54 research outputs found

    Helium irradiation effects in polycrystalline Si, silica, and single crystal Si

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    Transmission electron microscopy (TEM) has been used to investigate the effects of room temperature 6 keV helium ion irradiation of a thin (≈55 nm thick) tri-layer consisting of polycrystalline Si, silica, and single-crystal Si. The ion irradiation was carried out in situ within the TEM under conditions where approximately 24% of the incident ions came to rest in the specimen. This paper reports on the comparative development of irradiation-induced defects (primarily helium bubbles) in the polycrystalline Si and single-crystal Si under ion irradiation and provides direct measurement of a radiation-induced increase in the width of the polycrystalline layer and shrinkage of the silica layer. Analysis using TEM and electron energy-loss spectroscopy has led to the hypothesis that these result from helium-bubble-induced swelling of the silicon and radiation-induced viscoelastic flow processes in the silica under the influence of stresses applied by the swollen Si layers. The silicon and silica layers are sputtered as a result of the helium ion irradiation; however, this is estimated to be a relatively minor effect with swelling and stress-related viscoelastic flow being the dominant mechanisms of dimensional change

    Line defects in epitaxial silicon films grown at 560 C

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    We present an investigation of line defects in epitaxially grown silicon layers using Secco defect etching and transmission electron microscopy TEM . 1 m thick layers were deposited onto Si 100 wafers at a substrate temperature of 560 C using electron cyclotron resonance chemical vapour deposition ECRCVD . Defect etching reveals a variety of etch pits related to extended defects. A detailed analysis of the orientations and shapes of etch pits related to line defects is carried out. Using this information it is then possible to assign different types of etch pits to line defects observed by TEM. The investigations show, that one type of defect are extended dislocations parallel to lt;112 gt;, while the direction of two other types are lt;110 gt; as well as lt;314 gt;, a direction uncommon for line defects in silico

    Electrical properties of AlNxOy thin films prepared by reactive magnetron sputtering

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    Direct current magnetron sputtering was used to produce AlNxOy thin films, using an aluminum target, argon and a mixture of N2+O2 (17:3) as reactive gases. The partial pressure of the reactive gas mixture was increased, maintaining the discharge current constant. Within the two identified regimes of the target (metallic and compound), four different tendencies for the deposition rate were found and a morphological evolution from columnar towards cauliflower-type, ending up as dense and featureless-type films. The structure was found to be Al-type (face centered cubic) and the structural characterization carried out by X-ray 2 diffraction and transmission electron microscopy suggested the formation of an aluminumbased polycrystalline phase dispersed in an amorphous aluminum oxide/nitride (or oxynitride) matrix. This type of structure, composition, morphology and grain size, were found to be strongly correlated with the electrical response of the films, which showed a gradual transition between metallic-like responses towards semiconducting and even insulating-type behaviors. A group of films with high aluminum content revealed a sharp decrease of the temperature coefficient of resistance (TCR) as the concentration ratio of non-metallic/aluminum atomic ratio increased. Another group of samples, where the non-metallic content became more important, revealed a smooth transition between positive and negative values of TCR. In order to test whether the oxynitride films have a unique behavior or simply a transition between the typical responses of aluminum and of those of the correspondent nitride and oxide, the electrical properties of the ternary oxynitride system were compared with AlNx and AlOy systems, prepared in similar conditions.This research is sponsored by FEDER funds through the program COMPETE-Programa Operacional Factores de Competitividade, by the national funds through FCT-Fundação para a Ciência e a Tecnologia, under the project PTDC/CTM-NAN/112574/2009 and Programa Pessoa 2010/2011 Cooperação Portugal/França, Proc.º 441.00, Project“COLOURCLUSTER”. J. Borges also acknowledges FCT financial support under PhD grant no. SFRH/BD/47118/2008

    Structure and properties of arc evaporated nanoscale TiN/MoN multilayered systems

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    Using vacuum-arc evaporation method we fabricated periodic multilayered TiN/MoN structures with different bilayer periods λ ranging from 25 to 100 nm. Rutherford backscattering (RBS), X-ray diffraction (XRD), scanning electron microscopy (SEM) as well as transmission electron microscopy (TEM) and microhardness measurements were used for investigations of composition, structure and mechanical properties of the multilayered coatings. We found that molybdenum nitride and titanium nitride layers grown on steel show local partial epitaxy and columnar growth across interfaces. A molybdenum–titanium carbide interlayer was evidenced between the substrate and the multilayer. Molybdenum nitride and titanium nitride layers contain small (5–30 nm) grains and are well crystallized with (100) preferred orientation. They were identified as stoichiometric fcc TiN and cubic γ-Mo2N. Non-cubic molybdenum nitride phases were also detected. The hardness of the obtained structures achieved great values and maximal hardness was 29–31 GPa for multilayered structure with 50 nm period. Hardness of the obtained coatings is 25% higher in comparison with initial single-layer nitride coatings, wherein plasticity index (H/E) of multilayered structure is 0.075

    Properties of Multilayered Nanoscale TiN/MoN Coatings, Fabricated Using Arc Evaporation

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    Using vacuum-arc evaporation method we fabricated periodic multilayered TiN/MoN coatings with different bilayer periods ranging from 8 to 100 nm. We found that MoN and TiN layers grown on steel substrate show local partial epitaxy and columnar growth across interfaces. A Mo-Ti-C interlayer was observed between the substrate and the multilayered coating. MoN and TiN layers contain small (5÷30 nm) grains and are well crystallized with (100) preferred orientation. They were identified as stoichiometric fcc TiN and cubic γ-Mo2N. Non-cubic molybdenum nitride phases were also detected. The hardness of the obtained structures achieved great values and maximal hardness was 31÷41.8 GPa for multilayered structure with 8 nm period. Fabricated coatings are perspective for using as protective coatings in order to improve mechanical characteristics of different construction materials

    Investigation of nanoscale TiN/MoN multilayered systems, fabricated using Arc evaporation

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    Using the vacuum-arc evaporation method we fabricated periodic multilayered TiN/MoN structures with different bilayer periods λ ranging from 8 to 100 nm. We found that molybdenum nitride and titanium nitride layers grown on steel show local partial epitaxy and columnar growth across interfaces. A molybdenum-titanium carbide interlayer was evidenced between the substrate and the multilayer. Molybdenum nitride and titanium nitride layers contain small (5÷30 nm) grains and are well crystallized with (100) preferred orientation. They were identified as stoichiometric fcc TiN and cubic γ-M2N. Non-cubic molybdenum nitride phases were also detected. The hardness of the obtained structures achieved great values and maximal hardness was 31÷41.8 GPa for the multilayered structure with a 8 nm period. Hardness of the obtained coatings is 25÷45% higher in comparison with the initial single-layer nitride coatings, plasticity index of multilayered structure is 0.075

    Structural and optical properties of Ag: TiO2 nanocomposite films prepared by magnetron sputtering

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    Three sets of nanocomposite films consisting of different atomic concentrations of Ag dispersed in a TiO2 dielectric matrix were deposited by DC reactive magnetron sputtering, and subjected to several thermal annealing experiments in vacuum, for temperatures ranging from 200 to 600 ºC. The main goal of the present study is to analyse the optical properties of the as-deposited and annealed films in order to clarify the role of Ag inclusions in the TiO2 dielectric matrix. The influence of the thermal annealing in the structural and morphological evolution was then correlated with the changes in the optical behavior of the samples. Significant structural and morphological changes were observed, consisting on the crystallization of Ag and their clustering. Clusters growth as a function of temperature was also observed by the evolution of the diffractograms with the temperature increase. The present study allowed to conclude that at certain concentrations (close to 10 at. %), the films revealed some important changes on the optical properties, commonly known as Surface Plasmon Resonance, SPR. This change in the optical behavior of the films was found to be in accordance with the clusters growth as concluded from the evolution of the diffraction patterns. The optical changes, and the correspondent Surface Plasmon Resonance effect were confirmed by reflectivity and CIELab colour measurements. The samples with lower Ag content (11 at. % and 7 at. %) show typical interferometric behavior on the reflectivity curves, similar to those of “pure” TiO2 samples. After a minimum of reflectance at 300 nm, there was an increase of the reflectivity at higher wavelengths. For the samples annealed between 400 and 600 °C, a red-shift centered at around 500-550 nm is visible in the absorbance spectrum.Fundação para a Ciência e a Tecnologia (FCT) - PTDC/CTM/ 70037/2006

    Multifilamentary, in-situ Route, Cu-stabilized MgB2 Strands

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    Transport critical current densities and n-values were measured at 4.2 K in fields up to 15 T on 7, 19, and 37-stack multifilamentary MgB2 strands made using an in-situ route. Some strands included SiC additions (particle size 30 nm), while in others Mg-rich compositions were used. Two basic multifilamentary variants were measured, the first had Nb filamentary barriers, the second had Fe filamentary barriers. All samples incorporated stabilizer in the form of Cu 101. Simple, one-step heat treatments were used, with temperatures ranging from 700-800C, and times from 10-30 minutes. Transport critical current densities of 1.75 x 105 A/cm2 were seen at 4.2 K and 5 T in 37 stack strands.Comment: 10 pages, 3 figs, 2 table

    Solenoidal Coils Made from Monofilamentary and Multifilamentary MgB2 strands

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    Three solenoids have been wound and with MgB2 strand and tested for transport properties. One of the coils was wound with Cu-sheathed monofilamentary strand and the other two with a seven filament strand with Nb-reaction barriers, Cu stabilization, and an outer monel sheath. The wires were first S-glass insulated, then wound onto an OFHC Cu former. The coils were then heat treated at 675C/30 min (monofilamentary strand) and 700C/20 min (multifilamentary strand). Smaller (1 m) segments of representative strand were also wound into barrel-form samples and HT along with the coils. After HT the coils were epoxy impregnated. Transport Jc measurements were performed at various taps along the coil lengths. Measurements were made initially in liquid helium, and then as a function of temperature up to 30 K. Homogeneity of response along the coils was investigated and a comparison to the short sample results was made. Each coil contained more than 100 m of 0.84-1.01 mm OD strand. One of the 7 strand coils reached 222 A at 4.2 K, self field, with a Jc of 300 kA/cm2 in the SC and a winding pack Je of 23 kA/cm2. At 20 K these values were 175 kA/cm2 and 13.4 kA/cm2. Magnet bore fields of 1.5 T and 0.87 T were achieved at 4.2 K and 20 K, respectively. The other multifilamentary coil gave similar results.Comment: 22 pages, 8 figures, 2 table
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