Ion beam sputter etching

An ion beam etching process which forms extremely high aspect ratio surface microstructures using thin sputter masks is utilized in the fabrication of integrated circuits. A carbon rich sputter mask together with unmasked portions of a substrate is bombarded with inert gas ions while simultaneous carbon deposition occurs. The arrival of the carbon deposit is adjusted to enable the sputter mask to have a near zero or even slightly positive increase in thickness with time while the unmasked portions have a high net sputter etch rate

Atomic oxygen interaction with solar array blankets at protective coating defect sites

Atomic oxygen in the low-Earth-orbital environment oxidizes SiOx protected polyimide Kapton solar array blankets at sites which are not protected such as pin windows or scratches in the protective coatings. The magnitude and shape of the atomic oxygen undercutting which occurs at these sites is dependent upon the exposure environment details such as arrival direction and reaction probability. The geometry of atomic oxygen undercutting at defect sites exposed to atomic oxygen in plasma asher was used to develop a Monte Carlo model to simulate atomic oxygen erosion processes at defect sites in protected Kapton. Comparisons of Monte Carlo predictions and experimental results are presented for plasma asher atomic oxygen exposures for large and small defects as well as for protective coatings on one or both sides of Kapton. The model is used to predict in-space exposure results at defect sites for both directed and sweeping atomic oxygen exposure. A comparison of surface textures predicted by the Monte Carlo model and those experimentally observed from both directed space ram and laboratory plasma asher atomic oxygen exposure indicate substantial agreement

The use of plasma ashers and Monte Carlo modeling for the projection of atomic oxygen durability of protected polymers in low Earth orbit

The results of ground laboratory and in-space exposure of polymeric materials to atomic oxygen has enabled the development of a Monte Carlo computational model which simulates the oxidation processes of both environments. The cost effective projection of long-term low-Earth-orbital durability of protected polymeric materials such as SiO(x)-coated polyimide Kapton photovoltaic array blankets will require ground-based testing to assure power system reliability. Although silicon dioxide thin film protective coatings can greatly extend the useful life of polymeric materials in ground-based testing, the projection of in-space durability based on these results can be made more reliable through the use of modeling which simulates the mechanistic properties of atomic oxygen interaction, and replicates test results in both environments. Techniques to project long-term performance of protected materials, such as the Space Station Freedom solar array blankets, are developed based on ground laboratory experiments, in-space experiments, and computational modeling

The NASA atomic oxygen effects test program

The NASA Atomic Oxygen Effects Test Program was established to compare the low earth orbital simulation characteristics of existing atomic oxygen test facilities and utilize the collective data from a multitude of simulation facilities to promote understanding of mechanisms and erosion yield dependence upon energy, flux, metastables, charge, and environmental species. Four materials chosen for this evaluation include Kapton HN polyimide, FEP Teflon, polyethylene, and graphite single crystals. The conditions and results of atomic oxygen exposure of these materials is reported by the participating organizations and then assembled to identify degrees of dependency of erosion yields that may not be observable from any single atomic oxygen low earth orbital simulation facility. To date, the program includes 30 test facilities. Characteristics of the participating test facilities and results to date are reported

Neutral atomic oxygen beam produced by ion charge exchange for Low Earth Orbital (LEO) simulation

A low energy neutral atomic oxygen beam system was designed and is currently being assembled at the Lewis Research Center. The system utilizes a 15 cm diameter Kaufman ion source to produce positive oxygen ions which are charge exchange neutralized to produce low energy (variable from 5 to 150 eV) oxygen atoms at a flux simulating real time low Earth orbital conditions. An electromagnet is used to direct only the singly charged oxygen ions from the ion source into the charge exchange cell. A retarding potential grid is used to slow down the oxygen ions to desired energies prior to their charge exchange. Cryogenically cooled diatomic oxygen gas in the charge exchange cell is then used to transfer charge to the oxygen ions to produce a neutral atomic oxygen beam. Remaining non-charge exchanged oxygen ions are then swept from the beam by electromagnetic or electrostatic deflection depending upon the desired experiment configuration. The resulting neutral oxygen beam of 5 to 10 cm in diameter impinges upon target materials within a sample holder fixture that can also provide for simultaneous heating and UV exposure during the atomic oxygen bombardment

G08-1489 Drinking Water Treatment: Activated Carbon Filtration

Activated carbon filtration can effectively reduce certain organic compounds and chlorine in drinking water. It can also reduce the quantity of lead, dissolved radon, and harmless taste- and odor-causing compounds. This 2008 NebGuide discusses the principles, processes, and requirements of activated carbon filtration systems for the domestic (household) user

Atomic oxygen protective coating with resistance to undercutting at defect sites

Structures composed at least partially of an organic substrate may be protected from oxidation by applying a catalyst onto said substrate for promoting the combination of atomic oxygen to molecular oxygen. The structure may also be protected by applying both a catalyst and an atomic oxygen shielding layer onto the substrate. The structures to be protected include spacecraft surfaces

Simulation of the low earth orbital atomic oxygen interaction with materials by means of an oxygen ion beam

Atomic oxygen is the predominant species in low-Earth orbit between the altitudes of 180 and 650 km. These highly reactive atoms are a result of photodissociation of diatomic oxygen molecules from solar photons having a wavelength less than or equal to 2430A. Spacecraft in low-Earth orbit collide with atomic oxygen in the 3P ground state at impact energies of approximately 4.2 to 4.5 eV. As a consequence, organic materials previously used for high altitude geosynchronous spacecraft are severely oxidized in the low-Earth orbital environment. The evaluation of materials durability to atomic oxygen requires ground simulation of this environment to cost effectively screen materials for durability. Directed broad beam oxygen sources are necessary to evaluate potential spacecraft materials performance before and after exposure to the simulated low-Earth orbital environment. This paper presents a description of a low energy, broad oxygen ion beam source used to simulate the low-Earth orbital atomic oxygen environment. The results of materials interaction with this beam and comparison with actual in-space tests of the same meterials will be discussed. Resulting surface morphologies appear to closely replicate those observed in space tests

Method and apparatus for producing a thermal atomic oxygen beam

Atomic oxygen atoms are routed to a material through a sufficiently tortuous path so that vacuum ultraviolet radiation is obstructed from arriving at the surface of the material. However, the material surface continues to be exposed to the atomic oxygen