ON THE ROLE OF INTERFACE DISSIPATION IN MEMS RESONATORS

We address the numeical prediction of anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. Interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed, showing excellent quantitative agreement

Analysis of anchor and interface losses in piezoelectric MEMS resonators

This paper presents a numerical study on anchor and interfacial dissipation in piezoelectric MEMS resonators with in-plane longitudinal-mode vibrations. According to recent proposals, interfacial dissipation is formulated in terms of the stress jump across the interface. A refined dedicated numerical tool is employed both to evaluate anchor losses and to implement the model of interface dissipation. Extensive comparisons with experimental data are performed showing excellent quantitative agreement

A miniature timing microsystem using two silicon resonators

This paper presents a miniature timing microsystem based on a pair of co-integrated low and high frequency silicon resonators -430kHz or 522kHz and 26MHz respectively-so as to implement a W-level accurate, low power, temperature-compensated real time clock (RTC) and to generate low noise, low jitter clocks at any frequency between 1-50MHz in a reconfigurable way at less than 10mW power dissipation