) have been implanted with Si+ ions at 150 keV, and the changes in shape have been measured using a Shack-Hartmann metrology system. We show that a uniform dose over the surface repeatably changes the spherical curvature of the substrates, and we show correction of spherical curvature in wafers. Modeling based on experiments with spherical curvature correction shows that ion implantation could be used to eliminate higher-order shape errors, such as astigmatism and coma, by using a spatially-varying implant dose. We will report on progress in modelling and experimental tests to eliminate higher-order shape errors. In addition, the results of experiments to determine the thermal and temporal stability of implanted substrates will be reported

Dimensinal metrology for nanometre-scale science and engineering: Towards sub-nanometre accurate encodders

Abstract Metrology is the science and engineering of measurement. It has played a crucial role in the industrial revolution at the milli-inch length scale and in the semiconductor revolution at the micrometre length scale. It is often proclaimed that we are standing at the threshold of another industrial revolution, brought by the advent and maturing of nanotechnology. We argue that for nanotechnology to have a similarly revolutionary effect a metrology infrastructure at and below the nanometre scale is instrumental and has yet to be developed. This paper focuses on dimensional metrology, which concerns itself with the measurement of lengths and its applications such as pattern placement and feature size control. We describe our efforts to develop grating-and grid-based scales with sub-nanometre accuracy over 300 mm dimensions using the nanoruler-a scanning-beam interference lithography tool

Precision microcomb design and fabrication for x-ray optics assembly

Silicon microcombs developed at our laboratory for the precision alignment and assembly of large-area foil optics have previously been demonstrated to achieve submicron-level assembly repeatability with submillimeter-thick flat substrates. In this article we report on a double-side deep reactive-ion etch fabrication process using silicon-on-insulator wafers which was developed to improve the microcombs' manufacturing accuracy

The Chandra High Energy Transmission Grating: Design, Fabrication, Ground Calibration and Five Years in Flight

Details of the design, fabrication, ground and flight calibration of the High Energy Transmission Grating, HETG, on the Chandra X-ray Observatory are presented after five years of flight experience. Specifics include the theory of phased transmission gratings as applied to the HETG, the Rowland design of the spectrometer, details of the grating fabrication techniques, and the results of ground testing and calibration of the HETG. For nearly six years the HETG has operated essentially as designed, although it has presented some subtle flight calibration effects.Comment: 34 pages (including 30 figures), accepted for publication in PAS

The rocket experiment demonstration of a soft x-ray polarimeter (REDSoX Polarimeter)

The Rocket Experiment Demonstration of a Soft X-ray Polarimeter (REDSoX Polarimeter) is a sounding rocket instrument that can make the first measurement of the linear X-ray p olarization of an extragalactic source in the 0.2-0.8 keV band as low as 10%. We employ multilayer-coated mirrors as Bragg reflectors at the Brewster angle. By matching the dispersion of a spectrometer using replicated optics from MSFC and critical angle transmission gratings from MIT to three laterally graded multilayer mirrors (LGMLs), we achieve polarization modulation factors over 90%. We present a novel arrangement of gratings, designed optimally for the purpose of polarimetry with a converging beam. The entrance aperture is divided into six equal sectors; pairs of blazed gratings from opposite sectors are oriented to disperse to the same LGML. The LGML position angles are 120 degrees to each other. CCD detectors then measure the intensities of the dispersed spectra after reflection and polarizing by the LGMLs, giving the three Stokes parameters needed to determine a source's linear polarization fraction and orientation. A current grant is funding further development to improve the LGMLs. Sample gratings for the project have been fabricated at MIT and the development team continues to improve them under separate funding. Our technological approach is the basis for a possible orbital mission. Keywords: X-ray, polarimeter, astronomy, multilayer, mirror, gratingUnited States. National Aeronautics and Space Administration (Grant NNX17AE11G)United States. National Aeronautics and Space Administration (Grant NNX12AH12G)Kavli Institute for Astrophysics and Space Research (Research Investment Grant)United States. National Aeronautics and Space Administration (Grant NNX17AG43G)United States. National Aeronautics and Space Administration (Grant NNX15AC43G

Lynx X-Ray Observatory: An Overview

Lynx, one of the four strategic mission concepts under study for the 2020 Astrophysics Decadal Survey, provides leaps in capability over previous and planned x-ray missions and provides synergistic observations in the 2030s to a multitude of space- and ground-based observatories across all wavelengths. Lynx provides orders of magnitude improvement in sensitivity, on-axis subarcsecond imaging with arcsecond angular resolution over a large field of view, and high-resolution spectroscopy for point-like and extended sources in the 0.2- to 10-keV range. The Lynx architecture enables a broad range of unique and compelling science to be carried out mainly through a General Observer Program. This program is envisioned to include detecting the very first seed black holes, revealing the high-energy drivers of galaxy formation and evolution, and characterizing the mechanisms that govern stellar evolution and stellar ecosystems. The Lynx optics and science instruments are carefully designed to optimize the science capability and, when combined, form an exciting architecture that utilizes relatively mature technologies for a cost that is compatible with the projected NASA Astrophysics budget