Non-invasive Scanning Raman Spectroscopy and Tomography for Graphene Membrane Characterization

Graphene has extraordinary mechanical and electronic properties, making it a promising material for membrane based nanoelectromechanical systems (NEMS). Here, chemical-vapor-deposited graphene is transferred onto target substrates to suspend it over cavities and trenches for pressure-sensor applications. The development of such devices requires suitable metrology methods, i.e., large-scale characterization techniques, to confirm and analyze successful graphene transfer with intact suspended graphene membranes. We propose fast and noninvasive Raman spectroscopy mapping to distinguish between freestanding and substrate-supported graphene, utilizing the different strain and doping levels. The technique is expanded to combine two-dimensional area scans with cross-sectional Raman spectroscopy, resulting in three-dimensional Raman tomography of membrane-based graphene NEMS. The potential of Raman tomography for in-line monitoring is further demonstrated with a methodology for automated data analysis to spatially resolve the material composition in micrometer-scale integrated devices, including free-standing and substrate-supported graphene. Raman tomography may be applied to devices composed of other two-dimensional materials as well as silicon micro- and nanoelectromechanical systems.Comment: 23 pages, 5 figure

Colorimetry technique for scalable characterization of suspended graphene

Previous statistical studies on the mechanical properties of chemical-vapor-deposited (CVD) suspended graphene membranes have been performed by means of measuring individual devices or with techniques that affect the material. Here, we present a colorimetry technique as a parallel, non-invasive, and affordable way of characterizing suspended graphene devices. We exploit Newton rings interference patterns to study the deformation of a double-layer graphene drum 13.2 micrometer in diameter when a pressure step is applied. By studying the time evolution of the deformation, we find that filling the drum cavity with air is 2-5 times slower than when it is purged

Controlling the threshold voltage of a semiconductor field-effect transistor by gating its graphene gate

The threshold voltage of a field-effect transistor (FED determines its switching and limits the scaling of the supply voltage in the logic gates. Here we demonstrate a GaAs FET with a monolayer graphene gate in which the threshold voltage was externally controlled by an additional control gate. The graphene gate forms a Schottky junction with the transistor channel, modulating the channel conductivity. The control gate sets the work function of the graphene gate, controlling the Schottky barrier height and therefore the threshold voltage, and reduces the subthreshold swing down to similar to 60 mV dec(-1). The change of the threshold voltage was large enough to turn the initially depletion mode FETs into the enhancement mode FETs. This allowed to realize logic gates with a positive switching threshold in which the threshold voltage of each transistor was independently set. The presented FETs can also be operated as dual-gate FETs, which was demonstrated by realizing frequency mixers

Ultra-low contact resistance in graphene devices at the Dirac point

Contact resistance is one of the main factors limiting performance of short-channel graphene field-effect transistors (GFETs), preventing their use in low-voltage applications. Here we investigated the contact resistance between graphene grown by chemical vapor deposition (CVD) and different metals, and found that etching holes in graphene below the contacts consistently reduced the contact resistance, down to 23 Omega . mu m with Au contacts. This low contact resistance was obtained at the Dirac point of graphene, in contrast to previous studies where the lowest contact resistance was obtained at the highest carrier density in graphene (here 200 Omega . mu m was obtained under such conditions). The 'holey' Au contacts were implemented in GFETs which exhibited an average transconductance of 940 S m(-1) at a drain bias of only 0.8 V and gate length of 500 nm, which out-perform GFETs with conventional Au contacts

Semiquantitative Classification of Two Oxidizing Gases with Graphene-Based Gas Sensors

Miniature and low-power gas sensing elements are urgently needed for a portable electronic nose, especially for outdoor pollution monitoring. Hereby we prepared chemiresistive sensors based on wide-area graphene (grown by chemical vapor deposition) placed on Si/Si3N4 substrates with interdigitated electrodes and built-in microheaters. Graphene of each sensor was individually functionalized with ultrathin oxide coating (CuO-MnO2, In2O3 or Sc2O3) by pulsed laser deposition. Over the course of 72 h, the heated sensors were exposed to randomly generated concentration cycles of 30 ppb NO2, 30 ppb O3, 60 ppb NO2, 60 ppb O3 and 30 ppb NO2 + 30 ppb O3 in synthetic air (21% O2, 50% relative humidity). While O3 completely dominated the response of sensors with CuO-MnO2 coating, the other sensors had comparable sensitivity to NO2 as well. Various response features (amplitude, response rate, and recovery rate) were considered as machine learning inputs. Using just the response amplitudes of two complementary sensors allowed us to distinguish these five gas environments with an accuracy of ~ 85%. Misclassification was mostly due to an overlap in the case of the 30 ppb O3, and 30 ppb O3 + 30 ppb NO2 responses, and was largely caused by the temporal drift of these responses. The addition of recovery rates to machine learning input variables enabled us to very clearly distinguish different gases and increase the overall accuracy to ~94%

Graphene Reflectarray Metasurface for Terahertz Beam Steering and Phase Modulation

We report a THz reflectarray metasurface which uses graphene as active element to achieve beam steering, shaping and broadband phase modulation. This is based on the creation of a voltage controlled reconfigurable phase hologram, which can impart different reflection angles and phases to an incident beam, replacing bulky and fragile rotating mirrors used for terahertz imaging. This can also find applications in other regions of the electromagnetic spectrum, paving the way to versatile optical devices including light radars, adaptive optics, electro-optical modulators and screens

Graphene mechanical pixels for Interferometric MOdulator Displays (GIMOD)

Graphene, the carbon monolayer and 2D allotrope of graphite, has the potential to impact technology with a wide range of applications such as optical modulators for high-speed communications. In contrast to modulation devices that rely on plasmonic or electronic effects, MEMS-based modulators can have wider tuning ranges albeit at a lower operating frequency. These properties make electro-optic mechanical modulators ideal for reflective-type display technologies as has been demonstrated previously with SiN membranes in Interferometric MOdulator Displays (IMODs). Despite their low-power consumption and performance in bright environments, IMODs suffer from low frame rates and limited color gamut. Double-layer graphene (DLG) membranes grown by chemical vapor deposition (CVD) can also recreate the interference effect like in IMODs as proven with drumheads displaying Newton's rings. Here, we report on the electro-optical response of CVD DLG mechanical pixels by measuring the change in wavelength-dependent reflectance of a suspended graphene drumhead as a function of electrical gating. We use a spectrometer to measure the wavelength spectrum at different voltages, and find a good agreement with a model based on light interference. Moreover, to verify that gas compression effects do not play an important role, we use a stroboscopic illumination technique to study the electro-optic response of these graphene pixels at frequencies up to 400 Hz. Based on these findings, we demonstrate a continuous full-spectrum reflective-type pixel technology with a Graphene Interferometric MOdulator Display (GIMOD) prototype of 2500 pixels per inch (ppi) equivalent to more than 12K resolution.Comment: 13 pages, 4 figure

No Cytotoxicity or Genotoxicity of Graphene and Graphene Oxide in Murine Lung Epithelial FE1 Cells in Vitro

International audienceGraphene and graphene oxide receive much attention these years, because they add attractive properties to a wide range of applications and products. Several studies have shown toxicological effects of other carbon-based nanomaterials such as carbon black nanoparticles and carbon nanotubes in vitro and in vivo. Here, we report in-depth physicochemical characterization of three commercial graphene materials, one graphene oxide (GO) and two reduced graphene oxides (rGO) and assess cytotoxicity and genotoxicity in the murine lung epithelial cell line FE1. The studied GO and rGO mainly consisted of 2-3 graphene layers with lateral sizes of 1-2 mu m. GO had almost equimolar content of C, O, and H while the two rGO materials had lower contents of oxygen with C/O and C/H ratios of 8 and 12.8, respectively. All materials had low levels of endotoxin and low levels of inorganic impurities, which were mainly sulphur, manganese, and silicon. GO generated more ROS than the two rGO materials, but none of the graphene materials influenced cytotoxicity in terms of cell viability and cell proliferation after 24 hr. Furthermore, no genotoxicity was observed using the alkaline comet assay following 3 or 24 hr of exposure. We demonstrate that chemically pure, few-layered GO and rGO with comparable lateral size (> 1 mu m) do not induce significant cytotoxicity or genotoxicity in FE1 cells at relatively high doses (5-200 mu g/ml). Environ. Mol. Mutagen. 57:469-482, 2016. (c) 2016 The Authors. Environmental and Molecular Mutagenesis Published by Wiley Periodicals, Inc