A High Stability Optical Shadow Sensor with Applications for Precision Accelerometers

Gravimeters are devices which measure changes in the value of the gravitational acceleration, \textit{g}. This information is used to infer changes in density under the ground allowing the detection of subsurface voids; mineral, oil and gas reserves; and even the detection of the precursors of volcanic eruptions. A micro-electro mechanical system (MEMS) gravimeter has been fabricated completely in silicon allowing the possibility of cost e-effective, lightweight and small gravimeters. To obtain a measurement of gravity, a highly stable displacement measurement of the MEMS is required. This requires the development of a portable electronics system that has a displacement sensitivity of $\leq 2.5$ nm over a period of a day or more. The portable electronics system presented here has a displacement sensitivity $\leq 10$ nm$/\sqrt{\textrm{Hz}}$ ($\leq 0.6$ nm at $1000$ s). The battery power system used a modulated LED for measurements and required temperature control of the system to $\pm$ 2 mK, monitoring of the tilt to $\pm$ 2 $\mu$radians, the storage of measured data and the transmission of the data to an external server.Comment: 8 Pages, 12 figures, 5 equations, currently submitted and under review at IEEE Sensors SIE

A practical MEMS gravimeter

The ability to measure tiny variations in the local gravitational acceleration allows – amongst other applications – the detection of hidden hydrocarbon reserves, magma build-up before volcanic eruptions, and subterranean tunnels. Several technologies are available that achieve the sensitivities required (tens of μGal/√Hz), and stabilities required (periods of days to weeks) for such applications: free-fall gravimeters, spring-based gravimeters, superconducting gravimeters, and atom interferometers. All of these devices can observe the Earth tides; the elastic deformation of the Earth’s crust as a result of tidal forces. This is a universally predictable gravitational signal that requires both high sensitivity and high stability over timescales of several days to measure. All present gravimeters, however, have limitations of excessive cost (£70 k) and high mass (<8 kg). In this thesis, the building of a microelectromechanical system (MEMS) gravimeter with a sensitivity of 40 μGal/√Hz in a package size of only a few cubic centimetres is discussed. MEMS accelerometers – found in most smart phones – can be mass-produced remarkably cheaply, but most are not sensitive enough, and none have been stable enough to be called a ‘gravimeter’. The remarkable stability and sensitivity of the device is demonstrated with a measurement of the Earth tides. Such a measurement has never been undertaken with a MEMS device, and proves the long term stability of the instrument compared to any other MEMS device, making it the first MEMS accelerometer that can be classed as a gravimeter. This heralds a transformative step in MEMS accelerometer technology. Due to their small size and low cost, MEMS gravimeters could create a new paradigm in gravity mapping: exploration surveys could be carried out with drones instead of low-flying aircraft; they could be used for distributed land surveys in exploration settings, for the monitoring of volcanoes; or built into multi-pixel density contrast imaging arrays

MEMS Gravity Sensors for Imaging Density Anomalies

Gravimeters measure small changes in the local gravitational acceleration. They are applied for environmental monitoring, oil and gas prospecting and defence and security. Gravimeters used in these applications have a remarkable sensitivity but at a cost of being bulky and very expensive. Recently, a micro-electrical mechanical system (MEMS) gravimeter has been developed, which was cheap, had a comparable sensitivity to commercial gravimeters and maintained its stability over long timescales (10−6 Hz). In this paper we discuss to replace the current shadow sensor readout with an on-chip interferometer. This new readout has a higher sensitivity so that the device can be more robust and reduces the system size. The design of this readout is discussed and the first experimental results are presented. The new readout improves the imaging capabilities of density anomalies of the device

Field tests of a portable MEMS gravimeter

Gravimeters are used to measure density anomalies under the ground. They are applied in many different fields from volcanology to oil and gas exploration, but present commercial systems are costly and massive. A new type of gravity sensor has been developed that utilises the same fabrication methods as those used to make mobile phone accelerometers. In this study, we describe the first results of a field-portable microelectromechanical system (MEMS) gravimeter. The stability of the gravimeter is demonstrated through undertaking a multi-day measurement with a standard deviation of 5.58 × 10−6 ms−2 . It is then demonstrated that a change in gravitational acceleration of 4.5 × 10−5 ms−2 can be measured as the device is moved between the top and the bottom of a 20.7 m lift shaft with a signal-to-noise ratio (SNR) of 14.25. Finally, the device is demonstrated to be stable in a more harsh environment: a 4.5 × 10−4 ms−2 gravity variation is measured between the top and bottom of a 275-m hill with an SNR of 15.88. These initial field-tests are an important step towards a chip-sized gravity senso

Geometry of the Butterknowle Fault at Bishop Auckland (County Durham, UK), from gravity survey and structural inversion

The Butterknowle Fault is a major normal fault of Dinantian age in northern England, bounding the Stainmore Basin and the Alston Block. This fault zone has been proposed as a source of deep geothermal energy; to facilitate the design of a geothermal project in the town of Bishop Auckland further investigation of its geometry was necessary and led to the present study. We show using three-dimensional modelling of a dense local gravity survey, combined with structural inversion, that this fault has a ramp-flat-ramp geometry, ~250 m of latest Carboniferous / Early Permian downthrow having occurred on a fault surface that is not a planar updip continuation of that which had accommodated the many kilometres of Dinantian extension. The gravity survey also reveals relatively low-density sediments in the hanging-wall of the Dinantian fault, interpreted as porous alluvial fan deposits, indicating that a favourable geothermal target indeed exists in the area. This study demonstrates the value of gravity data for elucidating geological structure, even in a well-studied region such as Britain, and highlights the need to verify published structural interpretations as future deep geothermal projects are designed. Future work of this type might be undertaken more expeditiously using microelectromechanical gravimeters

Microelectromechanical system gravimeters as a new tool for gravity imaging

A microelectromechanical system (MEMS) gravimeter has been manufactured with a sensitivity of 40 ppb in an integration time of 1 s. This sensor has been used to measure the Earth tides: the elastic deformation of the globe due to tidal forces. No such measurement has been demonstrated before now with a MEMS gravimeter. Since this measurement, the gravimeter has been miniaturized and tested in the field. Measurements of the free-air and Bouguer effects have been demonstrated by monitoring the change in gravitational acceleration measured while going up and down a lift shaft of 20.7 m, and up and down a local hill of 275 m. These tests demonstrate that the device has the potential to be a useful field-portable instrument. The development of an even smaller device is underway, with a total package size similar to that of a smartphone

Design and Testing of a MEMS Semi-Absolute Pendulum Gravimeter

Gravimetry has many useful applications from volcanology to oil exploration; being a method able to infer density variations beneath the ground. Therefore, it can be used to provide insight into subsurface processes such as those related to the hydrothermal and magmatic systems of volcanoes. Existing gravimeters are costly and heavy, but this is changing with the utilisation of a technology most notably used in mobile phone accelerometers: MEMS – (Microelectromechanical-systems). A team at the University of Glasgow has already developed a MEMS relative gravimeter and is currently collaborating with multiple European institutions to make a gravity sensor network around Mt Etna - NEWTON-g. A second generation of the MEMS sensor is now being designed and fabricated in the form of a semi-absolute pendulum gravimeter. Gravity data for geodetic and geophysical use were provided by pendulum measurements from the 18th to the 20th century. However, scientists and engineers reached the limit of fabrication tolerances and readout accuracy approximately 100 years ago. With nanofabrication and modern electronics techniques, it is now possible to create a competitive pendulum gravimeter again. In this presentation the design and fabrication techniques of a new MEMS pendulum gravimeter will be outlined. The design comprises two pendula, which oscillate in anti-phase to reduce the influence of seismic noise. Nanofabrication methods have been used to create both flexure and knife-edge pivot points. An optical shadow-sensor has been developed to monitor the position of the pendula. This optical readout can provide measurements to sub-nanometre precision. Data collected from laboratory testing will be presented, demonstrating the progression being made towards a prototype field device. This data will include measurements of the influence of tilt-sensitivity and the seismic and shadow sensor noise floors. Altitude tests of the free-air effect will be presented to demonstrate the current sensitivity of the device. If semi-absolute values of gravity can be measured, then instrumental drift concerns are reduced. Additionally, the need for calibration against commercial absolute gravimeters may not be necessary. This promotes improved accessibility of gravity measurements at an affordable cost

Optical Readout Design for a MEMS Semi-Absolute Pendulum Gravimeter

Gravimetry has many useful applications from volcanology to oil exploration; being a method able to infer density variations beneath the ground. Therefore, it can be used to provide insight into subsurface processes such as those related to the hydrothermal and magmatic systems of volcanoes. Existing gravimeters are costly and heavy, but this is changing with the utilisation of a technology most notably used in mobile phone accelerometers: MEMS –(Microelectromechanical-systems). Glasgow University has already developed a relative MEMS gravimeter and is currently collaborating with multiple European institutions to make a gravity sensor network around Mt Etna - NEWTON-g. A second generation of the MEMS sensor is now being designed and fabricated in the form of a semi-absolute pendulum gravimeter. Gravity data for geodetic and geophysical use were provided by pendulum measurements from the 18th to the 20th century. However, scientists and engineers reached the limit of fabrication tolerances and readout accuracy approximately 100 years ago. With nanofabrication and modern electronics techniques, it is now possible to create a competitive pendulum gravimeter again. The pendulum method is used to determine gravity values from the oscillation period of a pendulum with known length. The current design couples two pendulums together. Here, an optical shadow-sensor pendulum readout technique is presented. This employs an LED and split photodiode set-up. This optical readout can provide measurements to sub-nanometre precision, which could enable gravitational sensitivities for useful geophysical surveying. If semi-absolute values of gravity can be measured, then instrumental drift concerns are reduced. Additionally, the need for calibration against commercial absolute gravimeters may not be necessary. This promotes improved accessibility of gravity measurements at an affordable cost

Investigation of temperature sensitivity of a MEMS gravimeter based on geometric anti-spring

This paper describes a technique for temperature sensitivity or thermal sag measurements of a geometric anti-spring based microelectromechanical system (MEMS) gravimeter (Wee-g). The Wee-g MEMS gravimeter is currently fabricated on a (100) silicon wafer using standard micro-nano fabrication techniques. The thermal behavior of silicon indicates that the Young’s modulus of silicon decreases with increase in temperature (∼64 ppm/K). This leads to a softening of the silicon material, resulting in the proof mass displacing (or sagging) under the influence of increasing temperature. It results in a change in the measured gravity, which is expressed as temperature sensitivity in terms of change in gravity per degree temperature. The temperature sensitivity for the silicon based MEMS gravimeter is found to be 60.14–64.87, 61.76, and 62.76 µGal/mK for experimental, finite element analysis (FEA) simulation, and analytical calculations, respectively. It suggests that the gravimeter's temperature sensitivity is dependent on the material properties used to fabricate the MEMS devices. In this paper, the experimental measurements of thermal sag are presented along with analytical calculations and simulations of the effect using FEA. The bespoke optical measurement system to quantify the thermal sag is also described. The results presented are an essential step toward the development of temperature insensitive MEMS gravimeters

MEMS Gradiometers for Attitude Determination on CubeSats

This paper presents the design, fabrication and testing of a new high sensitivity gravity sensor for attitude determination in CubeSats. The project is a collaboration between the Institute for Gravitational Research at the University of Glasgow and ÅAC-Clyde. The gravitational gradiometer takes advantages of the technology of microelectromechanical systems (MEMS) and determines the attitude of the satellite by a differential gravity measurement, the principle at the base of gravitational gradiometry. The capacitive readout allows to measure the rotation of the MEMS gradiometer and consequently evaluate the angle changes of the CubeSat. The developed geometry consists of two symmetrical masses connected to a fixed support by four thin flexure hinges. The all-Silicon sensor resonates at a frequency of 6 Hz, and has a total mass of less than 2 g. It is expected that the sensor geometry and the readout demonstrated would be suitable to achieve the performances required from CubeSat systems and detect a rotation of the small satellite of 1 degree, in order to offer performance comparable to other state-of-the-art sensors currently available on the market