Growth and thermal stability of TiN/ZrAlN: Effect of internal interfaces

Wear resistant hard films comprised of cubic transition metal nitride (c-TMN) and metastable c-AlN with coherent interfaces have a confined operating envelope governed by the limited thermal stability of metastable phases. However, equilibrium phases (c-TMN and wurtzite(w)-AlN) forming semicoherent interfaces during film growth offer higher thermal stability. We demonstrate this concept for a model multilayer system with TiN and ZrAlN layers where the latter is a nanocomposite of ZrN- and AlN- rich domains. The interfaces between the domains are tuned by changing the AlN crystal structure by varying the multilayer architecture and growth temperature. The interface energy minimization at higher growth temperature leads to formation of semicoherent interfaces between w-AlN and c-TMN during growth of 15 nm thin layers. Ab initio calculations predict higher thermodynamic stability of semicoherent interfaces between c-TMN and w-AlN than isostructural coherent interfaces between c-TMN and c-AlN. The combination of a stable interface structure and confinement of w-AlN to nm-sized domains by its low solubility in c-TMN in a multilayer, results in films with a stable hardness of 34 GPa even after annealing at 1150 °C.Peer ReviewedPostprint (author's final draft

Enhanced thermal stability and fracture toughness of TiAlN coatings by Cr, Nb and V-alloying

The effect of metal alloying on mechanical properties including hardness and fracture toughness were investigated in three alloys, Ti~0.33Al0.50(Me)~0.17N (Me¿=¿Cr, Nb and V), and compared to Ti0.50Al0.50N, in the as-deposited state and after annealing. All studied alloys display similar as-deposited hardness while the hardness evolution during annealing is found to be connected to phase transformations, related to the alloy's thermal stability. The most pronounced hardening was observed in Ti0.50Al0.50N, while all the coatings with additional metal elements sustain their hardness better and they are harder than Ti0.50Al0.50N after annealing at 1100¿°C. Fracture toughness properties were extracted from scratch tests. In all tested conditions, as-deposited and annealed at 900 and 1100¿°C, Ti0.33Al0.50Nb0.17N show the least surface and sub-surface damage when scratched despite the differences in decomposition behavior and h-AlN formation. Theoretically estimated ductility of phases existing in the coatings correlates well with their crack resistance. In summary, Ti0.33Al0.50Nb0.17N is the toughest alloy in both as-deposited and post-annealed states.Peer ReviewedPostprint (author's final draft

Thermal and mechanical stability of wurtzite-ZrAlN/cubic-TiN and wurtzite-ZrAlN/cubic-ZrN multilayers

The phase stability and mechanical properties of wurtzite (w)-Zr0.25Al0.75N/cubic (c)-TiN and w-Zr0.25Al0.75N/c-ZrN multilayers grown by arc evaporation are studied. Coherent interfaces with an orientation relation of c-TiN (111)[1-10]||w-ZrAlN (0001)[11-20] form between ZrAlN and TiN sublayers during growth of the w-ZrAlN/c-TiN multilayer. During annealing at 1100 °C a c-Ti(Zr)N phase forms at interfaces between ZrAlN and TiN, which reduces the lattice mismatch so that the coherency and the compressive strain are partially retained, resulting in an increased hardness (32 GPa) after annealing. For the w-ZrAlN/c-ZrN multilayer, there is no coherency between sublayers leading to strain relaxation during annealing causing the hardness to drop. The retained coherency between layers and the compressive strain in the w-ZrAlN/c-TiN multilayer results in superior fracture toughness compared to the w-ZrAlN/c-ZrN multilayer as revealed by cross-sectional investigations of damage events under scratch and indentation tests.Preprin

Growth and thermal stability of TiN/ZrAlN: Effect of internal interfaces

Wear resistant hard films comprised of cubic transition metal nitride (c-TMN) and metastable c-AlN with coherent interfaces have a confined operating envelope governed by the limited thermal stability of metastable phases. However, equilibrium phases (c-TMN and wurtzite(w)-AlN) forming semicoherent interfaces during film growth offer higher thermal stability. We demonstrate this concept for a model multilayer system with TiN and ZrAlN layers where the latter is a nanocomposite of ZrN- and AlN- rich domains. The interfaces between the domains are tuned by changing the AlN crystal structure by varying the multilayer architecture and growth temperature. The interface energy minimization at higher growth temperature leads to formation of semicoherent interfaces between w-AlN and c-TMN during growth of 15 nm thin layers. Ab initio calculations predict higher thermodynamic stability of semicoherent interfaces between c-TMN and w-AlN than isostructural coherent interfaces between c-TMN and c-AlN. The combination of a stable interface structure and confinement of w-AlN to nm-sized domains by its low solubility in c-TMN in a multilayer, results in films with a stable hardness of 34 GPa even after annealing at 1150 °C.Peer Reviewe

Enhanced thermal stability and fracture toughness of TiAlN coatings by Cr, Nb and V-alloying

The effect of metal alloying on mechanical properties including hardness and fracture toughness were investigated in three alloys, Ti~0.33Al0.50(Me)~0.17N (Me¿=¿Cr, Nb and V), and compared to Ti0.50Al0.50N, in the as-deposited state and after annealing. All studied alloys display similar as-deposited hardness while the hardness evolution during annealing is found to be connected to phase transformations, related to the alloy's thermal stability. The most pronounced hardening was observed in Ti0.50Al0.50N, while all the coatings with additional metal elements sustain their hardness better and they are harder than Ti0.50Al0.50N after annealing at 1100¿°C. Fracture toughness properties were extracted from scratch tests. In all tested conditions, as-deposited and annealed at 900 and 1100¿°C, Ti0.33Al0.50Nb0.17N show the least surface and sub-surface damage when scratched despite the differences in decomposition behavior and h-AlN formation. Theoretically estimated ductility of phases existing in the coatings correlates well with their crack resistance. In summary, Ti0.33Al0.50Nb0.17N is the toughest alloy in both as-deposited and post-annealed states.Peer Reviewe

Thermal and mechanical stability of wurtzite-ZrAlN/cubic-TiN and wurtzite-ZrAlN/cubic-ZrN multilayers

The phase stability and mechanical properties of wurtzite (w)-Zr0.25Al0.75N/cubic (c)-TiN and w-Zr0.25Al0.75N/c-ZrN multilayers grown by arc evaporation are studied. Coherent interfaces with an orientation relation of c-TiN (111)[1-10]||w-ZrAlN (0001)[11-20] form between ZrAlN and TiN sublayers during growth of the w-ZrAlN/c-TiN multilayer. During annealing at 1100 °C a c-Ti(Zr)N phase forms at interfaces between ZrAlN and TiN, which reduces the lattice mismatch so that the coherency and the compressive strain are partially retained, resulting in an increased hardness (32 GPa) after annealing. For the w-ZrAlN/c-ZrN multilayer, there is no coherency between sublayers leading to strain relaxation during annealing causing the hardness to drop. The retained coherency between layers and the compressive strain in the w-ZrAlN/c-TiN multilayer results in superior fracture toughness compared to the w-ZrAlN/c-ZrN multilayer as revealed by cross-sectional investigations of damage events under scratch and indentation tests