КОМПЛЕКС ДЛЯ НЕРАЗРУШАЮЩЕГО КОНТРОЛЯ СУБМИКРОННОЙ ТОПОЛОГИИ КРЕМНИЕВЫХ ПЛАСТИН ПРИ ПРОИЗВОДСТВЕ ИНТЕГРАЛЬНЫХ МИКРОСХЕМ

The advantages of using an atomic force microscopy in manufacturing of submicron integrated circuits are described. The possibilities of characterizing the surface morphology and the etching profile for silicon substrate and bus lines, estimation of the periodicity and size of bus lines, geometrical stability for elementary bus line are shown. Methods of optical and atomic force microcopies are combined in one diagnostic unit. Scanning  probe  microscope  (SPM  200)  is  designed  and  produced.  Complex  SPM  200  realizes  nondestructive control of microelectronics elements made on silicon wafers up to 200 mm in diameter and it is introduced by JSC «Integral» for the purpose of operational control, metrology and acceptance of the final product.Описаны преимущества использования атомно-силовой микроскопии для контроля технологических процессов при изготовлении интегральных микросхем субмикроэлектроники. Показана возможность визуализации морфологии поверхностей и профиля травления, оценки периодичности гребенок шин, определения стабильности размеров для одной шины. Выполнены работы по совмещению оптической и атомно-силовой микроскопии, разработан и изготовлен сканирующий зондовый микроскоп. Комплекс внедрен для промышленного неразрушающего контроля субмикроэлектроники, выполненной на кремниевых  пластинах диаметром  до  200 мм, с целью осуществления  операционного контроля, метрологических измерений и приемки качества готовой продукции

EQUIPMENT FOR NONDESTRUCTIVE TESTING OF SILICON WAFERS SUBMICRON TOPOLOGY DURING THE FABRICATION OF INTEGRATED CIRCUITS

The advantages of using an atomic force microscopy in manufacturing of submicron integrated circuits are described. The possibilities of characterizing the surface morphology and the etching profile for silicon substrate and bus lines, estimation of the periodicity and size of bus lines, geometrical stability for elementary bus line are shown. Methods of optical and atomic force microcopies are combined in one diagnostic unit. Scanning  probe  microscope  (SPM  200)  is  designed  and  produced.  Complex  SPM  200  realizes  nondestructive control of microelectronics elements made on silicon wafers up to 200 mm in diameter and it is introduced by JSC «Integral» for the purpose of operational control, metrology and acceptance of the final product

The dynamics of biochemical markers of enzymoemia and middle-weight molecules in the early post-traumatic period of brain injury

In the experimental model of brain injury (BI) markers of enzymoemia (aminotransferases ALT and AST, alkaline and acid phosphatase (AlP and AcP), cathepsin D (CD)) and middle-weight molecules (MWM) were estimated. 3 hours after trauma there were increase of all enzymes that evidences about damage of cytoplasmic (ALT, AST, AlF) and lysosomal membranes (AcP, CD). During period of observation different dynamics of enzymatic changes occurred: plateau phase for ALT and CD and progressive increase of concentration with the maximum on the 5th day of the experiment for AlP and AcP. Increase of the level of MWM displayed the development of endogenous intoxication in the post-traumatic period. Relation between particular components of MWM was studied. It was shown that primary accumulation of nucleotide fraction and aromatic peptides is adverse factor of the course of post-traumatic period, development of endotoxicosis, and multiorgan failure

Mesozoic to recent geological history of southern Crimea and the Eastern Black Sea region

<p>We provide a synthesis of stratigraphic data to unravel the history of the geological evolution of South Crimea in the Mesozoic and Cenozoic. The South Crimea Orogen consists of three major mega-sequences: (1) the Triassic–Early Jurassic; (2) the Aalenian–Bathonian; and (3) the Callovian–Eocene. The Late Triassic–Early Jurassic deposits formed in the environment of a forearc basin and a remnant basin. The Aalenian–Bathonian deposits formed above subduction extension and a volcanic belt. Three main Callovian–Eocene tectonic units can be identified in South Crimea: (1) the South Crimean Shelf Basin; (2) the Sudak Deepwater Trough; and (3) the Alchak–Kaya Shelf Basin at the northern margin of the Shatsky Ridge. The Oligocene–Quaternary deposits are considered to be syn-orogenic. A description of the anticipated stratigraphic units on the Shatsky Ridge is suggested for the Middle Jurassic, Callovian–Late Jurassic, Neocomian, Aptian–Albian, Late Cretaceous–Paleocene, Eocene and Maykopian. We propose a model for the geological history of the Eastern Black Sea Basin. Graben formed during the Late Barremian–Albian at the location of the future Eastern Black Sea Basin and a phase of volcanism occurred in the Albian. The main phase of rifting and spreading of oceanic crust took place during Cenomanian–Santonian time. </p