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research
Proximity effect quantification and dose optimisation for high resolution helium ion beam lithography
Authors
Darren M. Bagnall
Stuart A. Boden
+3Â more
Ejaz Huq
Philip Prewett
Xiaoqing Shi
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Southampton (e-Prints Soton)
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oai:eprints.soton.ac.uk:380513
Last time updated on 12/04/2016