Helium ion microscopy and energy selective scanning electron microscopy – two advanced microscopy techniques with complementary applications

Both scanning electron microscopes (SEM) and helium ion microscopes (HeIM) are based on the same principle of a charged particle beam scanning across the surface and generating secondary electrons (SEs) to form images. However, there is a pronounced difference in the energy spectra of the emitted secondary electrons emitted as result of electron or helium ion impact. We have previously presented evidence that this also translates to differences in the information depth through the analysis of dopant contrast in doped silicon structures in both SEM and HeIM. Here, it is now shown how secondary electron emission spectra (SES) and their relation to depth of origin of SE can be experimentally exploited through the use of energy filtering (EF) in low voltage SEM (LV-SEM) to access bulk information from surfaces covered by damage or contamination layers. From the current understanding of the SES in HeIM it is not expected that EF will be as effective in HeIM but an alternative that can be used for some materials to access bulk information is presented

Suppression of backscattered diffraction from sub-wavelength ‘moth-eye’ arrays

The eyes and wings of some species of moth are covered with arrays of nanoscale features that dramatically reduce reflection of light. There have been multiple examples where this approach has been adapted for use in antireflection and antiglare technologies with the fabrication of artificial moth-eye surfaces. In this work, the suppression of iridescence caused by the diffraction of light from such artificial regular moth-eye arrays at high angles of incidence is achieved with the use of a new tiled domain design, inspired by the arrangement of features on natural moth-eye surfaces. This bio-mimetic pillar architecture contains high optical rotational symmetry and can achieve high levels of diffraction order power reduction. For example, a tiled design fabricated in silicon and consisting of domains with 9 different orientations of the traditional hexagonal array exhibited a ~96% reduction in the intensity of the ?1 diffraction order. It is suggested natural moth-eye surfaces have evolved a tiled domain structure as it confers efficient antireflection whilst avoiding problems with high angle diffraction. This combination of antireflection and stealth properties increases chances of survival by reducing the risk of the insect being spotted by a predator. Furthermore, the tiled domain design could lead to more effective artificial moth-eye arrays for antiglare and stealth applications

Dopant profiling based on scanning electron and helium ion microscopy.

This is the author accepted manuscript. The final version is available from Elsevier via http://dx.doi.org/10.1016/j.ultramic.2015.10.003In this paper, we evaluate and compare doping contrast generated inside the scanning electron microscope (SEM) and scanning helium ion microscope (SHIM). Specialised energy-filtering techniques are often required to produce strong doping contrast to map donor distributions using the secondary electron (SE) signal in the SEM. However, strong doping contrast can be obtained from n-type regions in the SHIM, even without energy-filtering. This SHIM technique is more sensitive than the SEM to donor density changes above its sensitivity threshold, i.e. of the order of 10(16) or 10(17)donorscm(-3) respectively on specimens with or without a p-n junction; its sensitivity limit is well above 2×10(17)acceptorscm(-3) on specimens with or without a p-n junction. Good correlation is found between the widths and slopes of experimentally measured doping contrast profiles of thin p-layers and the calculated widths and slopes of the potential energy distributions across these layers, at a depth of 1 to 3nm and 5 to 10nm below the surface in the SHIM and the SEM respectively. This is consistent with the mean escape depth of SEs in silicon being about 1.8nm and 7nm in the SHIM and SEM respectively, and we conclude that short escape depth, low energy SE signals are most suitable for donor profiling

Nonlinear graphene metamaterial

We demonstrate that the broadband nonlinear optical response of graphene can be resonantly enhanced by more than an order of magnitude through hybridization with a plasmonic metamaterial,while retaining an ultrafast nonlinear response time of ~1 ps. Transmission modulation close to ~1% is seen at a pump uence of ~0.03 mJ/cm^2 at the wavelength of ~1600 nm. This approach allows to engineer and enhance graphene's nonlinearity within a broad wavelength range enabling applications in optical switching, mode-locking and pulse shaping.Comment: The following article has been submitted to Applied Physics Letters. After it is published, it will be found at http://apl.aip.org

Suppression of backscattered diffraction from sub-wavelength ‘moth-eye’ arrays

The eyes and wings of some species of moth are covered with arrays of nanoscale features that dramatically reduce reflection of light. There have been multiple examples where this approach has been adapted for use in antireflection and antiglare technologies with the fabrication of artificial moth-eye surfaces. In this work, the suppression of iridescence caused by the diffraction of light from such artificial regular moth-eye arrays at high angles of incidence is achieved with the use of a new tiled domain design, inspired by the arrangement of features on natural moth-eye surfaces. This bio-mimetic pillar architecture contains high optical rotational symmetry and can achieve high levels of diffraction order power reduction. For example, a tiled design fabricated in silicon and consisting of domains with 9 different orientations of the traditional hexagonal array exhibited a ~96% reduction in the intensity of the ?1 diffraction order. It is suggested natural moth-eye surfaces have evolved a tiled domain structure as it confers efficient antireflection whilst avoiding problems with high angle diffraction. This combination of antireflection and stealth properties increases chances of survival by reducing the risk of the insect being spotted by a predator. Furthermore, the tiled domain design could lead to more effective artificial moth-eye arrays for antiglare and stealth applications

Low-loss slot waveguides with silicon (111) surfaces realized using anisotropic wet etching

We demonstrate low-loss slot waveguides on silicon-on-insulator (SOI) platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A TMAH based anisotropic wet etching technique was then used to remove any residual side wall roughness. Using this fabrication technique propagation loss as low as 3.7dB/cm was realized in silicon slot waveguide for wavelengths near 1550nm. We also realized low propagation loss of 1dB/cm for silicon strip waveguides

Carbon nanotubes in a photonic metamaterial

Hybridization of single-walled carbon nanotubes with plasmonic metamaterials leads to photonic media with an exceptionally strong ultrafast nonlinearity. This behavior is underpinned by strong coupling of the nanotube excitonic response to the weakly radiating Fano-type resonant plasmonic modes that can be tailored by metamaterial design

A robust system for RNA interference in the chicken using a modified microRNA operon

AbstractRNA interference (RNAi) provides an effective method to silence gene expression and investigate gene function. However, RNAi tools for the chicken embryo have largely been adapted from vectors designed for mammalian cells. Here we present plasmid and retroviral RNAi vectors specifically designed for optimal gene silencing in chicken cells. The vectors use a chicken U6 promoter to express RNAs modelled on microRNA30, which are embedded within chicken microRNA operon sequences to ensure optimal Drosha and Dicer processing of transcripts. The chicken U6 promoter works significantly better than promoters of mammalian origin and in combination with a microRNA operon expression cassette (MOEC), achieves up to 90% silencing of target genes. By using a MOEC, we show that it is also possible to simultaneously silence two genes with a single vector. The vectors express either RFP or GFP markers, allowing simple in vivo tracking of vector delivery. Using these plasmids, we demonstrate effective silencing of Pax3, Pax6, Nkx2.1, Nkx2.2, Notch1 and Shh in discrete regions of the chicken embryonic nervous system. The efficiency and ease of use of this RNAi system paves the way for large-scale genetic screens in the chicken embryo