Attestation of magnetron sputtered films as mass standards is presented. Homogeneous, long-lived
metal films were measured by different methods for comparison. The accuracy of the order 1 ng was found
to be provided by application of the metal film standards for element analysis by X-ray fluorescent method.
Keywords: Thin Films, Nano-Standards, Magnetron Sputtering, X-ray Reflectometry, X-ray Fluorescent
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