0-level Vacuum Packaging RT Process for MEMS Resonators

A new Room Temperature (RT) 0-level vacuum package is demonstrated in this work, using amorphous silicon (aSi) as sacrificial layer and SiO2 as structural layer. The process is compatible with most of MEMS resonators and Resonant Suspended-Gate MOSFET [1] fabrication processes. This paper presents a study on the influence of releasing hole dimensions on the releasing time and hole clogging. It discusses mass production compatibility in terms of packaging stress during back-end plastic injection process. The packaging is done at room temperature making it fully compatible with IC-processed wafers and avoiding any subsequent degradation of the active devices.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing

Identification of diverse database subsets using property-based and fragment-based molecular descriptions

This paper reports a comparison of calculated molecular properties and of 2D fragment bit-strings when used for the selection of structurally diverse subsets of a file of 44295 compounds. MaxMin dissimilarity-based selection and k-means cluster-based selection are used to select subsets containing between 1% and 20% of the file. Investigation of the numbers of bioactive molecules in the selected subsets suggest: that the MaxMin subsets are noticeably superior to the k-means subsets; that the property-based descriptors are marginally superior to the fragment-based descriptors; and that both approaches are noticeably superior to random selection

Tuneable Capacitor based on dual picks profile of the sacrificial layer

In this paper, we present a novel dual gap tuneable capacitor process based on the profile of the sacrificial layer. This profile involves a tri-layer photo-resist process with only one mask level. This realization is based on a special profile of the sacrificial layer designed by two picks. The mechanism of the sacrificial layer realisation is dependent on resist thickness, resist formulation (viscosity, type of polymer and/or solvent, additives...), design of the patterned layer (size or width) and the conditions under which this layer is prepared: thermal treatment, etch back processes... In this communication we demonstrate influence of the later parameters and discuss how a dual pick profile was achieved.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing

MEMS tunable capacitors with fragmented electrodes and rotational electro-thermal drive

This paper reports on the design, simulation and fabrication of tunable MEMS capacitors with fragmented metal (AlSi 4%) electrodes. We examine a rotational electro-thermal actuation. An analytic model of the rotational effect thermal actuator was established in order to show the periodicity of the capacitance when the angle increases. Evaluation of the impact of fringing fields on the capacitance has been carried out using finite element analysis (FEA). The MEMS capacitors were fabricated using metal surface micromachining with polyimide sacrificial layer. The maximum rotation, corresponding to a maximum angle of 7°, was obtained near 1.2V and 299mA. The proposed capacitor has a practical tuning range of 30%. FEA has shown that this figure can be improved with design optimization. The MEMS architecture based on rotational effect and fragmented electrodes does not suffer from the pull in effect and offers a practical solution for future above-IC capacitor

Development of a novel small antibody that retains specificity for tumor targeting

<p>Abstract</p> <p>Background</p> <p>For the targeted therapy of solid tumor mediated by monoclonal antibody (mAb), there have different models of rebuilding small antibodies originated from native ones. Almost all natural antibody molecules have the similar structure and conformation, but those rebuilt small antibodies cannot completely keep the original traits of parental antibodies, especially the reduced specificity, which gravely influences the efficacy of small antibodies.</p> <p>Methods</p> <p>In this study, authors developed a novel mimetic in the form of V_HFR1_C-10-V_HCDR1-V_HFR2-V_LCDR3-V_LFR4_N-10for a parental mAb induced with human breast cancer, and the mimetic moiety was conjugated to the C-terminal of toxicin colicin Ia. The novel fusion peptide, named protomimecin (PMN), was administered to MCF-7 breast cancer cells to demonstrate its killing competency <it>in vitro </it>and <it>in vivo</it>.</p> <p>Results</p> <p>Compared with original antibody-colicin Ia (Fab-Ia) and single-chain antibody-colicin Ia (Sc-Ia) fusion proteins, PMN retained the targeting specificity of parental antibody and could specifically kill MCF-7 cells <it>in vitro</it>. By injecting intraperitoneally into BALB/c athymic mice bearing MCF-7 tumors, with reduced affinity, PMN significantly suppressed the growth of tumors compared with control mice treated by toxicin protein, Fab-Ia protein, Sc-Ia protein or by PBS (<it>p </it>< 0.05).</p> <p>Conclusion</p> <p>This novel mimetic antibody retained original specificity of parental antibody, and could effectively guide killer moiety to suppress the growth of breast cancer by targeted cell death.</p

Novel forms of protein glycosylation

A large number of new glycans, derived from glycoproteins, has been characterized in the past few years. O-linked fucose was found in epidermal growth factor-like domains of several proteins. For the N-linked glycans of Helix pomatia hemocyanin, novel types of antennae were identified. The positions of noncarbohydrate substituents were established in N-glycans. C-mannosylation of a tryptophan residue was discovered in human ribonuclease 2 and is the first example of C-glycosylation in glycoproteins

MEMS TUNABLE CAPACITORS WITH FRAGMENTED ELECTRODES AND ROTATIONAL ELECTRO-THERMAL DRIVE

Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/5920)International audienceThis paper reports on the design, simulation and fabrication of tunable MEMS capacitors with fragmented metal (AlSi 4%) electrodes. We examine a rotational electro-thermal actuation. An analytic model of the rotational effect thermal actuator was established in order to show the periodicity of the capacitance when the angle increases. Evaluation of the impact of fringing fields on the capacitance has been carried out using finite element analysis (FEA). The MEMS capacitors were fabricated using metal surface micromachining with polyimide sacrificial layer. The maximum rotation, corresponding to a maximum angle of 7°, was obtained near 1.2 V and 299 mA. The proposed capacitor has a practical tuning range of 30 %. FEA has shown that this figure can be improved with design optimization. The MEMS architecture based on rotational effect and fragmented electrodes does not suffer from the pull-in effect and offers a practical solution for future above-IC capacitor