3,088 research outputs found

    Investigation Of Ions Accelerated Through Electrostatic Menisci In An Inductively Coupled Plasma

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    Plasmas are used in semiconductor fabrication as they allow for very precise control over processes such as etching and doping. This is achieved by extracting a beam of ions from the plasma to interact with and modify the surface of a silicon wafer. However, conventional fabrication methods are reaching spatial limitations as semiconductor features reach the atomic scale. Therefore, in order to better control the fabrication processes and facilitate the transition to three-dimensional architecture, a greater understanding of ion beam formation is needed. Ion beams are extracted at the boundary between the Debye sheath and an externally applied potential, which forms a unipolar sheath. This boundary, known as the plasma meniscus, is dependent on source parameters and acts as an electrostatic lens for ions that traverse it. This allows for control of ion beam properties through the adjustment of the source parameters that affect the meniscus. Presented here is an investigation into the plasma meniscus and the dependence of its topology on controllable source parameters. The plasma meniscus is formed by graphite extraction optics with a 5 mm square aperture for beam extraction. 12 mm from the aperture is an electrically isolated graphite wafer that is biased to different potentials. Laser induced fluorescence is employed to obtain ion velocity distribution functions: inside the inductively coupled plasma source, at the extraction aperture, and in the downstream ion beam. The use of the confocal telescope allows for first, non-perturbative measurements of ions inside an inductively coupled plasma source. The ion source power is varied (Pf = 1 kW, 2 kW, 3 kW, 4 kW) at different applied wafer bias voltages (Vb = 0 V, 1000 V, 2000 V, 3000 V). Ion temperature, velocity, and relative density are calculated from the ion velocity distribution functions. The ions\u27 speed increases as they travel through the source and form the beam. Additionally, there is a second population of ions that appears near the plasma meniscus. These ions form a beam halo, which hinders the creation of a uniform ion beam. This effect is mitigated at a sufficiently high bias voltage

    Book Reviews and Libel Proceedings

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    The American journal of International Law has been informed of the initiation in France of penal proceedings against the editor in chief of the European journal of International Law (EJIL), by virtue of a complaint filed by an author of a book reviewed on a Web site affiliated with the Ejll.1 We share the concerns of other professional societies regarding the potential of such litigation for chilling academic discourse. 2 We also take this opportunity to explain the practice of the AJIL concerning communications from authors who object to book reviews published in our pages, and to state our position on the important questions of academic freedom involved

    Can Red Clay Go Green? Adapting Law and Policy in the Face of Climate Change, 20th Annual Red Clay Conference

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    Program for the 20th Annual Red Clay Conference held Friday, April 4, 2008 at the University of Georgia School of Law\u27s Dean Rusk Hall

    Defining DNA-based operational taxonomic units for microbial-eukaryote ecology

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    Author Posting. © The Author(s), 2009. This is the author's version of the work. It is posted here by permission of American Society for Microbiology for personal use, not for redistribution. The definitive version was published in Applied and Environmental Microbiology 75 (2009): 5797-5808, doi:10.1128/AEM.00298-09.DNA sequence information has been increasingly used in ecological research on microbial eukaryotes. Sequence-based approaches have included studies of the total diversity of selected ecosystems, the autecology of ecologically relevant species, and the identification and enumeration of species of interest to human health. It is still uncommon, however, to delineate protistan species based on their genetic signatures. The reluctance to assign species-level designations based on DNA sequences is partly a consequence of the limited amount of sequence information presently available for many free-living microbial eukaryotes, and partly the problematic nature and debate surrounding the microbial species concept. Despite the difficulties inherent in assigning species names to DNA sequences, there is a growing need to attach meaning to the burgeoning amount of sequence information entering the literature, and a growing desire to apply this information in ecological studies. We describe a computer-based tool that assigns DNA sequences from environmental databases to operational taxonomic units at approximate species-level distinctions. The approach provides a practical method for ecological studies of microbial eukaryotes (primarily protists) by enabling semiautomated analysis of large numbers of samples spanning great taxonomic breadth. Derivation of the algorithm was based on an analysis of complete small subunit ribosomal RNA (18S) gene sequences and partial gene sequences obtained from GenBank for morphologically described protistan species. The program was tested using environmental 18S data sets from two oceanic ecosystems. A total of 388 operational taxonomic units were observed among 2,207 sequences obtained from samples collected in the western North Atlantic and eastern North Pacific.Support for this manuscript was provided by National Science Foundation grants MCB-0732066, MCB-0703159 and OCE-0550829 and a grant from the Gordon and Betty Moore Foundation

    String Theory and Quantum Chromodynamics

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    I review recent progress on the connection between string theory and quantum chromodynamics in the context of the gauge/gravity duality. Emphasis is placed on conciseness and conceptual aspects rather than on technical details. Topics covered include the large-Nc limit of gauge theories, the gravitational description of gauge theory thermodynamics and hydrodynamics, and confinement/deconfinement thermal phase transitions.Comment: 38 pages, 24 figures. Lectures given at the RTN Winter School on "Strings, Supergravity and Gauge Theories" at CERN on January 15-19, 200
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