High Power Impulse Magnetron Sputtering of CIGS Thin Films for High Efficiency Thin Film Solar Cells

In this work CuIn1-xGaxSe2 (CIGS) thin films with three different values of x (0; 0.28; 1) were preparedby nonreactive sputtering of Cu, In and Ga in HiPIMS (High Power Impulse Magnetron Sputtering) orDC magnetron and subsequently selenized in an Ar+Se atmosphere. Optical emission spectroscopy(OES) was used to monitor some basic plasma parameters during sputtering of metallic precursors. CIGSthin film characteristics were measured using X-ray diffraction (XRD), scanning electron microscopy(SEM), Raman spectroscopy, energy-dispersive X-ray spectroscopy (EDX) and other techniques