Multiphysics modelling and experimental validation of microelectromechanical resonator dynamics

The modelling of microelectromechanical systems provides a very challenging task in microsystems engineering. This field of research is inherently multiphysics of nature, since different physical phenomena are tightly intertwined at microscale. Typically, up to four different physical domains are usually considered in the analysis of microsystems: mechanical, electrical, thermal and fluidic. For each of these separate domains, well-established modelling and analysis techniques are available. However, one of the main challenges in the field of microsystems engineering is to connect models for the behavior of the device in each of these domains to equivalent lumped or reduced-order models without making unacceptably inaccurate assumptions and simplifications and to couple these domains correctly and efficiently. Such a so-called multiphysics modelling framework is very important for simulation of microdevices, since fast and accurate computational prototyping may greatly shorten the design cycle and thus the time-to-market of new products. This research will focus on a specific class of microsystems: microelectromechanical resonators. MEMS resonators provide a promising alternative for quartz crystals in time reference oscillators, due to their small size and on-chip integrability. However, because of their small size, they have to be driven into nonlinear regimes in order to store enough energy for obtaining an acceptable signal-to-noise ratio in the oscillator. Since these resonators are to be used as a frequency reference in the oscillator circuits, their steady-state (nonlinear) dynamic vibration behaviour is of special interest. A heuristic modelling approach is investigated for two different MEMS resonators, a clamped-clamped beam resonator and a dog-bone resonator. For the clamped-clamped beam resonator, the simulations with the proposed model shows a good agreement with experimental results, but the model is limited in its predictive capabilities. For the dogbone resonator, the proposed heuristic modelling approach does not lead to a match between simulations and experiments. Shortcomings of the heuristic modelling approach serve as a motivation for a first-principles based approach. The main objective of this research is to derive a multiphysics modelling framework for MEMS resonators that is based on first-principles formulations. The framework is intended for fast and accurate simulation of the steady-state nonlinear dynamic behaviour of MEMS resonators. Moreover, the proposed approach is validated by means of experiments. Although the multiphysics modelling framework is proposed for MEMS resonators, it is not restricted to this application field within microsystems engineering. Other fields, such as (resonant) sensors, switches and variable capacitors, allow for a similar modelling approach. In the proposed framework, themechanical, electrical and thermal domains are included. Since the resonators considered are operated in vacuum, the fluidic domain (squeeze film damping) is not included. Starting from a first-principles description, founded on partial differential equations (PDEs), characteristic nonlinear effects from each of the included domains are incorporated. Both flexural and bulk resonators can be considered. Next, Galerkin discretization of the coupled PDEs takes place, to construct reduced-order models while retaining the nonlinear effects. The multiphysics model consists of the combined reduced-order models from the different domains. Designated numerical tools are used to solve for the steady-state nonlinear dynamic behaviour of the combined model. The proposed semi-analytical (i.e. analytical-numerical) multiphysics modeling framework is illustrated for a full case study of an electrostatically actuated single-crystal silicon clamped-clamped beam MEMS resonator. By means of the modelling framework, multiphysics models of varying complexity have been derived for this resonator, including effects like electrostatic actuation, fringing fields, shear deformation, rotary inertia, thermoelastic damping and nonlinear material behaviour. The first-principles based approach allows for addressing the relevance of individual effects in a straightforward way, such that the models can be used as a (pre-)design tool for dynamic response analysis. The method can be considered complementary to conventional finite element simulations. The multiphysics model for the clamped-clamped beam resonator is validated by means of experiments. A good match between the simulations and experiments is obtained, thereby giving confidence in the proposed modelling framework. Finally, next to themodelling approach for MEMS resonators, a technique for using these nonlinear resonators in an oscillator circuit setting is presented. This approach, called phase feedback, allows for operation of the resonator in its nonlinear regime. The closedloop technique enables control of both the frequency of oscillation and the output power of the signal. Additionally, optimal operation points for oscillator circuits incorporating a nonlinear resonator can be defined

Inductive feeding tube position determination

A new, reliable and inherently safe nasogastric feeding tube position determination system has been developed. The system is particularly useful for preterm born infants. The system uses low-frequency transmit, reflection and receive coils. Transmit and receive coils are positioned in a handheld detection module in such a way that the mutual coupling is minimized, resulting in a good spatial resolution. The reflection coil is positioned at the distal end of the nasogastric feeding tube and uses a diode to double the frequency. The frequency doubling improves the detectability, making it possible to neglect reflected signals at the fundamental frequency. The design is based on analytical sub models and results in a detection accuracy of millimeters

An MR-compatible antenna and application in a murine superficial hyperthermia applicator

In this work, a novel magnetic resonance (MR)-compatible microwave antenna was designed and validated in a small animal superficial hyperthermia applicator. The antenna operates at 2.45 GHz and matching is made robust against production and setup inaccuracies. To validate our theoretical concept, a prototype of the applicator was manufactured and tested for its properties concerning input reflection, sensitivity for setup inaccuracies, environment temperature stability and MR-compatibility. The experiments show that the applicator indeed fulfils the requirements for MR-guided hyperthermia investigation in small animals: it creates a small heating focus (<1 cm3), has a stable and reliable performance (S11< −15 dB) for all working conditions and is MR-compatible

Stationary resonances of optical discs: geometry-induced excitation

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Multi-antenna techniques and beamforming for communication systems

Reconfigurability, efficiency, and power consumption are key areas for improvement in future communication systems. The frequency spectrum is becoming more crowded and the spatial density of users is increasing. It becomes interesting for a communication system to use temporary freedom in the spatial and spectral domain. In this paper, we provide an overview of multi-antenna techniques, which can exploit the spatial degree of freedom, thereby addressing the challenges of flexibility and reconfigurability of front-ends in communication systems. Starting with a general qualification of multi-antenna techniques, their benefits and their goals, we will focus on beamsteering and beamforming techniques and their possible application for communication systems

Adaptive beamforming for cellular base stations

This paper gives a general overview of the work of the Eindhoven University of Technology that is carrier out within PANAMA European project. This project addresses the future communication needs in Europe related to increased e??ciency and energy saving in applications such as cellular handsets, base stations and mobile satellite communications. Additionally, the paper describes the need for adaptive beamforming for downtilt in base transceiver stations and the novel approach to tackle this issue using phase shifters based on RF MEMS