20 research outputs found
Micro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture
This study is focused on the mechanical characterization of materials used in
microelectronic and micro- electromechanical systems (MEMS) devices. In order
to determine their mechanical parameters, a new deformation bench test with
suitable micromachined specimens have been developed. Uniaxial tensile tests
were performed on "low cost" specimens, consisting in electroplated thin copper
films and structures, deposited on a polimide type substrate. Moreover, a
cyclic mechanical actuation via piezoelectric actuators was tested on the same
deformation bench. These experiments validate the device for performing dynamic
characterization of materials, and reliability studies of different
microstructures.Comment: Submitted on behalf of EDA Publishing Association
(http://irevues.inist.fr/handle/2042/16838
Recommended from our members
The Galaxy platform for accessible, reproducible, and collaborative data analyses: 2024 update
YesGalaxy (https://galaxyproject.org) is deployed globally, predominantly through free-to-use services, supporting user-driven research that broadens in scope each year. Users are attracted to public Galaxy services by platform stability, tool and reference dataset diversity, training, support and integration, which enables complex, reproducible, shareable data analysis. Applying the principles of user experience design (UXD), has driven improvements in accessibility, tool discoverability through Galaxy Labs/subdomains, and a redesigned Galaxy ToolShed. Galaxy tool capabilities are progressing in two strategic directions: integrating general purpose graphical processing units (GPGPU) access for cutting-edge methods, and licensed tool support. Engagement with global research consortia is being increased by developing more workflows in Galaxy and by resourcing the public Galaxy services to run them. The Galaxy Training Network (GTN) portfolio has grown in both size, and accessibility, through learning paths and direct integration with Galaxy tools that feature in training courses. Code development continues in line with the Galaxy Project roadmap, with improvements to job scheduling and the user interface. Environmental impact assessment is also helping engage users and developers, reminding them of their role in sustainability, by displaying estimated CO2 emissions generated by each Galaxy job.NIH [U41 HG006620, U24 HG010263, U24 CA231877, U01 CA253481]; US National Science Foundation [1661497, 1758800, 2216612]; computational resources are provided by the Advanced Cyberinfrastructure Coordination Ecosystem (ACCESS-CI), Texas Advanced Computing Center, and the JetStream2 scientific cloud. Funding for open access charge: NIH. ELIXIR IS and Travel grants; EU Horizon Europe [HORIZON-INFRA-2021-EOSC-01-04, 101057388]; EU Horizon Europe under the Biodiversity, Circular Economy and Environment program (REA.B.3, BGE 101059492); German Federal Ministry of Education and Research, BMBF [031 A538A de.NBI-RBC]; Ministry of Science, Research and the Arts Baden-WĂŒrttemberg (MWK) within the framework of LIBIS/de.NBI Freiburg. Galaxy Australia is supported by the Australian BioCommons which is funded through Australian Government NCRIS investments from Bioplatforms Australia and the Australian Research Data Commons, as well as investment from the Queensland Government RICF program.Please note, contributors are listed in alphabetical order
Recommended from our members
The Galaxy platform for accessible, reproducible, and collaborative data analyses: 2024 update
YesGalaxy (https://galaxyproject.org) is deployed globally, predominantly through free-to-use services, supporting user-driven research that broadens in scope each year. Users are attracted to public Galaxy services by platform stability, tool and reference dataset diversity, training, support and integration, which enables complex, reproducible, shareable data analysis. Applying the principles of user experience design (UXD), has driven improvements in accessibility, tool discoverability through Galaxy Labs/subdomains, and a redesigned Galaxy ToolShed. Galaxy tool capabilities are progressing in two strategic directions: integrating general purpose graphical processing units (GPGPU) access for cutting-edge methods, and licensed tool support. Engagement with global research consortia is being increased by developing more workflows in Galaxy and by resourcing the public Galaxy services to run them. The Galaxy Training Network (GTN) portfolio has grown in both size, and accessibility, through learning paths and direct integration with Galaxy tools that feature in training courses. Code development continues in line with the Galaxy Project roadmap, with improvements to job scheduling and the user interface. Environmental impact assessment is also helping engage users and developers, reminding them of their role in sustainability, by displaying estimated CO2 emissions generated by each Galaxy job.NIH [U41 HG006620, U24 HG010263, U24 CA231877, U01 CA253481]; US National Science Foundation [1661497, 1758800, 2216612]; computational resources are provided by the Advanced Cyberinfrastructure Coordination Ecosystem (ACCESS-CI), Texas Advanced Computing Center, and the JetStream2 scientific cloud. Funding for open access charge: NIH. ELIXIR IS and Travel grants; EU Horizon Europe [HORIZON-INFRA-2021-EOSC-01-04, 101057388]; EU Horizon Europe under the Biodiversity, Circular Economy and Environment program (REA.B.3, BGE 101059492); German Federal Ministry of Education and Research, BMBF [031 A538A de.NBI-RBC]; Ministry of Science, Research and the Arts Baden-WĂŒrttemberg (MWK) within the framework of LIBIS/de.NBI Freiburg. Galaxy Australia is supported by the Australian BioCommons which is funded through Australian Government NCRIS investments from Bioplatforms Australia and the Australian Research Data Commons, as well as investment from the Queensland Government RICF program
InïŹuence of microstructure and internal stress on the mechanical behavior of electroplated gold freestanding thin ïŹlms
Mechanical properties of freestanding electroplated gold thin ïŹlms were studied
in relationship to their geometrical and microstructural properties. Three
diïŹerent techniques of characterization were used: nanoindentation, bulge tests
and microtensile tests. Results were compared to literature and also discussed
according to physical phenomena related to the elaboration process of the
specimens like seed layer exodiïŹusion or internal stress state. The observed
plasticity and failure mechanisms were found to be in good agreement with the
literature and are consistent with the microstructure. The measured Youngâs
modulus is slightly higher than expected, and SIMS analysis is exploited to
explain such a high value
Experimental setup and realization of thin film specimens for microtensile tests
International audienceThis paper describes a microtensile test system and the design as the realization of the samples dedicated to the tensile experiments. Two different technologies for the development of miniaturized specimens are detailed: self-standing tensile samples sustained by silicon frames and metal on polymer specimens obtained by laser cutting. The design of the samples has been optimized by means of finite element simulations. Aluminum beams with very large length on thickness ratio have been released from their silicon substrate using a standard etching process. Stress/strain curves are derived from experimental force/displacement values and discussed in terms of Young's modulus values and critical parameters (flow and rupture stresses)
New experimental approach for measuring the electrical contact resistance with an accurate mechanical actuation - Evaluation of the performances of Gold micro-switches.
International audienc
Contact resistance determination with nanoindentation tools.
International audienc
Mechanical cycling for electrical performances of materials used in MEMS: application to gold microswitches
International audienc