Dielectric constants and phonon modes of amorphous hafnium aluminate deposited by metal organic chemical vapor deposition

Dielectric constants and long-wavelength optical phonon modes of amorphous hafnium aluminate films with a maximum aluminum content of 19 at. % are studied by infrared spectroscopic ellipsometry (IRSE). The hafnium aluminate films were prepared by metal organic chemical vapor deposition on silicon substrates. IRSE revealed one polar lattice mode and one impurity-type mode, which show all a systematic shift in frequency with varying Al content. The static dielectric constant decreases from 10.1 for 4.6 at. % Al to 8.1 for 19 at. % Al. The absolute values were found to be between 50% and 70% smaller than the values obtained from electrical measurements

Tin dioxide sol-gel derived thin films deposited on porous silicon

Undoped and Sb-doped SnO2 sol¿gel derived thin films have been prepared for the first time from tin (IV) ethoxide precursor and SbCl3 in order to be utilised for gas sensing applications where porous silicon is used as a substrate. Transparent, crack-free and adherent layers were obtained on different types of substrates (Si, SiO2/Si). The evolution of the Sn¿O chemical bonds in the SnO2 during film consolidation treatments was monitored by infrared spectroscopy. By energy dispersive X-ray spectroscopy performed on the cross section of the porosified silicon coupled with transmission electron microscopy, the penetration of the SnO2 sol¿gel derived films in the nanometric pores of the porous silicon has been experimentally proved

Nanostructured metal oxides semiconductors for oxygen chemiresistive sensing

Nanostructured metal oxide semiconductors have been widely investigated and are commonly used in gas sensing structures. After a brief review which will be focused on chemiresistive oxygen sensing employing this type of sensing materials, for both room temperature and harsh environment applications (particularly, at high ambient temperature and high relative humidity levels), paper reports new results concerning O2detection of a structure using a sensing layer comprising nanostructured (typical grain size of 50 nm) SrTi0.6Fe0.4O2.8(STFO40), synthesized by sonochemical methods, mixed with single wall carbon nanotubes. The structure is a Microelectromechanical System (MEMS), based on a Silicon-on-Insulator (SOI), Complementary Metal-Oxide-Semiconductor (CMOS)-compatible micro-hotplate, comprising a tungsten heater which allows an excellent control of the sensing layer working temperature. Oxygen detection tests were performed in both dry (RH = 0%) and humid (RH = 60%) nitrogen atmosphere, varying oxygen concentrations between 1% and 20% (v/v), at a constant heater temperature of 650 °C

CMOS-compatible SOI micro-hotplate-based oxygen sensor

© 2016 IEEE. The paper reports upon the design and characterization of a resistive O2 sensor, which is fully CMOS-compatible and is based on an ultra-low-power Silicon on Insulator (SOI) micro-hotplate membrane. The microsensor employs SrTi0.4Fe0.6O2.8 (STFO60) as sensing layer. Thermo-Gravimetric Analysis (TGA) Energy-Dispersive X-ray Spectroscopy (EDX), X-ray Diffraction (XRD) and Scanning Electron Microscope (SEM) techniques have been used to assess the quality of both the sensing layer and STFO-SOI interface. At room temperature, the SOI sensor shows good sensitivity and fast response time (≤ 6 seconds) to O2 concentration ranging from 0% to 20% in a nitrogen atmosphere. This is the first experimental result showing the potential of this structure as O2 sensor

A comprehensive review of swarm optimization algorithms

Many swarm optimization algorithms have been introduced since the early 60’s, Evolutionary Programming to the most recent, Grey Wolf Optimization. All of these algorithms have demonstrated their potential to solve many optimization problems. This paper provides an in-depth survey of well-known optimization algorithms. Selected algorithms are briefly explained, and compared with each other comprehensively through experiments conducted using thirty well-known benchmark functions. Their advantages and disadvantages are also discussed. A number of statistical tests are then carried out to determine the significant performances. The results indicate the overall advantage of Differential Evolution (DE) and is closely followed by Particle Swarm Optimization (PSO), compared with other considered approaches

Series resistance in vertical MOSFETs with reduced drain/source overlap capacitance

In this work we investigate the series resistances in vertical MOSFETs incorporating the fillet local oxidation (FILOX) structure that serves to reduce the gate to drain/source overlap capacitances. The series resistances are modeled analytically and the important influencing factors, namely gate bias dependence and the asymmetric nature of the device, are identified. We extract by simulation, Rd and Rs from devices with different FILOX thicknesses, employing an impedance method often used in RF characterisation. We identify the trade-off whereby thickening the FILOX first causes an increase of the cut-off frequency fT, until the on-current Ion becomes limited by increasing series resistances and fT therefore reduces. The results indicate a thickness of 40nm FILOX for maximum fT. We also investigate the influence of process conditions on low series resistances, namely time of rapid thermal annealing RTA and angle of implantation