Rugate Filter und Mischschichten für optische Hochleistungskomponenten

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Optical characterisation of hybrid antireflective coatings using spectrophotometric and ellipsometric measurements

A hybrid antireflective coating combining homogeneous layers and linear gradient refractive index layers has been deposited using different techniques. The samples were analysed by optical characterisation based on spectrophotometric and spectroscopic ellipsometric measurements under different angles of incidence in order to precisely characterise the coatings. The Lorentz-Lorenz model has been used for calculation of refractive index of material mixtures in gradient index layers as well as some homogenous parts of the coating. The obtained refractive index profiles have been compared with the targeted ones to detect errors in processes of deposition

Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating

The gradient index coatings and optical filters based on them are a challenge for fabrication. In a round-robin experiment basically the same hybrid antireflection coating for the visible spectral region has been deposited with three different techniques: electron beam evaporation, ion beam sputtering and radio frequency magnetron-sputtering. Spectral performances of such one-side and both-side coated samples have been compared with corresponding theoretical spectra of the designed profile. Also, reproducibility of each process is checked

Development of linear variable filter and black coatings by PARMS technology for FLORIS HR focal plane array of FLEX mission

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