Chemical Reaction of Sb Atoms in Si Melt

The oxygen solubilities in undoped and Sb-doped Si Melts have been investigated after quenching. It was found that the oxygen solubility increased with increasing Sb concentration in the Si melt, and the increased oxygen concentration was proportional to the square of the Sb concentration in the Sb-doped Si melt. To explain the phenomenon we suggest that some ordering of Sb_2O existed in the Sb-doped Si melt. The equilibrium constant for the reaction forming Sb_2O in the Sb-doped Si melt was determined to be 6300. It was calculated using the equilibrium constant that the portion of the Sb_2O in the Sb-doped Si melt increased with increase in Sb concentration and/or oxygen concentration in the Si melt.The oxygen solubilities in undoped and Sb-doped Si Melts have been investigated after quenching. It was found that the oxygen solubility increased with increasing Sb concentration in the Si melt, and the increased oxygen concentration was proportional to the square of the Sb concentration in the Sb-doped Si melt. To explain the phenomenon we suggest that some ordering of Sb_2O existed in the Sb-doped Si melt. The equilibrium constant for the reaction forming Sb_2O in the Sb-doped Si melt was determined to be 6300. It was calculated using the equilibrium constant that the portion of the Sb_2O in the Sb-doped Si melt increased with increase in Sb concentration and/or oxygen concentration in the Si melt