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2 research outputs found
Nanoscale Magnification and Shape Control System for Precision Overlay in Jet and Flash Imprint Lithography
Author
Anshuman Cherala
Babak Mokaberi
+7Â more
Byung Jin Choi
Dwayne LaBrake
Kosta Selinidis
Mario J. Meissl
Niyaz N. Khusnatdinov
Philip Schumaker
S. V. Sreenivasan
Publication venue
'Institute of Electrical and Electronics Engineers (IEEE)'
Publication date
Field of study
No full text
Crossref
Nanoimprint lithography
Author
Ahn
Ahn
+44Â more
Alkaisi
Bailey
Brooks
Brooks
Chao
Chen
Cheng
Cherala
Choi
Choi
Chou
Chou
Chou
Colburn
Colburn
Colburn
Dauksher
Falco
Hayashi
Holland
Hua
Jeans
Kosta Selinidis
Little
Malloy
Melliar-Smith
Melliar-Smith
Moon
Myron
Otto
Pritschow
Resnick
Resnick
Rogers
Selinidis
Singh
Sirotkin
Smith
Sreenivasan
Wu
Xia
Xu
Yu
Yu
Publication venue
'Elsevier BV'
Publication date
01/01/2014
Field of study
No full text
Crossref
No full text
