Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube

In this paper we present the first investigation of a batch method for folding of threedimensional micrometer-sized silicon nitride structures by capillary forces. Silicon nitride tubes have been designed and fabricated using DRIE at the center of the planar origami patterns of the structures. Water is brought to the structures by pumping the liquid through the wafer via those tubes. Isolated micro-structures were successfully folded using this method. The potential of this technique for batch self-assembly is discussed

Capillary origami of micro-machined micro-objects: Bi-layer conductive hinges

Recently, we demonstrated controllable 3D self-folding by means of capillary forces of silicon-nitride micro-objects made of rigid plates connected to each other by flexible hinges [1]. In this paper, we introduce platinum electrodes running from the substrate to the plates over these bendable hinges. The fabrication yield is as high as (77 +/- 2) % for hinges with a length less than 75 {\mu}m. The yield reduces to (18 +/- 2) % when the length increases above 100 {\mu}m. Most of the failures in conductivity are due to degradation of the platinum/chromium layer stack during the final plasma cleaning step. The bi-layer hinges survive the capillary folding process, even for extremely small bending radii of 5 {\mu}m, nor does the bending have any impact on the conductivity. Stress in the different layers deforms the hinges, which does not affect the conductivity. Once assembled, the conductive hinges can withstand a current density of (1.6 +/- 0.4) $10^6$ A/cm$^2$ . This introduction of conductive electrodes to elastocapillary self-folded silicon-based micro-objects extends the range of their possible applications by allowing an electronic functionality of the folded parts.Comment: Currently on a peer review process. 13 page

Elastocapillary folding using stop-programmable hinges fabricated by 3D micro-machining

We show elasto-capillary folding of silicon nitride objects with accurate folding angles between flaps of 70.6$\pm$0.1{\deg} and demonstrate the feasibility of such accurate micro-assembly with a final folding angle of 90{\deg}. The folding angle is defined by stop-programmable hinges that are fabricated starting from silicon molds employing accurate three-dimensional corner lithography. This nano-patterning method exploits the conformal deposition and the subsequent timed isotropic etching of a thin film in a 3D shaped silicon template. The technique leaves a residue of the thin film in sharp concave corners which can be used as an inversion mask in subsequent steps. Hinges designed to stop the folding at 70.6{\deg} were fabricated batchwise by machining the V-grooves obtained by KOH etching in (110) silicon wafers; 90{\deg} stop-programmable hinges were obtained starting from silicon molds obtained by dry etching on (100) wafers. The presented technique is applicable to any folding angle and opens a new route towards creating structures with increased complexity, which will ultimately lead to a novel method for device fabrication.Comment: Submitted to a peer reviewed journa

Design fabrication and characterization of an in-plane AFM probe with ultra-sharp silicon nitride tip

Scanning rates of the atomic force microscope (AFM) could be significantly \ud increased by integrating the force sensing probe with microelectromechanical systems (MEMS). We present a micromachining method for batch fabrication of in-plane AFM probes that consist of an ultra-sharp silicon nitride tip on a single \ud crystal silicon cantilever. Our fabrication method is fully compatible with the silicon-on-insulator (SOI) micromachining allowing a straightforward monolithic integration of the AFM probes with high-aspect-ratio monocrystalline silicon MEMS. Scanning probes with a sharp tip having diameter of less then 10 nm are successfully realized and tested in a commercial AFM set-up demonstrating \ud feasibility and the large innovation potential of this method

Fabrication of three-dimensional microstructures using capillary forces

In this paper we describe the fabrication of threedimensional microstructures by means of capillary forces. Using an origami-like technique, planar structures are folded to produce 3D-objects. To this purpose use is made of capillary interactions and surface tension forces. Capillarity is a particularly effective mechanism since it becomes dominant at small scales (where surface tension forces dominate over bulk forces), the process benefits therefore from miniaturization. Planar microstructures of silicon nitride of various geometries with lateral dimensions of about 100 mm and thickness 1 mm and thin hinges for rotation, have been fabricated. Preliminary experiments in which liquid drops are deposited on these structures show that mechanical bending forces can be overcome and that folding out-of-plane can be realized. Capillary folding is therefore shown to be a very promising technique to fabricate 3D micro- and nanostructures

3d Self-Aligned Fabrication of Suspended Nanowires by Crystallographic Nanolithography

Known templating procedures mostly create out-of-plane nanowires where individual connections at both ends are complicated. Here we introduce a templating procedure for wafer scale fabrication of in-plane nanowires. The template fabrication process employs two simple interference lithography masking patterns and relies on self-aligned crystallographic processing. In-plane nanowires with diameters down to 10 nm can be fabricated wafer scale through this 3D templating procedure. As a first demonstration arrays of suspended silicon nitride wires have been created.</p

Direct Integration of Micromachined Pipettes in a Flow Channel for Single DNA Molecule Study by Optical Tweezers

We have developed a micromachined flow cell consisting of a flow channel integrated with micropipettes. The flow cell is used in combination with an optical trap setup (optical tweezers) to study mechanical and structural properties of λ-DNA molecules. The flow cell was realized using silicon micromachining including the so-called buried channel technology to fabricate the micropipettes, the wet etching of glass to create the flow channel,\ud and the powder blasting of glass to make the fluid connections. The volume of the flow cell is 2 µl. The pipettes have a length of 130 m, a width of 5–10 µm, a round opening of 1 um and can be processed with different shapes. Using this flow cell we stretched single molecules (λ-DNA) showing typical force-extension curves also found with conventional techniques. These pipettes can be\ud also used for drug delivery, for injection of small gas bubbles into a liquid flow to monitor the streamlines, and for the mixing of liquids to study diffusion effects. The paper describes the design, the fabrication and testing of the flow cell

Micromachined pipettes integrated in a flow channel for single DNA molecule study by optical trapping

We have developed a micromachined flow cell consisting of a flow channel integrated with micropipettes. The flow cell is used in combination with an optical trap set-up (optical tweezers) to study mechanical and structural properties of λ-DNA molecules. The flow cell was realized using silicon micromachining including the so-called buried channel technology to fabricate the micropipettes, the wet etching of glass to create the flow channel, and the powder blasting of glass to create the fluid connections. The volume of the flow cell is 2 µl. The pipettes have a length of 130 µm, a width of 5-10 µm, a round opening of 1 micron and can be processed with different shapes. Using this flow cell we stretched single molecules (λ-DNA) showing typical force-extension curves also found with conventional techniques

MYD88 mutations identify a molecular subgroup of diffuse large B-cell lymphoma with an unfavorable prognosis

The 2016 World Health Organization classification defines diffuse large B-cell lymphoma (DLBCL) subtypes based on Epstein-Barr virus (EBV) infection and oncogenic rearrangements of MYC/BCL2/BCL6 as drivers of lymphomagenesis. A subset of DLBCL, however, is characterized by activating mutations in MYD88/CD79B. We investigated whether MYD88/CD79B mutations could improve the classification and prognostication of DLBCL. In 250 primary DLBCL, MYD88/CD79B mutations were identified by allele-specific polymerase chain reaction or next-generationsequencing, MYC/BCL2/BCL6 rearrangements were analyzed by fluorescence in situ hybridization, and EBV was studied by EBV-encoded RNA in situ hybridization. Associations of molecular features with clinicopathologic characteristics, outcome, and prognosis according to the International Prognostic Index (IPI) were investigated. MYD88 and CD79B mutations were identified in 29.6% and 12.3%, MYC, BCL2, and BCL6 rearrangements in 10.6%, 13.6%, and 20.3%, and EBV in 11.7% of DLBCL, respectively. Prominent mutual exclusivity between EBV positivity, rearrangements, and MYD88/CD79B mutations established the value of molecular markers for the recognition of biologically distinct DLBCL subtypes. MYD88-mutated DLBCL had a significantly inferior 5-year overall survival than wild-type MYD88 DLBCL (log-rank; P=0.019). DLBCL without any of the studied aberrations had superior overall survival compared to cases carrying .1 aberrancy (log-rank; P=0.010). MYD88 mutations retained their adverse prognostic impact upon adjustment for other genetic and clinical variables by multivariable analysis and improved the prognostic performance of the IPI. This study demonstrates the clinical utility of defining MYD88-mutated DLBCL as a distinct molecular subtype with adverse prognosis. Our data call for sequence analysis of MYD88 in routine diagnostics of DLBCL to optimize classification and prognostication, and to guide the development of improved treatment strategies