39 research outputs found

    Microstructural void environment characterization by electron imaging in 45 nm technology node to link electromigration and copper microstructure

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    International audienceThe work presented in this paper illustrates the link between electromigration (EM) and microstructure in copper interconnects. For this study, 70 nm wide copper interconnects from 45 nm technology node are considered. Microstructure and grain orientation have been obtained in the vicinity of EM induced voids at early stage. Electron Backscattered Diffraction (EBSD) characterization is used to get microstructure and grain orientation. Then Transmission Electronic Microscope (TEM) imaging provides unambiguous location of void on EBSD map. Finally, the comparison of EBSD technique with its equivalent in TEM (commercialized as ASTAR by NanoMEGAS) shows that EBSD limitations are reached and that TEM should soon replace EBSD for local analyses. The results confirm that EM voids are nucleated at high angle misoriented grain boundaries (grain boundary with misorientation higher than 15 degrees) and does not show link between grain orientation and electromigration phenomenon. (C) 2013 Elsevier B.V. All rights reserved

    Dysplasie kystique du rete testis et agenesie renale ipsilaterale chez l'enfant

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    Background. - Cystic dysplasia of rete testis, a rare abnormality, is often associated with renal agenesis. Case report. - A 5-year-old boy was examined because he presented large scrotum. This was initially considered as hydrocele. Surgery showed a cystic dysplasia of the testis that in this patient was associated with ipsilateral renal agenesis. Conclusion. - This congenital abnormality, explained on the basis of embryological development, has been reported in 15 children. The testis appears cystic at surgical exploration; echography can affirm diagnosis and MRI can give specific features. A conservative attitude is proposed as this lesion is benign. Long- term follow-up is recommended for possible painful effects or growth of the lesion
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