Fabrication of Surface Micromachined AlN Piezoelectric Microstructures and its Potential Apllication to RF Resonators

We report on a novel microfabrication method to fabricate aluminum nitride (AlN) piezoelectric microstructures down to 2 microns size by a surface micromachining process. Highly c-axis oriented AlN thin films are deposited between thin Cr electrodes on polysilicon structural layers by rf reactive sputtering. The top Cr layer is used both as a mask to etch the AlN thin films and as an electrode to actuate the AlN piezoelectric layer. The AlN layer is patterned anisotropically by wet etching using a TMAH (25%) solution. This multilayer stack uses silicon-di-oxide as a sacrificial layer to make free-standing structures. One-port scattering paramenter measurement using a network analyzer show a resonant frequency of 1.781 GHz on a clamped-clamped beam suspended structure. The effective electromechanical coupling factor is calculated as 2.4 % and the measured bandwidth is 13.5 MHz for one such a doubly clamped beam (990x30) μm2

Tunable sensor response by voltage-control in biomimetic hair flow sensors

We present an overview of improvements in detection limit and responsivity of our biomimetic hair flow sensors by electrostatic spring-softening (ESS). Applying a DC-bias voltage to our capacitive flow sensors improves the responsively by up to 80% for flow signals at frequencies below the sensor’s resonance. Application of frequency matched AC-bias voltages allows for tunable filtering and selective gain up to 20 dB. Furthermore, the quality and fidelity of low frequency flow measurements can be improved using a non frequency-matched AC-bias voltage, resulting in a flow detection limit down to 5 mm/s at low (30 Hz) frequencies. The merits and applicability of the three methods are discussed

Grated waveguide-based optical cavities as compact sensors for sub-nanometre cantilever deflections, and small refractive-index changes

The paper reports on theoretical and experimental results of integrated optical (IO) cavities defined by grated waveguides in $Si_3N_4$ and Si, for the accurate detection of cantilever deflection and bulk index changes

Optimized biomimetic hair sensor arrays for sensing oscillating air flows

Artificial hair sensor arrays are bio-inspired from flow-sensitive filiform hairs of the crickets, one of nature’s best in sensing small air flows. The presented hair sensor arrays aim to realize higher sensitivities compared to our previous sensor arrays by means of model-based design optimizations and fabricated with advanced MEMS technologies. The artificial hair-sensor arrays display a clear figure-of-eight response and show remarkable sensitivities to oscillating air flows down to 0.85 mm/s surpassing noise levels even at 1 kHz operational bandwidths

Clinical DRUJ instability does not influence the long-term functional outcome of conservatively treated distal radius fractures

Trauma Surger