46 research outputs found
Application of Transmission Kikuchi Diffraction in SEM and Some Sample Preparation Challanges
Complementary electron microscopic-spectroscopic characterization of Ti and Cr adhesion layers
Texture and microstructure evolution in nickel electrodeposited from an additive-free Watts electrolyte
Use of elevated temperature in-situ transmission Kikuchi diffraction for the study of ultra-thin metal films
Columns formed by multiple twinning in nickel layers—An approach of grain boundary engineering by electrodeposition
Influence of Ti and Cr Adhesion Layers on Ultrathin Au Films
Efficient
adhesion of gold thin films on dielectric or semiconductor substrates
is essential in applications and research within plasmonics, metamaterials,
2D materials, and nanoelectronics. As a consequence of the relentless
downscaling in nanoscience and technology, the thicknesses of adhesion
layer and overlayer have reached tens of nanometers, and it is unclear
if our current understanding is sufficient. In this report, we investigated
how Cr and Ti adhesion layers influence the nanostructure of 2–20
nm thin Au films by means of high-resolution electron microscopy,
complemented with atomic force microscopy and X-ray photoelectron
spectroscopy. Pure Au films were compared to Ti/Au and Cr/Au bilayer
systems. Both Ti and Cr had a striking impact on grain size and crystal
orientation of the Au overlayer, which we interpret as the adhesion
layer-enhanced wetting of Au and the formation of chemical bonds between
the layers. Ti formed a uniform layer under the Au overlayer. Cr interdiffused
with the Au layer forming a Cr–Au alloy. The crystal orientation
of the Au layers was mainly [111] for all thin-film systems. The results
showed that both adhesion layers were partially oxidized, and oxidation
sources were scrutinized and found. A difference in bilayer electrical
resistivity between Ti/Au and Cr/Au systems was measured and compared.
On the basis of these results, a revised and more detailed adhesion
layer model for both Ti/Au and Cr/Au systems was proposed. Finally,
the implications of the results were analyzed, and recommendations
for the selection of adhesion layers for nano-optics and nanoelectronics
applications are presented