Soft X ray nanoscale imaging using a sub pixel resolution charge coupled device CCD camera

A sub pixel 16 bit charge coupled device camera featuring superresolution for the soft X ray regime is presented. Superresolution images SRIs are reconstructed from a set of 4 4 individual low resolution images that are recorded for different sub pixel shifts of the detector. SRIs have a 1.3 times higher resolution than individual low resolution images which is close to the maximum achievable enhancement factor of about 1.5 in the X ray regime under ideal conditions. To characterize this camera and demonstrate its potential, an X ray microscope setup is used to image different objects at different photon energie