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research
Grated waveguide-based optical cavities as compact sensors for sub-nanometre cantilever deflections, and small refractive-index changes
Authors
M. Dijkstra
H.J.W.M. Hoekstra
+3Ā more
L.J. Kauppinen
G.J.M. Krijnen
R.M. de Ridder
Publication date
1 January 2008
Publisher
Dublin City University
Abstract
The paper reports on theoretical and experimental results of integrated optical (IO) cavities defined by grated waveguides in
S
i
3
N
4
Si_3N_4
S
i
3
ā
N
4
ā
and Si, for the accurate detection of cantilever deflection and bulk index changes
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Last time updated on 12/07/2023