Modifying the AFM tip using FIB/GIS in scanning electron microscope

Mikroskopie atomárních sil (AFM) je široce využívanou metodou pozorování povrchové struktury látek. Získávání informací o reliéfu je uskutečňováno pomocí velmi ostrého hrotu upevněného na ohebném držáku. Tím přejíždíme po povrchu a snímáme jeho ohnutí za pomoci odrazu laserového paprsku. Hrot se ovšem tímto procesem opotřebovává, tupí a znečišťuje. Práce se zabývá možností opravy hrotů, které mají stále ještě funkční držáky. Při práci byla využita technika fokusovaného iontového svazku (FIB) a soustava plynných prekurzorů (GIS), které jsou zabudovány v řádkovacím elektronovém mikroskopu (SEM). Byly zkoumány různé postupy a parametry iontového obrábění a depozice. Upravené hroty byly testovány pomocí AFM na pracovišti KFPP. Powered by TCPDF (www.tcpdf.org)Atom force microscopy (AFM) is a widely used imaging method of solids' surface structure. Collecting the information about relief is realized by a very sharp tip fixed on a flexible cantilever. The surface is scanned by this tip and the flexion of the cantilever is recorded using the reflection of a laser ray. The tip gradually becomes blunt, dirty or destroyed by this process. The work deals with a possibility of reparation of such tips, which still have usable cantilevers. We used focused ion beam (FIB) and gas injection system (GIS) which are built in the scanning electron microscope (SEM). We tried various techniques and parameters of ion etching and deposition. The modified tips were tested using the AFM on KFPP workplace. Powered by TCPDF (www.tcpdf.org)Katedra fyziky povrchů a plazmatuDepartment of Surface and Plasma ScienceMatematicko-fyzikální fakultaFaculty of Mathematics and Physic

Tip modification for high-resolution AFM imaging of nanostructures

Atomic force microscopy (AFM) is a young and widely used method of ima- ging surface, nanostructures, biological and other sensitive objects using sharp tip on a flexible cantilever scanning the sample surface. When operating in air it reaches resolution of about several nanometers. The resolution is mainly depen- dent on the used tip. The thesis deals with modification of old tips by carbon nanotubes (CNT) in scanning electron microscope (SEM) using techniques inclu- ding focused ion beam (FIB) and gas injection system (GIS). Several procedures of CNT sample preparation and attaching the CNT on tip are presented. The functionality of modified tips was checked in AFM using the calibration sample consisting of well-defined nanostructures.

Modifying the AFM tip using FIB/GIS in scanning electron microscope

Atom force microscopy (AFM) is a widely used imaging method of solids' surface structure. Collecting the information about relief is realized by a very sharp tip fixed on a flexible cantilever. The surface is scanned by this tip and the flexion of the cantilever is recorded using the reflection of a laser ray. The tip gradually becomes blunt, dirty or destroyed by this process. The work deals with a possibility of reparation of such tips, which still have usable cantilevers. We used focused ion beam (FIB) and gas injection system (GIS) which are built in the scanning electron microscope (SEM). We tried various techniques and parameters of ion etching and deposition. The modified tips were tested using the AFM on KFPP workplace. Powered by TCPDF (www.tcpdf.org