SAW RFID devices using connected IDTs as an alternative to conventional reflectors for harsh environments

International audienceRemote interrogation of surface acoustic wave ID-tags imposes a high signal amplitude which is related to a high coupling coefficient value (K 2) and low propagation losses (α). In this paper, we propose and discuss an alternative configuration to the standard one. Here, we replaced the conventional configuration, i.e. one interdigital transducer (IDT) and several reflectors, by a series of electrically connected IDTs. The goal is to increase the amplitude of the detected signal using direct transmission between IDTs instead of the reflection from passive reflectors. This concept can therefore increase the interrogation scope of ID-tags made on conventional substrate with high K 2 value. Moreover, it can also be extended to suitable substrates for harsh environments such as high temperature environments: the materials used exhibit limited performances (low K 2 value and relatively high propagation losses) and are therefore rarely used for identification applications. The concept was first tested and validated using the lithium niobate 128°Y-X cut substrate, which is commonly used in ID-tags. A good agreement between experimental and numerical results was obtained for the promising concept of connected IDTs. The interesting features of the structure were also validated using a langasite substrate, which is well-known to operate at very high temperatures. Performances of both substrates (lithium niobate and langasite) were tested with an in-situ RF characterization up to 600°C. Unexpected results regarding the resilience of devices based on congruent lithium niobate were obtained. Index Terms-high temperature, lithium niobate, radio frequency identification (RFID), surface acoustic wave (SAW

Janus organic semiconductor nanoparticles prepared by simple nanoprecipitation

Nanoparticles (NPs) of donor–acceptor organic semiconductors are produced by a one-step nanoprecipitation with Janus morphology. Electron donor P3HT was blended with electron acceptor PC61BM in tetrahydrofuran and then precipitated in water, first with surfactant and second without surfactant. Cryogenic transmission electron microscopy reveals an internal Janus structure at high magnification, for NPs which have, in the past, been reported to have a molecularly intermixed morphology. Synchrotron-based scanning transmission X-ray microscopy confirmed the segregation of the organic semiconductors and photoluminescence experiments showed an efficient electron transfer from P3HT to PC61BM. Organic field effect transistors were fabricated with these Janus NPs and showed that the positive charges can be efficiently transported through thin films. This behavior proves that the NPs possess an electron-accepting face (the PC61BM face) able to transport electrons and a hole-accepting face (the P3HT face) for the conduction of holes. Finally, the deposition of silver via the photoreduction of a silver salt (AgNO3(aq)) was demonstrated, as a proof of concept. These experiments show the potential of the Janus NPs for photovoltaics but also photocatalytic reactions in which reduction and oxidation reactions can occur at opposite sides of the nanoreactor (the individual Janus NPs).E2SEncres aqueuses colloïdales de semi-conducteurs organiques pour le photovoltaïqu

Simulation et caractérisation de dispositifs SAW multicouches pour des applications de filtrage et de détection

This thesis deals with the design and characterization of multilayer acoustic wave micro-devices. The fifth generation of communication (5G) requires more efficient acoustic resonators (frequencies > 3GHz, wider bandwidth). In this context, we have designed and optimized using FEM simulation, the geometry of Lamb wave resonator based on AlScN. The final device, consisting of a layer composed of 30% Sc and deposited on a Bragg W/SiO2 mirror, shows excellent performance (coupling coefficient of 5% and quality factor of 768) as well as a good agreement with the simulation. To characterize the surface of BAW and SAW over the 5G frequency range, we also designed and developed a heterodyne interferometer. The latter has been used successfully to characterize surface vibrations with amplitudes between 1 and 10 pm at 5.95 GHz. Furthermore, thanks to their robustness and ability to be wirelessly interrogated,SAW sensors are used in harsh environments and are of great interest for medical applications and structural health monitoring. Recently, the introduction of multi-material stacks offers new development opportunities. We thus studied a pressure sensor composed of two complementary layers, as well as a so-called package- less sensor using different acoustic impedance layers. To design these new sensors, we have developed a simulation tool based on the extraction of mode coupling parameters and taking into account the effects of temperature, stresses and strains to estimate their sensitivity.Cette thèse porte sur la conception et la caractérisation de micro-dispositifs à ondes acoustiques multicouches. La cinquième génération de communication (5G) nécessite des résonateurs acoustiques plus performants (fréquences > 3GHz, bande passante plus large). Dans ce contexte, nous avons conçu et optimisé par simulation FEM la géométrie de résonateurs à ondes de Lamb à base d’AlScN. Le dispositif final, constitué d’une couche composée de 30% de Sc et déposée sur un miroir de Bragg W/SiO2, montre d’excellentes performances (coefficient de couplage de 5% et facteur de qualité de 768) et un bon accord avec la simulation. Pour caractériser la surface de BAW et SAW sur la gamme de fréquence 5G, nous avons également conçu et développé un interféromètre hétérodyne. Ce dernier a été utilisé avec succès pour caractériser des vibrations de surface d'une amplitude comprise entre 1 et 10 pm à 5,95 GHz. Par ailleurs, grâce à leur robustesse et leur capacité à être interrogé sans-fil, les capteurs SAW sont utilisés dans des environnements difficiles et suscitent un grand intérêt pour les applications médicales et de contrôle de santé intégré. Récemment, l’introduction d’empilements multi-matériaux offre de nouvelles opportunités de développements. Nous avons ainsi étudié un capteur de pression composé de deux couches complémentaires, ainsi qu'un capteur dit package-less utilisant des couches d’impédances acoustiques différentes. Pour concevoir ces nouveaux capteurs, nous avons développé un outil de simulation reposant sur l'extraction de paramètres de couplage de modes et tenant compte des effets de la température, des contraintes et des déformations pour estimer leur sensibilité

Multilayered, Package-Less SAW Sensors: Latest Developments

Passive and wireless SAW sensors can operate in extreme environment. However, there is no mass-market application for this technology yet, due notably to the lack of an adequate sensor housing solution. Package-less SAW sensors are therefore promising. Here, guided waves that propagate in a protective multilayer structure are used, instead of SAWs. However, issues will arise from the use of a multilayer structure. In particular, thermo-mechanical effects will impact the behavior of the devices. A solution must also be found to embed the antenna in the stack. We present here the results of a numerical study of the thermo-mechanical effects, in two package-less structures. One possible antenna design is proposed and evaluated

Analysis of the sensitivity to pressure and temperature of a membrane based SAW sensor

This paper presents a FEM analysis of a membrane-based Surface Acoustic Wave (SAW) sensor. The sensor is a 2.45GHz Reflective Delay Line (R-DL) based on Lithium Niobate (LiNbO3). As the wave propagation time is much smaller than the typical time constant of the phenomena to be monitored (deformation, temperature change etc.), the analysis can be performed in three successive steps. First, a static FEM study of the complete sensor (housing included) is carried out, to compute the temperature, stress and strain fields generated in the sensitive area by the measured parameters (pressure, temperature, etc.). Then, a dynamic electro-mechanical study of the R-DL is performed. The simulation takes the previously computed fields into account, which makes it possible to compute the sensor sensitivity to the measured parameters. The model takes advantage of the periodicity of the components of the R-DL to compute phenomenological parameters (Coupling-of-Mode parameters), which can later on be used to compute the electrical response of the sensor (step 3). In this paper, we focus on the first two steps. The COM parameters are extracted, under simultaneous thermal and mechanical stresses. Especially, the sensor sensitivity is obtained from the evolution of the velocity, under various stress configurations

Laser Actuated Microgripper Using Optimized Chevron-Shaped Actuator

International audienceIn this paper, we propose a laser actuated microgripper that can be activated remotely for micromanipulation applications. The gripper is based on an optothermally actuated polymeric chevron-shaped structure coated with optimized metallic layers to enhance its optical absorbance. Gold is used as a metallic layer due to its good absorption of visible light. The thermal deformation of the chevron-shaped actuator with metallic layers is first modeled to identify the parameters affecting its behavior. Then, an optimal thickness of the metallic layers that allows the largest possible deformation is obtained and compared with simulation results. Next, microgrippers are fabricated using conventional photolithography and metal deposition techniques for further characterization. The experiments show that the microgripper can realize an opening of 40 µm, a response time of 60 ms, and a generated force in the order of hundreds of µN. Finally, a pick-and-place experiment of 120 µm microbeads is conducted to confirm the performance of the microgripper. The remote actuation and the simple fabrication and actuation of the proposed microgripper makes it a highly promising candidate to be utilized as a mobile microrobot for lab-on-chip applications

Laser Actuated Microgripper Using Optimized Chevron-Shaped Actuator

International audiencetIn this paper, we propose a laser actuated microgripper that can be activated remotely formicromanipulation applications. The gripper is based on an optothermally actuated polymeric chevron-shaped structure coated with optimized metallic layers to enhance its optical absorbance. Gold is used as a metallic layer due to its good absorption of visible light. The thermal deformation of the chevron-shaped actuator with metallic layers is first modeled to identify the parameters affecting its behavior. Then, an optimal thickness of the metallic layers that allows the largest possible deformation is obtained and comparedwith simulation results. Next, microgrippers are fabricated using conventional photolithography and metal deposition techniques for further characterization. The experiments show that the microgripper can realize an opening of 40 µm, a response time of 60 ms, and a generated force in the order of hundreds of µN. Finally, a pick-and-place experiment of 120 µm microbeads is conducted to confirm the performance of the microgripper. The remote actuation and the simple fabrication and actuation of the proposed microgripper makes it a highly promising candidate to be utilized as a mobile microrobot for lab-on-chip application

Laser Actuated Microgripper for Micro-manipulation Applications

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Free standing and solidly mounted Lamb wave resonators based on Al0.85Sc0.15N thin film

Lamb wave microresonators with wavelengthsof 5-8m, vibrating in the S0 mode, and having 75 electrode pairs were fabricated and characterized. The results were compared to theoretical predictions obtained by finite element simulation. The active material was a 1m-thick Al0.85Sc0.15N thin film. Two types of acoustic isolation solutions were implemented: the first one with freestanding plates fixed by two bridges to a device frame [freestanding Lamb wave resonator (FS-LWR)] and the second one containing an acoustic W/SiO2 5-layer reflector [solidly mounted Lamb wave resonator (SM-LWR)]. All devices showed excellent agreement with FEM predictions, regarding resonance frequency and piezoelectric coupling. The quality factors of the SM-LWR devices were 5-6 times larger than the ones of the freestanding structures fabricated by the same Al0.85Sc0.15N deposition process: we achieved a figure of merit of 12-18 (Q(p) = 771, Q(s) = 507, k(2) = 2.29%) at an operation frequency of 1430MHz, which is so far the best performance realized with a MEMS Lamb wave resonator having a large number of electrode fingers. This performance opens up perspectives for filter applications