Metal Films as Mass Standard Samples in the Nano-Gram Range

Attestation of magnetron sputtered films as mass standards is presented. Homogeneous, long-lived metal films were measured by different methods for comparison. The accuracy of the order 1 ng was found to be provided by application of the metal film standards for element analysis by X-ray fluorescent method. Keywords: Thin Films, Nano-Standards, Magnetron Sputtering, X-ray Reflectometry, X-ray Fluorescent When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/3516

High-stable standard samples of mass in the nano-gram range

High-stable mass standards prepared as magnetron sputtered super-smooth metal layers deposited on single crystal substrates were attested. The thin film standards were found to meet the requirements to government standards: they are homogeneous, long-lived, and can be attested by several independent methods. Using the standards, the measurement accuracy is provided not worse than 1 ng in the range from 1 to 17 ng, and not worse than 8 ng in the range from 17 to 3800 ng