Positioning and Microvibration Control by Electromagnets of an Air Spring Vibration Isolation System

Active positioning and microvibration control has been attempted by electromagnets equipped in a bellows-type, air-spring vibration isolation system. Performance tests have been carried out to study the effects. The main components of the system's isolation table were four electromagnetic actuators and controllers. The vibration isolation table was also equipped with six acceleration sensors for detecting microvibration of the table. The electromagnetic actuators were equipped with bellows-type air springs for passive support of the weight of the item placed on the table, with electromagnets for active positioning, as well as for microvibration control, and relative displacement sensors. The controller constituted a relative feedback system for positioning control and an absolute feedback system for vibration isolation control. In the performance test, a 1,490 kg load (net weight of 1,820 kg) was placed on the vibration isolation table, and both the positioning and microvibration control were carried out electromagnetically. Test results revealed that the vibration transmission was reduced by 95%

Observation of an Unusual Magnetic Anomaly in the Superconducting Mixed State of Heavy-Fermion Compound UBe13 by Precise dc Magnetization Measurements

We have performed precise dc magnetization measurements for a single crystal of UBe13 down to 0.14 K, up to 80 kOe. We observed a magnetic anomaly in the superconducting (SC) mixed state at a field, named H*_[Mag] (～26 kOe, at 0.14 K), implying that UBe13 has a magnetically unusual SC state. We studied the magnetization curves of UBe13, assuming that the H*_[Mag] anomaly originates from (1) and unusual SC diamagnetic response, or (2) a peculiarity of the normal-state magnetization due to vortices in the SC mixed state. The origin of the H*_[Mag] anomaly is discussed

Optical switches for large core diameter optical fibers (POF & PCF)

POF (Plastic Optical Fiber) is more suitable than the quartz optical fiber for indoor LAN (Local Area Network), for example in-home or office networks because of its flexibility and ease of connection by relatively large core diameter.1 x 2 optical switches for indoor LAN using POF have been developed. For switching by movement of a POF, large displacement is necessary as core diameter is large (e.g. 0.486mm). A SMA (shape memory alloy) coil actuator is used for large displacement and a magnetic latching system is used for fixing the position of the shifted POF. Switching speed is less than 0.5 second and the insertion loss of the fabricated switch is 0.40 to 0.50dB. The insertion loss is 0.06 to 0.09dB using index-matching oil. PCF (Plastic Clad Fiber) has also large core diameter (e.g. 0.20mm) and an optical switches using PCF will be useful for short distance network between buildings

Fabrication and Packaging of CMUT Using Low Temperature Co-Fired Ceramic

This paper presents fabrication and packaging of a capacitive micromachined ultrasonic transducer (CMUT) using anodically bondable low temperature co-fired ceramic (LTCC). Anodic bonding of LTCC with Au vias-silicon on insulator (SOI) has been used to fabricate CMUTs with different membrane radii, 24 µm, 25 µm, 36 µm, 40 µm and 60 µm. Bottom electrodes were directly patterned on remained vias after wet etching of LTCC vias. CMUT cavities and Au bumps were micromachined on the Si part of the SOI wafer. This high conductive Si was also used as top electrode. Electrical connections between the top and bottom of the CMUT were achieved by Au-Au bonding of wet etched LTCC vias and bumps during anodic bonding. Three key parameters, infrared images, complex admittance plots, and static membrane displacement, were used to evaluate bonding success. CMUTs with a membrane thickness of 2.6 µm were fabricated for experimental analyses. A novel CMUT-IC packaging process has been described following the fabrication process. This process enables indirect packaging of the CMUT and integrated circuit (IC) using a lateral side via of LTCC. Lateral side vias were obtained by micromachining of fabricated CMUTs and used to drive CMUTs elements. Connection electrodes are patterned on LTCC side via and a catheter was assembled at the backside of the CMUT. The IC was mounted on the bonding pad on the catheter by a flip-chip bonding process. Bonding performance was evaluated by measurement of bond resistance between pads on the IC and catheter. This study demonstrates that the LTCC and LTCC side vias scheme can be a potential approach for high density CMUT array fabrication and indirect integration of CMUT-IC for miniature size packaging, which eliminates problems related with direct integration

Design and characteristics of large displacement optical fiber switch

Plastic optical fiber (POF) is suitable for indoor local area network (LAN), for example, in-home or office networks, because of its flexibility and its ease of connection due to its relatively large core diameter. A 1 2 optical switch for indoor LAN using POF and a shape memory alloy (SMA) coil actuator with magnetic latches was successfully fabricated and tested. In this paper, the design concept and the characteristics of this switch are described. To achieve switching by the movement of a POF, large displacement is necessary because the core diameter is large (e.g., 0.486 mm). A SMA coil actuator is used for large displacement and a magnetic latching system is employed for fixing the position of the shifted POF. For this design, the insertion loss is 0.40 to 0.50 dB and crosstalk is more than 50 dB without index-matching oil. Switching speed is less than 0.5 s at a driving current of 80 mA. A cycling test was performed 1.4 million times at room temperature. Another optical fiber switch was fabricated and successfully actuated using plastic clad fiber (PCF). PCF also has a large core diameter (e.g., 0.20 mm) and optical switches using PCF will be useful for short distance networks between buildings