795 research outputs found

    Grazing Incidence Mirrors for EUV Lithography

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    Corrosion and tribological performance of quasi-stoichiometric titanium containing carbo-nitride coatings

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    Zr, Nb and Si doped TiCN coatings, with (C+N)/(metal + Si) ratios of approximately 1, were deposited on stainless steel and Si wafer substrates using a cathodic arc technique in a mixture of N2 and CH4 gases. The coatings were comparatively analysed for elemental and phase composition, adhesion, anticorrosive properties and tribological performance at ambient and 250 °C. Zr, Nb and Si alloying contents in the coatings were in the range 2.9–9.6 at.%. All the coatings exhibited f.c.c. solid solution structures and had a 〈111âŒȘ preferred orientation. In the adhesion tests conducted, critical loads ranged from 20 to 30 N, indicative of a good adhesion to substrate materials. The Ti based coatings with Nb or Si alloying elements proved to be resistant to corrosive attack in 3.5% NaCl and of these coatings the TiNbCN was found to have the best corrosion resistance. TiCN exhibited the best tribological performance at 250 °C, while at ambient temperatures it was TiNbCN. Abrasive and oxidative wear was found to be the main wear mechanism for all of the coatings. Of the tested coatings, TiNbCN coatings would be the most suitable candidate for severe service (high temperature, corrosive, etc.) applications

    Nanoscale films for near infrared active plasmonic devices

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    As optoelectronic components become nano-dimensional, controlling the coupling between light and matter at the nanoscale has become a major technological challenge, as well as the subject of theoretical studies. The aim of this work is threefold. First, to assess the suitability of ferroelectric thin films - Barium Strontium Titanate (BST), and Strontium Barium Niobate (SBN), as active media for plasmonic devices. Second, to find suitable thin film electrodes for such devices, by exploring and optimizing the plasmonic behaviour of already known conductive materials, conductive oxides (Strontium Ruthenate - SRO), and transitional metal nitrides (Titanium nitride - TiN). Third, to optimize the deposition process of metallic (Silver – Ag) films, so as to improve their smoothness, and thus their suitability for plasmonic applications and lithography in general. SBN ceramic targets were sintered. SBN and BST films were deposited by PLD and ellipsometry and normal incidence reflectometry were used to examine their optical tunability. Ellipsometry was further used to measure the effects of the residual strain of the BST thin films on their optical properties. BST and SBN films were found to exhibit a birefringence under bias along the direction of growth. A residual strain variation along the films’ direction of growth was inferred from an observed non-linear change in the refractive index of BST films along that same direction. SRO and TiN films were fabricated using PLD and reactive magnetron sputtering, respectively. The effects of the deposition pressure upon structure, charge carrier concentration and mobility, and optical properties were studied using X-ray diffraction (XRD), Hall-effect measurements, and ellipsometry. The optical properties of SRO were explained based on electron concentration and structure. SRO was confirmed as a promising plasmonic material, for applications in the near infrared range and at elevated temperatures. The influence of the deposition temperature upon the optical properties of TiN films was shown. Films grown at high temperature (800oC) had quasi-metallic optical properties, while films grown at room temperature exhibited well defined plasmon bandwidth, between two distinct Epsilon-near-zero (ENZ) frequencies, which has been linked to the uniform oxidation of the samples). Finally, Ag thin films were deposited using magnetron sputtering, in an Ar/He atmosphere. The effect of the sputtering gas ratio on the films structure, morphology and reflectivity was studied using XRD, Atomic force microscopy (AFM) and visual-range normal incidence reflectometry. The addition of Helium to the sputtering atmosphere was found to reduce the roughness of Ag films and improve their reflectivity, due to the Penning effect present in the Ar-He plasma. The work undertaken has, by developing new plasmonic materials (SRO, oxidized TiN), and expanding the knowledge of the behaviour (BST) and fabrication (Ag) here has paved the way for the development of active plasmonic devices.Open Acces

    Radio Frequency Magnetron Sputter Deposition as a Tool for Surface Modification of Medical Implants

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    The resent advances in radio frequency (RF)‐magnetron sputtering of hydroxyapatite films are reviewed and challenges posed. The principles underlying RF‐magnetron sputtering used to prepare calcium phosphate‐based, mainly hydroxyapatite coatings, are discussed in this chapter. The fundamental characteristic of the RF‐magnetron sputtering is an energy input into the growing film. In order to tailor the film properties, one has to adjust the energy input into the substrate depending on the desired film properties. The effect of different deposition control parameters, such as deposition time, substrate temperature, and substrate biasing on the hydroxyapatite (HA) film properties is discussed

    A CFD Modelling Approach for the Operation Analysis of an Exhaust Backpressure Valve Used in a Euro 6 Diesel Engine.

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    Harvesting residual thermal energy from exhaust gases with thermoelectric generators is one of the paths that are currently being explored to achieve more sustainable and environmentally friendly means of transport. In some cases, thermoelectric generators are installed in a by-pass configuration to regulate the mass flow entering the thermoelectric generator. Some manufacturers are using throttle valves with electromechanical actuators and electronic control in the exhaust pipe to improve techniques for active control of pollutant emissions in reciprocating internal combustion engines, such as the exhaust gas recirculation. The above-mentioned circumstances have motivated the approach of this work: computational fluid dynamics (CFD) modelling of the operation of a throttle valve used for establishing adequate exhaust backpressure conditions to achieve the low pressure exhaust gas recirculation in Euro 6 engines. The aim of this model is to understand the flow control process with these types of valves in order to incorporate them in an exhaust system that will include two thermoelectric generators used to convert residual thermal energy into electrical energy. This work presents a computational model of the flow through the throttle valve under different temperatures and mass flow rates of the exhaust gas with different closing positions. For all cases, the values of the pressure drop were obtained. In all cases studied, the level of agreement between the modelled and experimental results exceeds 90%. The developed model has helped to propose a correlation to estimate the mass flow rate of exhaust gas from easily measurable quantitiesPartial funding for open access charge: Universidad de MĂĄlag

    Corrosion and tribological performance of quasi-stoichiometric titanium containing carbo-nitride coatings

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    Zr, Nb and Si doped TiCN coatings, with (C+N)/(metal + Si) ratios of approximately 1, were deposited on stainless steel and Si wafer substrates using a cathodic arc technique in a mixture of N2 and CH4 gases. The coatings were comparatively analysed for elemental and phase composition, adhesion, anticorrosive properties and tribological performance at ambient and 250 °C. Zr, Nb and Si alloying contents in the coatings were in the range 2.9–9.6 at.%. All the coatings exhibited f.c.c. solid solution structures and had a 〈1 1 1〉 preferred orientation. In the adhesion tests conducted, critical loads ranged from 20 to 30 N, indicative of a good adhesion to substrate materials. The Ti based coatings with Nb or Si alloying elements proved to be resistant to corrosive attack in 3.5% NaCl and of these coatings the TiNbCN was found to have the best corrosion resistance. TiCN exhibited the best tribological performance at 250 °C, while at ambient temperatures it was TiNbCN. Abrasive and oxidative wear was found to be the main wear mechanism for all of the coatings. Of the tested coatings, TiNbCN coatings would be the most suitable candidate for severe service (high temperature, corrosive, etc.) applications

    In vitro corrosion of titanium nitride and oxynitride-based biocompatible coatings deposited on stainless steel

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    The reactive cathodic arc deposition technique was used to produce Ti nitride and oxynitride coatings on 304 stainless steel substrates (SS). Both mono (SS/TiN, SS/TiNO) and bilayer coatings (SS/TiN/TiNO and SS/TiNO/TiN) were investigated in terms of elemental and phase composition, microstructure, grain size, morphology, and roughness. The corrosion behavior in a solution consisting of 0.10 M NaCl + 1.96 M H2O2 was evaluated, aiming for biomedical applications. The results showed that the coatings were compact, homogeneously deposited on the substrate, and displaying rough surfaces. The XRD analysis indicated that both mono and bilayer coatings showed only cubic phases with (111) and (222) preferred orientations. The highest crystallinity was shown by the SS/TiN coating, as indicated also by the largest grain size of 23.8 nm, which progressively decreased to 16.3 nm for the SS/TiNO monolayer. The oxynitride layers exhibited the best in vitro corrosion resistance either as a monolayer or as a top layer in the bilayer structure, making them a good candidate for implant applications

    Biodegradable ceramics consisting of hydroxyapatite for orthopaedic implants

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    This study aims to analyze hydroxyapatite (HAP) coatings enriched with Mg and Ti prepared by a magnetron sputtering technique on Ti6Al4V substrate. For preparation of the coatings, three magnetron targets (HAP, MgO and TiO2) were simultaneously co-worked. The concentration of Mg added was varied by modifying the power applied to the MgO target. In all coatings, the Ti concentration was maintained constant by keeping the same cathode power fed during the whole deposition. The influence of different Mg dopant contents on the formation of phase, microstructure and morphology of the obtained Ti-doped HAP coatings were characterized by Fourier transform infrared spectroscopy (FTIR) and scanning electron microscopy (SEM). Moreover, the effects of Mg addition upon corrosion, mechanical and biological properties were also investigated. Mg- and Ti-doped HAP coating obtained at low radio-frequency (RF) power fed to the MgO target provided material with high corrosion resistance compared to other coatings and bare alloy. A slight decrease in hardness of the coatings was found after the Mg addition, from 8.8 to 5.7 GPa. Also, the values of elastic modulus were decreased from 87 to 53 GPa, this being an advantage for biomedical applications. The coatings with low Mg concentration proved to have good deformation to yielding and higher plastic properties. Biological test results showed that the novel surfaces exhibited excellent properties for the adhesion and growth of bone cells. Moreover, early adherent vital cell numbers were significantly higher on both coatings compared to Ti6Al4V, suggesting that Mg ions may accelerate initial osteoblast adhesion and proliferation
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