Accurate control of ion bombardment in remote plasmas using pulse-shaped biasing

This paper deals with a pulsed biasing technique employed to a downstream expanding thermal plasma. Two pulsed biasing approaches are presented: asymmetric rectangular pulses and modulated pulses with a linear voltage slope during the pulse, and their applicability is discussed on the basis of the intrinsic capacitance of the processed substrate-layer system. The substrate voltage and current waveforms are measured, and the relation to the obtained ion energy distributions is discussed. Accurate control of the ion bombardment is demonstrated for both aforementioned cases, and the cause of broadening of the peaks in the ion energy spectra is determined as well. Moreover, several methods to determine the modulated pulse duration, such that the sloping voltage exactly compensates for the drop of the substrate sheath potential due to charging, are presented and their accuracy is discussed. © 2009 American Institute of Physics. U7 - Export Date: 24 March 2010 U7 - Source: Scopus U7 - Art. No.: 07330

Validation of the Fokker-Planck Approach to Vibrational Kinetics in CO2 Plasma

The Fokker-Planck (FP) approach to describe vibrational kinetics numerically is validated in this work. This approach is shown to be around 1000 times faster than the usual state-to-state (STS) method to calculate a vibrational distribution function (VDF) in stationary conditions. Weakly ionized, nonequilibrium CO2 plasma is the test case for this demonstration, in view of its importance for the production of carbon-neutral fuels. VDFs obtained through the resolution of an FP equation and through the usual STS approach are compared in the same conditions, considering the same kinetic data. The demonstration is shown for chemical networks of increasing generality in vibrational kinetics of polyatomic molecules, including V-V exchanges, V-T relaxation, intermode V-V\u27 reactions, and excitation through e-V collisions. The FP method is shown to be accurate to describe the vibrational kinetics of the CO2 asymmetric stretching mode, while being much faster than the STS approach. In this way, the quantitative validity of the FP approach in vibrational kinetics is assessed, making it a fully viable alternative to STS solvers, that can be used with other processes, molecules, and physical conditions.</p

Anomalous fast recombination in hydrogen plasmas involving rovibrational excitation

Langmuir-probe measurements in a hydrogen-containing plasma jet show anomalous fast recombination that cannot be attributed to atomic processes such as radiative or three-particle recombination. In this paper a molecular mechanism, based on the charge transfer between the atomic hydrogen ions and the rovibrationally excited hydrogen molecules (H/sub 2//sup nu ,J/+H/sup +/ to H/sub 2//sup +/+H), is presented that explains the observed fast recombinatio

Comparison between Al2O3 surface passivation films deposited with thermal ALD, plasma ALD and PECVD

Surface passivation schemes based on Al2O3 have enabled increased efficiencies for silicon solar cells. The key distinguishing factor of Al2O3 is the high fixed negative charge density (Qf = 1012-1013 cm-2), which is especially beneficial for p- and p+ type c-Si, as it leads to a high level of field-effect passivation. Here we discuss the properties of Al2O3 surface passivation films synthesized with plasma atomic layer deposition (ALD), thermal ALD (using H2O as oxidant) and PECVD. We will show that with all three methods a high level of surface passivation can be obtained for Al2O3 deposited at substrate temperatures in the range of 150-250oC. Furthermore, the role of chemical and field-effect passivation will be briefly addressed. It is concluded that the passivation performance of Al2O3 is relatively insensitive to variations in structural properties. Al2O3 is therefore a very robust solution for silicon surface passivation

In vivo (31)P magnetic resonance spectroscopy and morphometric analysis of the perfused vascular architecture of human glioma xenografts in nude mice.

The relationship between the bioenergetic status of human glioma xenografts in nude mice and morphometric parameters of the perfused vascular architecture was studied using (31)P magnetic resonance spectroscopy (MRS), fluorescence microscopy and two-dimensional digital image analysis. Two tumour lines with a different vascular architecture were used for this study. Intervascular distances and non-perfused area fractions varied greatly between tumours of the same line and tumours of different lines. The inorganic phosphate-nucleoside triphosphate (P(i)/NTP) ratio increased rapidly as mean intervascular distances increased from 100 microm to 300 microm. Two morphometric parameters - the percentage of intervascular distances larger than 200 microm (ivd200) and the non-perfused area fraction at a distance larger than 100 microm from a nearest perfused vessel (area100), - were deduced from these experiments and related to the P(i)/NTP ratio of the whole tumour. It is assumed that an aerobic to anaerobic transition influences the bioenergetic status, i.e. the P(i)/NTP ratio increased linearly with the percentage of ivd200 and the area100