22 research outputs found

    Substituents Effects on Properties of Perylene Dyes for Spectrum Conversion Film

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    ํ•™์œ„๋…ผ๋ฌธ(์„์‚ฌ) -- ์„œ์šธ๋Œ€ํ•™๊ต๋Œ€ํ•™์› : ๊ณต๊ณผ๋Œ€ํ•™ ์žฌ๋ฃŒ๊ณตํ•™๋ถ€, 2022.2. ๊น€์žฌํ•„.ํ•„๋ฆ„ ์ƒํƒœ์—์„œ ํ˜•๊ด‘ ํ€œ์นญ์ด ์ ๊ฒŒ ์ผ์–ด๋‚˜๊ณ , ์ ์ƒ‰ ํ˜•๊ด‘ ๊ด‘์ „ํ™˜ ํ•„๋ฆ„์— ์‚ฌ์šฉํ•˜๊ธฐ์— ์ ํ•ฉํ•œ ์—ผ๋ฃŒ๋ฅผ ๊ฐœ๋ฐœํ•˜๊ธฐ ์œ„ํ•ด ๋ถ€ํ”ผ๊ฐ€ ๋‹ค๋ฅธ ์„ธ ์ข…์˜ ์น˜ํ™˜์ฒด๋ฅผ ํผ๋ฆด๋ Œ ์—ผ๋ฃŒ์˜ bay ์œ„์น˜์— ๋„์ž…ํ•˜์—ฌ ์„ธ ์ข…์˜ ์—ผ๋ฃŒ๋ฅผ ํ•ฉ์„ฑํ–ˆ๋‹ค. ํ•ฉ์„ฑ๋œ ์„ธ ์—ผ๋ฃŒ์˜ ๊ด‘ํ•™์  ํŠน์„ฑ๊ณผ ํ˜•๊ด‘ ํŠน์„ฑ์„ ์ธก์ •ํ–ˆ๊ณ , ์—ผ๋ฃŒ์˜ ์ตœ์ ํ™”๋œ ๊ตฌ์กฐ, ๋ถ„์ž์˜ ์˜ค๋น„ํƒˆ ๋“ฑ์„ Gaussian 16 ํ”„๋กœ๊ทธ๋žจ์˜ DFT, TD-DFT๋ฅผ ํ†ตํ•ด ๊ณ„์‚ฐํ–ˆ์œผ๋ฉฐ, ๊ณต์ • ๊ณผ์ •์—์„œ์˜ ์—ด ์•ˆ์ •์„ฑ์„ ์•Œ์•„๋ณด๊ธฐ ์œ„ํ•˜์—ฌ TGA๋ฅผ ํ†ตํ•ด ๋‚ด์—ด์„ฑ์„ ์ธก์ •ํ–ˆ๋‹ค. ๋„์ž…ํ•œ ์น˜ํ™˜์ฒด๋“ค์˜ ๋ถ€ํ”ผ๊ฐ€ ์ปค์งˆ์ˆ˜๋ก ์šฉ์•ก ์ƒํƒœ์—์„œ ์—ผ๋ฃŒ์˜ Stokes shift์™€ ํ˜•๊ด‘ ์–‘์ž ํšจ์œจ์ด ์ฆ๊ฐ€ํ–ˆ๊ณ  ์ด ์›์ธ์— ๋Œ€ํ•œ ๋ถ„์„์„ ์ง„ํ–‰ํ–ˆ๋‹ค. Stokes shift์˜ ์ฆ๊ฐ€๋Š” ๊ฐ ์—ผ๋ฃŒ์˜ S0 state ์ผ ๋•Œ์™€ S1 state ์ผ ๋•Œ์˜ ๊ตฌ์กฐ์˜ ์ฐจ์ด๋ฅผ ๊ณ„์‚ฐํ•จ์œผ๋กœ์จ ๋ถ„์„ํ–ˆ๋‹ค. ์—ผ๋ฃŒ์˜ ๋ถ€ํ”ผ๊ฐ€ ์ปค์งˆ์ˆ˜๋ก ๋ถ„์ž ๊ฐ„ ์ž…์ฒด ์žฅ์• ๊ฐ€ ์ฆ๊ฐ€ํ•˜์—ฌ ์‘์ง‘์ด ์–ต์ œ๋˜์—ˆ๊ณ , ์‘์ง‘์— ์˜ํ•œ ํ˜•๊ด‘ ํ€œ์นญ (ACQ)์ด ์–ต์ œ๋˜์–ด ์šฉ์•ก ์ƒํƒœ์—์„œ ์—ผ๋ฃŒ์˜ ํ˜•๊ด‘ ์–‘์ž ํšจ์œจ์ด ๋†’์•„์ง€๋Š” ๊ฒฝํ–ฅ์„ ๋ณด์˜€์œผ๋ฉฐ, ์ด๋ฅผ ๋ถ„์ž์˜ ๋ถ€ํ”ผ์™€ ํ€œ์นญ์ƒ์ˆ˜ (kq) ๊ณ„์‚ฐ์„ ํ†ตํ•ด ์ˆ˜์น˜์ ์œผ๋กœ ๋ถ„์„ํ–ˆ๋‹ค. ํ•ฉ์„ฑ๋œ ์—ผ๋ฃŒ๋“ค์˜ ์šฉ์•ก ์ƒํƒœ์—์„œ์˜ ํŠน์„ฑ์ด ํ•„๋ฆ„ ์ƒํƒœ์—์„œ๋„ ์œ ์ง€๋˜๋Š”์ง€ ์•Œ์•„๋ณด๊ณ , ํ•„๋ฆ„ ์ƒํƒœ์—์„œ ์—ผ๋ฃŒ๋“ค์˜ ์ ์ƒ‰ ํˆฌ๊ณผ ๊ด‘์ „ํ™˜ ํ•„๋ฆ„์˜ ์ ํ•ฉ์„ฑ์„ ์•Œ์•„๋ณด๊ธฐ ์œ„ํ•˜์—ฌ PMMA๋ฅผ ๋ฐ”์ธ๋”๋กœ ์ด์šฉํ•˜์—ฌ ํ•„๋ฆ„์œผ๋กœ ์ œ์ž‘ํ–ˆ๋‹ค. ํ•„๋ฆ„ ์ƒํƒœ์—์„œ ํ•ฉ์„ฑ๋œ ์„ธ ์—ผ๋ฃŒ์˜ ๊ด‘ํ•™์  ํŠน์„ฑ๊ณผ ํ˜•๊ด‘ ํŠน์„ฑ์„ ์ธก์ •ํ–ˆ๊ณ , ๊ฐ€์žฅ ์ข‹์€ ํŠน์„ฑ์„ ๋ณด์ธ ํ•œ ์ข…์˜ ์—ผ๋ฃŒ (PI-TBPO)๋ฅผ ์ ์ƒ‰ ํ˜•๊ด‘ ๊ด‘์ „ํ™˜ ํ•„๋ฆ„์œผ๋กœ ์ œ์ž‘ํ•˜์—ฌ, ์ƒ์ถ”์˜ ๊ด‘ํ•ฉ์„ฑ ์†๋„์™€ ์ˆ˜ํ™•๋Ÿ‰์„ ์ธก์ •ํ–ˆ๋‹ค. ์ด๋ฒˆ ์—ฐ๊ตฌ๋ฅผ ํ†ตํ•˜์—ฌ ์ ์ƒ‰ ํ˜•๊ด‘ ๊ด‘์ „ํ™˜ ํ•„๋ฆ„์— ์‚ฌ์šฉํ•˜๊ธฐ์— ์ ํ•ฉํ•œ ์—ผ๋ฃŒ๋ฅผ ๊ฐœ๋ฐœํ•˜์˜€์œผ๋ฉฐ, ์—ผ๋ฃŒ๋“ค์˜ ๊ด‘ํ•™์  ํŠน์„ฑ๊ณผ ํ˜•๊ด‘ ํŠน์„ฑ์„ ์ˆ˜์น˜์ ์œผ๋กœ ๋ถ„์„ํ–ˆ๋‹ค.We synthesized three dyes with less fluorescence quenching suitable for red fluorescence spectrum conversion film (SCF) by introducing substituents with different volumes at the bay positions of the perylene dye. The photophysical properties, optimized structures, and energy states of the synthesized dyes were investigated by experiments and computational calculations (DFT/B3LYP/6-31G, Gaussian 16 program package). Also, the thermal stability of the dyes was investigated by thermogravimetric analysis (TGA). The Stokes shift and fluorescence quantum yields of the dyes in the solution state increased as the volume of the bay position-substituents increased. We compared the Stokes shift of each dye by comparing the structural difference between S0 and S1 states of each compound. Also, we investigated the quenching constant (kq) and molar volume of the dyes in the solution state to verify the relation between the degree of intermolecular steric hindrance and the degree of aggregation caused quenching (ACQ). PMMA films doped with the synthesized dyes were fabricated, and the photophysical properties were investigated. The photosynthesis rate and growth of the lettuce were measured by the film doped with PI-TBPO, which shows the best properties among the dyes.์ดˆ๋ก i ๋ชฉ์ฐจ iv [Figure List] vii [Table List] viii [Scheme List] ix 1. ์„œ๋ก  1 1.1 ๋†์—… ์ƒ์‚ฐ๋Ÿ‰ ์ฆ๊ฐ€๋ฅผ ์œ„ํ•œ ๊ด‘์ „ํ™˜ ํ•„๋ฆ„ 1 1.2 ๊ด‘์ „ํ™˜ ํ•„๋ฆ„์šฉ ์—ผ๋ฃŒ 2 1.3 Perylene ๊ณ„ ์—ผ๋ฃŒ 3 2. ์‹คํ—˜๋ฐฉ๋ฒ• 6 2.1 ์‹œ์•ฝ ๋ฐ ์žฅ๋น„ 6 2.1.1 ์‹œ์•ฝ 6 2.1.2 ์žฅ๋น„ 6 2.2 ๋ฌผ์งˆ์˜ ํ•ฉ์„ฑ ๋ฐ ๊ตฌ์กฐ ๋ถ„์„ 8 2.2.1 PDA-Cl4์˜ ํ•ฉ์„ฑ 8 2.2.2 PI-Phenoxy์˜ ํ•ฉ์„ฑ 9 2.2.3 PI-Cresol์˜ ํ•ฉ์„ฑ 11 2.2.4 PI-TBPO์˜ ํ•ฉ์„ฑ 13 2.3 ํ•„๋ฆ„ ์ œ์ž‘ 14 2.4 ์—ผ๋ฃŒ ๊ตฌ์กฐ์˜ ์ตœ์ ํ™” 15 3. ์‹คํ—˜๊ฒฐ๊ณผ ๋ฐ ๋…ผ์˜ 15 3.1 ๋ถ„์ž ๊ตฌ์กฐ ๋””์ž์ธ ๋ฐ ๊ตฌ์กฐ ๋ถ„์„ 15 3.1.1 ๋ถ„์ž ๊ตฌ์กฐ์˜ ๋””์ž์ธ 15 3.1.2 ๋ถ„์ž ๊ตฌ์กฐ์˜ ๋ถ„์„ 17 3.2 ๊ด‘ํ•™์  ํŠน์„ฑ ๋ถ„์„ 20 3.2.1 ์šฉ์•ก์—์„œ์˜ ํก์ˆ˜, ๋ฐœ๊ด‘ ๋ถ„์„ 20 3.2.1.1 Stokes Shift ๋ถ„์„ 21 3.3 ํ˜•๊ด‘ ํŠน์„ฑ ๋ถ„์„ 25 3.3.1 Stern-Volmer ๋ฐฉ์ •์‹์„ ํ†ตํ•œ ํ€œ์นญ์ƒ์ˆ˜ ๊ณ„์‚ฐ 26 3.4 ํ•„๋ฆ„ ๋ถ„์„ 29 3.4.1 ํ•„๋ฆ„ ์ƒํƒœ์˜ ๊ด‘ํ•™์  ํŠน์„ฑ ๋ถ„์„ 30 3.4.2 ํ•„๋ฆ„ ์ƒํƒœ์˜ ํ˜•๊ด‘ ํŠน์„ฑ ๋ถ„์„ 34 3.5 ๋‚ด์—ด์„ฑ ๋ถ„์„ 35 3.6 ์‹๋ฌผ ์„ฑ์žฅ 37 4. ๊ฒฐ๋ก  ๋ฐ ์š”์•ฝ 40 5. ์ฐธ๊ณ  ๋ฌธํ—Œ 43 Abstract 48์„

    A Study on the Dry Etch Characteristics of ACL and TSV in a Magnetized Inductively Coupled Plasma

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    ํ•™์œ„๋…ผ๋ฌธ (๋ฐ•์‚ฌ)-- ์„œ์šธ๋Œ€ํ•™๊ต ๋Œ€ํ•™์› : ์ „๊ธฐยท์ปดํ“จํ„ฐ๊ณตํ•™๋ถ€, 2015. 2. ํ™ฉ๊ธฐ์›….์ตœ๊ทผ ๋ฐ˜๋„์ฒด ์†Œ์ž์˜ Design rule์€ ์ ์  ๋” ๊ฐ์†Œํ•˜์—ฌ 10nm๋Œ€์— ์ด๋ฅด๊ฒŒ ๋˜๊ณ  ์ˆ˜์‹ญ ๋…„ ๋™์•ˆ ๋ถˆ๋ฌธ์œจ์ฒ˜๋Ÿผ ์—ฌ๊ฒจ์ง€๋˜ ์ง‘์ ๋„๊ฐ€ 1.5๋…„๋งˆ๋‹ค 2๋ฐฐ์”ฉ ์ฆ๊ฐ€ํ•œ๋‹ค๋Š” ๋ฌด์–ด์˜ ๋ฒ•์น™ (Moores law) ์„ ๊ทธ๋Œ€๋กœ ์œ ์ง€ํ•˜๊ธฐ๊ฐ€ ์–ด๋ ค์›Œ์ง„ ์ƒํ™ฉ์ด๋‹ค. ์ด์— ๋”ฐ๋ผ ์†Œ์ž ๋™์ž‘ ํ•œ๊ณ„๊ฐ€ ์–ผ๋งˆ์ธ์ง€์— ๋Œ€ํ•œ ๊ด€์‹ฌ๊ณผ ํ•จ๊ป˜ ์ฐจ์„ธ๋Œ€ ๋ฐ˜๋„์ฒด ์†Œ์ž์˜ ์ถ•์†Œ ํ•œ๊ณ„๋ฅผ ๊ทน๋ณตํ•˜๊ณ ์ž ํ•˜๋Š” ๋งŽ์€ ๋…ธ๋ ฅ๋“ค์ด ์ง€์†๋˜๊ณ  ์žˆ๋‹ค. ๋ฐ˜๋„์ฒด ์†Œ์ž์˜ ์ง‘์ ๋„์˜ ํ•œ๊ณ„๋ฅผ ๊ทน๋ณตํ•˜๊ธฐ ์œ„ํ•œ ์—ฌ๋Ÿฌ ๊ฐ€์ง€ ๋Œ€์•ˆ ์ค‘ 2๊ฐœ ์ด์ƒ์˜ ์†Œ์ž๋ฅผ ์ˆ˜์ง๋ฐฉํ–ฅ์œผ๋กœ ์—ฐ๊ฒฐํ•˜๋Š” ๊ธฐ์ˆ ์„ ์‚ฌ์šฉํ•˜๋Š” ์ ์ธตํ˜• ์†Œ์ž (๋˜๋Š” Stack ํ˜• ์†Œ์ž๋ผ๊ณ  ํ•จ) ์™€ ๊ธฐ์กด 2D ๊ธฐ์ˆ ์˜ ํ•œ๊ณ„๋ฅผ ๋„˜์–ด์„œ๊ธฐ ์œ„ํ•ด 3D Integration ๊ธฐ์ˆ ์„ ์ด์šฉํ•œ 3D ์†Œ์ž ๋“ฑ์ด ๊ด€์‹ฌ์„ ๋ฐ›๊ณ  ์žˆ๋‹ค. ์ด๋Ÿฌํ•œ ์ ์ธตํ˜• ์†Œ์ž์™€ 3D ์†Œ์ž์˜ ์ œ์กฐ์—๋Š” ๊ธฐ์กด์— ๋น„ํ•ด ๋”์šฑ ํ–ฅ์ƒ๋œ ์ˆ˜์ค€์˜ ๊ณ ๋ฐ€๋„, ๊ณ ๊ท ์ผ๋„์˜ ํ”Œ๋ผ์ฆˆ๋งˆ ๊ณต์ •์ด ์š”๊ตฌ๋œ๋‹ค. ์ด๋Ÿฌํ•œ ์š”๊ตฌ์— ๋Œ€์‘ํ•˜๊ธฐ ์œ„ํ•ด์„œ๋Š” ๊ธฐ์กด์˜ ์šฉ๋Ÿ‰๊ฒฐํ•ฉํ˜• ํ”Œ๋ผ์ฆˆ๋งˆ ์†Œ์Šค ๋ฐ ์œ ๋„๊ฒฐํ•ฉํ˜• ํ”Œ๋ผ์ฆˆ๋งˆ ์†Œ์Šค์˜ ํŠน์„ฑ์„ ๊ฐœ์„ ํ•œ ์ƒˆ๋กœ์šด ํ”Œ๋ผ์ฆˆ๋งˆ ์†Œ์Šค์˜ ๊ฐœ๋ฐœ์ด ํ•„์š”ํ•˜๋‹ค. ์—ฌ๊ธฐ์— ๋ฐ˜๋„์ฒด ์ œ์กฐ์— ์žˆ์–ด ์–‘์‚ฐ์„ฑ ๊ฐœ์„ ์„ ์œ„ํ•ด ๊ธฐ์กด์˜ ์ง๊ฒฝ 300mm ์›จ์ดํผ์—์„œ 450mm ์›จ์ดํผ๋กœ์˜ ์ „ํ™˜์— ๋Œ€ํ•œ ์—ฐ๊ตฌ๊ฐ€ ํ™œ๋ฐœํžˆ ์ง„ํ–‰๋˜๊ณ  ์žˆ๋‹ค. 450mm ์›จ์ดํผ๋กœ ๋Œ€๋ฉด์ ํ™”๋˜๋Š” ๊ฒฝ์šฐ์— ๊ธฐ์กด ๊ณต์ •์— ๋น„ํ•ด ๋ณด๋‹ค ๊ณ ๋ฐ€๋„, ๊ณ ๊ท ์ผ๋„์˜ ํ”Œ๋ผ์ฆˆ๋งˆ ์†Œ์Šค๊ฐ€ ํ•„์š”ํ•˜๊ฒŒ ๋œ๋‹ค. ์ด๋Ÿฌํ•œ ์š”๊ตฌ๋ฅผ ์ถฉ์กฑํ•˜๊ธฐ ์œ„ํ•œ ํ”Œ๋ผ์ฆˆ๋งˆ ์†Œ์Šค์˜ ๊ฐœ๋ฐœ์„ ์œ„ํ•ด ๊ณ ๋ฐ€๋„ ํ”Œ๋ผ์ฆˆ๋งˆ ์†Œ์Šค์ธ ์œ ๋„๊ฒฐํ•ฉํ˜• ํ”Œ๋ผ์ฆˆ๋งˆ๋ฅผ ๊ธฐ๋ณธ์œผ๋กœ ํ•˜์—ฌ ์ˆ˜์ง ๋ฐฉํ–ฅ์˜ ์•ฝ์ž๊ธฐ์žฅ์ด ์ธ๊ฐ€๋œ ์œ ๋„๊ฒฐํ•ฉ ํ”Œ๋ผ์ฆˆ๋งˆ(Magnetized Inductively Coupled PlasmaM-ICP)๊ฐ€ ์ œ์•ˆ๋˜์–ด ์‹คํ—˜ ์„ค๋น„๋ฅผ ์ œ์ž‘, ์—ฐ๊ตฌ๋ฅผ ์ง„ํ–‰ํ•˜๊ณ  ์žˆ๋‹ค. ์•ฝ์ž์žฅ์ด ์ธ๊ฐ€๋œ ๊ฒฝ์šฐ ์ƒˆ๋กœ์ด ์š”๊ตฌ๋˜๋Š” ํ”Œ๋ผ์ฆˆ๋งˆ ํŠน์„ฑ์— ๋ถ€ํ•ฉ๋˜๋Š” ์žฅ์ ์ด ๋งŽ์€ ๊ฒƒ์œผ๋กœ ์•Œ๋ ค์ ธ ์žˆ์œผ๋‚˜ ์•„์‰ฝ๊ฒŒ๋„ ์‚ฐํ™”๋ง‰ ์‹๊ฐ ์ผ๋ถ€๋ฅผ ์ œ์™ธํ•˜๊ณ ๋Š” ์‹ค์ œ ์‹๊ฐ๊ณผ ์—ฐ๊ณ„๋œ ์—ฐ๊ตฌ๋Š” ๋งŽ์ด ๋ถ€์กฑํ•œ ์‹ค์ •์ด๋‹ค. ๋ณธ ๋…ผ๋ฌธ์—์„œ๋Š” ์•ฝ์ž์žฅ์ด ์ธ๊ฐ€๋œ ์œ ๋„๊ฒฐํ•ฉ ํ”Œ๋ผ์ฆˆ๋งˆ ์žฅ์น˜์—์„œ์˜ ์ตœ์‹ ๋ฐ˜๋„์ฒด์‹๊ฐ ๊ณต์ •๋ฌผ์งˆ์„ ์ด์šฉํ•˜๋Š” ๋™์‹œ์— ์ง€๊ธˆ๊นŒ์ง€์˜ ์—ฐ๊ตฌ๋ฐฉ๋ฒ•๊ณผ๋Š” ๋‹ค๋ฅธ ์ ‘๊ทผ ๋ฐฉ๋ฒ•์œผ๋กœ ๋ฌผ๋ฆฌ์  ์‹๊ฐ ๋ฐ ํ™”ํ•™์  ์‹๊ฐ์— ์˜ํ•œ ์‹ค์ œ ์‹๊ฐ๊ณผ ์žํ™”๋œ ํ”Œ๋ผ์ฆˆ๋งˆ์˜ ์ง„๋‹จ๊ฒฐ๊ณผ๋ฅผ ์—ฐ๊ณ„ํ•˜์—ฌ ๋ถ„์„ํ•˜๋Š” ๋ฐฉ๋ฒ•์œผ๋กœ M-ICP์˜ ํŠน์„ฑ์„ ํ™•์ธํ•˜๊ณ ์ž ํ•˜์˜€๋‹ค. ๋”ฐ๋ผ์„œ, ์‹๊ฐํŠน์„ฑ์„ ํ™•์ธํ•˜๊ธฐ ์œ„ํ•ด ๋ฌผ๋ฆฌ์  ์‹๊ฐํŠน์„ฑํ™•์ธ์— ์ ํ•ฉํ•œ ACL (Amorphous Carbon Layer) ๋ฐ•๋ง‰๊ณผ ๋ฌผ๋ฆฌ์  ์‹๊ฐ ๋ฐ ํ™”ํ•™์  ์‹๊ฐํŠน์„ฑ ํ™•์ธ์— ์ ํ•ฉํ•œ ๊ด€ํ†ตํ˜• ์‹ค๋ฆฌ์ฝ˜ ๋น„์•„ํ™€์— ๋Œ€ํ•œ ์‹๊ฐํŠน์„ฑ์— ๋Œ€ํ•œ ๊ฐ๊ฐ์˜ ์—ฐ๊ตฌ๋ฅผ ์ด์˜จ์—๋„ˆ์ง€๋ถ„์„๋ฒ•, ์•กํ‹ฐ๋…ธ๋ฉ”ํŠธ๋ฆฌ ๋ถ„์„๋ฒ• ๋“ฑ์„ ๋ณ‘ํ–‰ํ•˜์—ฌ ์ˆ˜ํ–‰ํ•˜์˜€๋‹ค. ์ด์ค‘ํŒจํ„ดํ˜•์„ฑ๊ณต์ •์—์„œ ACL ๋ฐ•๋ง‰์€ ๋‚˜๋…ธํฌ๊ธฐํŒจํ„ด ํ˜•์„ฑ ์‹œ ํฌ์ƒ๋ง‰์œผ๋กœ ์‚ฌ์šฉ๋œ๋‹ค. ACL ๋ฐ•๋ง‰์€ ๋ฌผ๋ฆฌ์ ์ธ ์‹๊ฐํŠน์„ฑ ํ‰๊ฐ€์— ์ ํ•ฉํ•œ ๋ฌผ์งˆ๋กœ ์žํ™”๋œ Ar ํ”Œ๋ผ์ฆˆ๋งˆ์—์„œ์˜ ์‹๊ฐํŠน์„ฑ์„ ์—ฐ๊ตฌํ•˜์˜€๋‹ค. ์‹๊ฐ ์‹คํ—˜ ์‹œ Source power, Bias power, ์••๋ ฅ, ์˜จ๋„ ๊ทธ๋ฆฌ๊ณ  O2 ์ฒจ๊ฐ€ ์ •๋„์— ๋”ฐ๋ฅธ ์‹๊ฐ ๋‹จ๋ฉด์˜ ๋ณ€ํ™”, ๋น„๋“ฑ๋ฐฉ๋„ ๊ทธ๋ฆฌ๊ณ  ์‹๊ฐ ์†๋„์˜ ๋ณ€ํ™”์— ๋Œ€ํ•œ ์˜ํ–ฅ์„ ํ™•์ธํ•˜์˜€๋‹ค. Ion flux ๋ฐ ์ด์˜จ์—๋„ˆ์ง€ ๋ถ„ํฌ ๋“ฑ๋„ ์ด์˜จ์—๋„ˆ์ง€ ๋ถ„์„๋ฒ•(Ion Energy Analysis)์„ ์ด์šฉํ•˜์—ฌ ์ธก์ •ํ•˜์˜€๋‹ค. ๊ทธ๋ฆฌ๊ณ , ์ด๋Ÿฌํ•œ ์ธก์ •๊ฒฐ๊ณผ๋ฅผ ๋ฐ”ํƒ•์œผ๋กœ ์‹๊ฐ๋‹จ๋ฉด์˜ ๋ณ€ํ™”๋ฅผ ์„ค๋ช…ํ•˜๊ณ ์ž ํ•˜์˜€๋‹ค. ์••๋ ฅ์˜ ์ฆ๊ฐ€์— ๋”ฐ๋ผ ๋‹จ๋ฉด์ƒ์—์„œ ์‹๊ฐ์†๋„๊ฐ€ ์ฆ๊ฐ€ํ•จ์„ ํ™•์ธํ•  ์ˆ˜ ์žˆ์—ˆ์œผ๋ฉฐ ion flux๋ณด๋‹ค๋Š” ion energy์— ์˜์กดํ•˜๋Š” ๊ฒƒ์œผ๋กœ ํ™•์ธ๋˜์—ˆ๋‹ค. Bias power ์ฆ๊ฐ€ ์‹œ์—” ์‹๊ฐ์†๋„๊ฐ€ ์ฆ๊ฐ€ํ•˜๋ฉฐ ์‹๊ฐ ํ”„๋กœํ™”์ผ์— ๋Œ€ํ•œ ์˜ํ–ฅ์ด ํผ์„ ํ™•์ธํ•˜์˜€๋‹ค. IED ์ธก์ •๊ฒฐ๊ณผ์—์„œ๋„ high energy ์˜์—ญ ion flux๊ฐ€ ์ฆ๊ฐ€ํ•จ์„ ํ™•์ธํ•  ์ˆ˜ ์žˆ์—ˆ๋‹ค. Source power ์ฆ๊ฐ€ ์‹œ์—๋„ ์‹๊ฐ์†๋„๊ฐ€ ์ฆ๊ฐ€ํ•˜๋ฉฐ ์ด๋Š” ion flux ์ฆ๊ฐ€ ์— ๊ธฐ์ธํ•˜๋Š” ๊ฒƒ์œผ๋กœ ๋ณด์ธ๋‹ค. ๋™์ผ ์กฐ๊ฑดํ•˜์—์„œ ์žํ™”๋œ ํ”Œ๋ผ์ฆˆ๋งˆ์—์„œ์˜ ์‹๊ฐ์†๋„๋Š” ๋น„์žํ™” ์กฐ๊ฑด์˜ ๊ฒฝ์šฐ๋ณด๋‹ค 1.7๋ฐฐ ๋น ๋ฅธ ๊ฐ’์„ ๋ณด์ด๋ฉฐ ion energy ๋ฐ ion flux์˜ ๊ฒฝ์šฐ๋„ ํฐ ์ฐจ์ด๋ฅผ ๋ณด์˜€๋‹ค. ์ด์™€ ๊ฐ™์€ ๊ฒฐ๊ณผ๋กœ M-ICP ์ ์šฉ ์‹œ์— ICP ์ ์šฉ ์‹œ๋ณด๋‹ค ์ƒ๋‹นํžˆ ๋น ๋ฅธ ์‹๊ฐ์†๋„๋ฅผ ํ™•๋ณดํ•  ์ˆ˜ ์žˆ์Œ์„ ํ™•์ธํ•˜์˜€๋‹ค. ์ด์ƒ์—์„œ ACL Pattern ์„ ์ด์šฉํ•˜์—ฌ Ar ์ด์˜จ์„ ์ค‘์‹ฌ์œผ๋กœ ํ•œ Physical effect ์ธก๋ฉด์—์„œ ์‹๊ฐํ˜„์ƒ์— ๋Œ€ํ•ด ํ™•์ธํ•œ ๋ฐ ์ด์–ด SF6/O2 ํ”Œ๋ผ์ฆˆ๋งˆ์—์„œ์˜ Silicon ์‹๊ฐ ์‹คํ—˜์„ ํ†ตํ•ด ion๊ณผ ๋ผ๋””์นผ์˜ ์ฐจ์ด์™€ ๊ฑฐ๋™์— ๋Œ€ํ•ด ์‚ดํŽด๋ณด๊ณ ์ž ํ•˜์˜€๋‹ค. ๊ด€ํ†ตํ˜• ์‹ค๋ฆฌ์ฝ˜ ๋น„์•„ํ™€, ์ฆ‰ TSV(Through Silicon Via) ๊ณต์ •์€ ๋ฐ˜๋„์ฒด ๊ณต์ •์—์„œ ์›จ์ดํผ์— via hole์„ ํ˜•์„ฑํ•˜์—ฌ Chip๊ณผ Chip ๋˜๋Š” ์›จ์ดํผ์™€ ์›จ์ดํผ๋ฅผ ์—ฐ๊ฒฐํ•˜๋Š” 3D stacking ๊ธฐ์ˆ ์˜ ํ•ต์‹ฌ๊ณต์ • ์ค‘์˜ ํ•˜๋‚˜์ด๋‹ค. ์ด๋Ÿฌํ•œ TSV ๊ณต์ •์€ Throughput์˜ ํ–ฅ์ƒ์„ ์œ„ํ•ด ๋†’์€ ์‹๊ฐ ์†๋„๋ฅผ ๊ธฐ๋ณธ ํ•„์š” ์กฐ๊ฑด์œผ๋กœ ํ•œ๋‹ค. ์žํ™”๋œ ์œ ๋„ ๊ฒฐํ•ฉ ์‹๊ฐ ์žฅ์น˜ ํ•˜์—์„œ SF6/O2 ํ”Œ๋ผ์ฆˆ๋งˆ์˜ ํŠน์„ฑ์„ ์••๋ ฅ, ๊ธฐํŒ์˜จ๋„, Source power, Bias power, ๊ฐ€์Šคํ˜ผํ•ฉ๋น„ ๋“ฑ์˜ ๋ณ€์ˆ˜๋ฅผ ๊ณ ๋ คํ•˜์—ฌ ์‹ค์ œ ์‹๊ฐ์‹คํ—˜์„ ์ง„ํ–‰ํ•˜์˜€์œผ๋ฉฐ ๋™์ผ์กฐ๊ฑด์— ๋Œ€ํ•œ ํ”Œ๋ผ์ฆˆ๋งˆ์ƒํƒœ๋ฅผ ์•กํ‹ฐ๋…ธ๋ฉ”ํ„ฐ๋ฅผ ์ด์šฉํ•œ ๊ด‘๋ฐฉ์ถœ ๋ถ„์„๋ฒ• (Actinometry)์„ ์ด์šฉํ•˜์—ฌ ๋ผ๋””์นผ ๋ถ„์„์„ ์‹ค์‹œํ•˜๊ณ  SF6/O2 ํ”Œ๋ผ์ฆˆ๋งˆ์˜ ๋ณต์žก์„ฑ๊ณผ ์˜ค์—ผ ๋“ฑ์— ๋”ฐ๋ฅธ ์ธก์ • ๋ถ€์ •ํ™•ํ•จ์„ ๋ฐฐ์ œํ•˜๊ณ  ํ•ด์„ํ•˜๊ธฐ ์œ„ํ•ด Ar ํ”Œ๋ผ์ฆˆ๋งˆํ•˜์—์„œ ์ด์˜จ์—๋„ˆ์ง€ ๋ถ„์„(Ion Energy Analysis)์„ ์ˆ˜ํ–‰ํ•˜์˜€๋‹ค. ๋˜ํ•œ, ๊ด€ํ†ตํ˜• ์‹ค๋ฆฌ์ฝ˜ ๋น„์•„ํ™€ ์‹๊ฐ ํŠน์„ฑ์— ๋Œ€ํ•œ ์•ฝ์ž์žฅ ์ธ๊ฐ€์‹œ์˜ ํšจ๊ณผ์— ๋Œ€ํ•ด ๋ณด๊ณ ํ•˜๊ณ  ์ž์žฅ ๋น„์ธ๊ฐ€ ์‹œ์˜ ๊ฒฝ์šฐ์™€ ๋น„๊ตํ•˜์˜€๋‹ค. ์‹๊ฐ ํŠน์„ฑ์˜ ๋ณ€ํ™”๋ฅผ ๊ด€์ฐฐํ•˜๊ธฐ ์œ„ํ•ด SF6/O2์˜ ๊ฐ€์Šคํ˜ผํ•ฉ๋น„์™€ ์••๋ ฅ์— ๋ณ€ํ™”๋ฅผ ์ฃผ์—ˆ๋‹ค. ์•ฝ์ž์žฅ์ด ์ธ๊ฐ€๋œ M-ICP์—์„œ ๋ผ๋””์นผ๊ณผ ์ด์˜จ์ข…์˜ ์–‘์€ ์ฆ๊ฐ€ํ•˜๊ณ  ์‹๊ฐ์†๋„ ๋˜ํ•œ ์ฆ๊ฐ€ํ•˜์˜€๋‹ค. ์ตœ์ ์˜ SF6/O2 ํ˜ผํ•ฉ๋น„์—์„œ ์••๋ ฅ์„ ๋‚ฎ์ถ”๋Š” ๊ฒƒ์ด lateral etching์„ ์ตœ์†Œํ™”ํ•˜๊ณ  ์ข‹์€ ๋“ฑ๋ฐฉ๋น„์—์„œ ๋†’์€ ์‹๊ฐ ์†๋„๋ฅผ ์–ป์„ ์ˆ˜ ์žˆ์Œ์„ ํ™•์ธํ•˜์˜€๋‹ค. ์ด์ƒ์˜ ์—ฐ๊ตฌ๋ฅผ ํ†ตํ•ด M-ICP ์žฅ์น˜๋ฅผ ์ด์šฉํ•˜์—ฌ ์ตœ์‹  ๋ฐ˜๋„์ฒด ๊ณต์ •์—์„œ ์‚ฌ์šฉ๋˜๋Š” ๋ฌผ์งˆ๊ณผ Pattern์— ๋Œ€ํ•œ ์‹๊ฐ๊ณต์ •์—์„œ ๊ณ ๋ฐ€๋„ ํ”Œ๋ผ์ฆˆ๋งˆ์˜ ํ˜•์„ฑ์„ ํ†ตํ•ด ๋†’์€ ์‹๊ฐ์†๋„๋ฅผ ๊ตฌํ˜„ํ•  ์ˆ˜ ์žˆ๋Š” ๋™์‹œ์— ์ €์••์—์„œ๋„ ์šด์šฉ๊ฐ€๋Šฅํ•จ์„ ํ™•์ธ, ์šฐ์ˆ˜ํ•œ ์„ฑ๋Šฅ์„ ๊ฐ€์ง€๊ณ  ์žˆ์Œ์„ ํ™•์ธํ•˜์˜€๋‹ค. ๋ฌผ๋ฆฌ์  ์‹๊ฐ๊ณผ ํ™”ํ•™์  ์‹๊ฐ ํŠน์„ฑ์„ M-ICP์™€ ICP ์ƒํƒœ์—์„œ ๊ฐ๊ธฐ ๊ด€์ฐฐํ•˜๊ณ  ์ด์˜จ๊ณผ ๋ผ๋””์นผ์˜ ๋ณ€ํ™”๋ถ„์„์„ ํ†ตํ•ด M-ICP๊ฐ€ ๊ฐ€์ง€๋Š” ํŠน์„ฑ์„ ์ดํ•ดํ•˜๊ณ  ์‹ค์ œ ์‹๊ฐ๊ณต์ •์—์„œ์˜ ์‘์šฉ์—์„œ์˜ ๊ณ ๋ฐ€๋„, ๊ณ ์‹๊ฐ์†๋„ ๋“ฑ์˜ ์žฅ์ ์„ ํ™•์ธํ–ˆ๋‹ค๋Š” ์ ์— ๊ทธ ์˜์˜๊ฐ€ ์žˆ๋‹ค. [๋ถ€๋ก] ๋‚˜๋…ธ ๋˜๋Š” ๋งˆ์ดํฌ๋กœ ํฌ๊ธฐ์˜ ๊ตฌ์กฐ๋ฅผ ๊ฐ€์ง„ Polymer์˜ ํ‘œ๋ฉด์— ๋Œ€ํ•œ ์—ฐ๊ตฌ๋Š” ๋‹ค์–‘ํ•œ ์‘์šฉ๋ถ„์•ผ์— ์ ์šฉํ•  ๋ชฉ์ ์œผ๋กœ ๋งŽ์€ ๊ด€์‹ฌ์„ ๋Œ๊ณ  ์žˆ์œผ๋ฉฐ ๋Œ€ํ‘œ์ ์ธ ๋ถ„์•ผ๊ฐ€ ๋ฌผ์ด๋‚˜ ๊ธฐ๋ฆ„์ด ์ž˜ ๋ฌป์ง€ ์•Š๋Š” ํ•„๋ฆ„์†Œ์žฌ, ํˆฌ๊ณผ์„ฑ ์†Œ์žฌ, ๊ทธ๋ฆฌ๊ณ  ์„ฌ์œ ์†Œ์žฌ ๋ถ„์•ผ ๋“ฑ์ด๋‹ค. ํ”Œ๋ผ์ฆˆ๋งˆ ์ฒ˜๋ฆฌ ๊ธฐ์ˆ ์€ ๊ฑด์‹๊ธฐ์ˆ ๋กœ ํ์•ก์ด ์ƒ์„ฑ๋˜์ง€ ์•Š๋Š” ์นœํ™˜๊ฒฝ์ ์ธ ๊ธฐ์ˆ ๋กœ ํ”Œ๋ผ์ฆˆ๋งˆ ์ฒ˜๋ฆฌ ๊ณต์ •์„ ํฌํ•จํ•œ ๊ฐ„๋‹จํ•œ ๊ณต์ •์œผ๋กœ ๊ตฌ์„ฑ์ด ๊ฐ€๋Šฅํ•˜๋ฉฐ ํ์•ก ์ฒ˜๋ฆฌ ๊ณต์ •์ด ๋ถˆํ•„์š”ํ•˜์—ฌ ์ €๋น„์šฉ์˜ ์žฅ์ ์„ ๊ฐ–๋Š”๋‹ค. ์„ ํ–‰ ์—ฐ๊ตฌ์—์„œ ํ”Œ๋ผ์ฆˆ๋งˆ์˜ ๋ฐ€๋„์™€ ํ•จ๊ป˜ ์ด์˜จ์„ ๋…๋ฆฝ์ ์œผ๋กœ controlํ•˜์—ฌ ํด๋ฆฌ๋จธ ํ‘œ๋ฉด์˜ ๋ณ€ํ™”๋ฅผ ์œ ๋„ํ•˜๋Š” ์—ฐ๊ตฌ๋Š” ๊ฑฐ์˜ ์—†๋Š” ์ƒํ™ฉ์ด๋‹ค. ๋”ฐ๋ผ์„œ, ๋ณธ ์—ฐ๊ตฌ์—์„œ๋Š” Bias power๋ฅผ ์ธ๊ฐ€ํ•˜์—ฌ ๋…๋ฆฝ์ ์œผ๋กœ ๊ฑฐ๋™์„ ์กฐ์ ˆํ•  ์ˆ˜ ์žˆ๋Š” ICP chamber์—์„œ CF4 ๊ฐ€์Šค๋ฅผ ์‚ฌ์šฉํ•˜์—ฌ PET์— ๋Œ€ํ•œ ํ”Œ๋ผ์ฆˆ๋งˆ ๊ฑด์‹ ์‹๊ฐ ์ฒ˜๋ฆฌ ์‹œ ์˜ํ–ฅ์„ ์•Œ์•„๋ณด๊ณ  ํ‘œ๋ฉด์˜ ๋ณ€ํ™”์™€ mechanism์„ ๋ฐํžˆ๊ณ ์ž ํ•˜์˜€๋‹ค. CF4 plasma์—์„œ PET film์— ๋Œ€ํ•ด Source power, Bias power, ์ฒ˜๋ฆฌ์‹œ๊ฐ„ ๋“ฑ etch parameter์— ์˜ํ•œ ์‹๊ฐ ์‹œ ํ‘œ๋ฉด๋ณ€ํ™”ํŠน์„ฑ์„ ์‚ดํŽด๋ณด๊ณ ์ž ํ•˜์˜€๋‹ค. Source power ๋ณ€ํ™”์— ๋”ฐ๋ฅธ ํ‘œ๋ฉด์˜ ์ฐจ์ด๋Š” ์ ‘์ด‰๊ฐ ๋“ฑ๊ณผ XPS์—์„œ๋„ ์œ ์˜ํ• ๋งŒํ•œ ์ฐจ์ด์ ์ด ์—†์—ˆ๋‹ค. ์ฒ˜๋ฆฌ์‹œ๊ฐ„์˜ ๋ณ€ํ™”์— ๋”ฐ๋ฅธ ํ‘œ๋ฉด์˜ ์ฐจ์ด๊ฐ€ ๊ด€์ฐฐ๋˜์—ˆ์œผ๋‚˜ ์ ‘์ด‰๊ฐ ์ธก๋ฉด์—์„œ ํฐ ์ฐจ์ด๋Š” ๋ณด์ด์ง€ ์•Š์•˜๋‹ค. Bias power์— ๋ณ€ํ™”๋ฅผ ์ค€ ๊ฒฝ์šฐ์—๋Š” Bias power๊ฐ€ ์ฆ๊ฐ€ํ•จ์— ๋”ฐ๋ผ ํ‘œ๋ฉด์˜ ๊ฑฐ์น ๊ธฐ ๋ฐ ๊ฒฐํ•ฉ์˜ ๋ณ€ํ™”, ์ ‘์ด‰๊ฐ์˜ ๋ณ€ํ™”๊ฐ€ ๊ด€์ฐฐ๋˜์—ˆ๊ณ  XPS ๊ฒฐ๊ณผ์—์„œ๋„ ์œ ์˜์ฐจ๊ฐ€ ๊ด€์ฐฐ๋˜์—ˆ๋‹ค. ํ‘œ๋ฉด์˜ ๊ฑฐ์น ๊ธฐ์™€ CF2 ์™€ CF3 group์˜ ๋†๋„ํ•ฉ์˜ ๋ณ€ํ™”, ๊ทธ๋ฆฌ๊ณ  ์ ‘์ด‰๊ฐ์˜ ๋ณ€ํ™”๋Š” Bias powr ์ธ๊ฐ€ ์ •๋„์— ๋”ฐ๋ฅธ ์˜ํ–ฅ์ด ๊ด€์ฐฐ๋˜์—ˆ๊ณ  PET ํ‘œ๋ฉด์— ๋Œ€ํ•œ ion ๊ฑฐ๋™๊ณผ ๋ฐ€์ ‘ํ•œ ๊ด€๊ณ„๊ฐ€ ์žˆ๋Š” ๊ฒƒ์œผ๋กœ ๋ณด์ธ๋‹ค. ๋˜ํ•œ, Bias power ๋ณ€ํ™” ์กฐ๊ฑด์œผ๋กœ CF4 ํ”Œ๋ผ์ฆˆ๋งˆ ์ฒ˜๋ฆฌ๋œ PET ์‹œ๋ฃŒ๋“ค์—์„œ ๋ฐœ์ˆ˜์„ฑ ํšŒ๋ณตํ˜„์ƒ์ด ๊ด€์ฐฐ๋˜์—ˆ๋‹ค. ์‹œ๊ฐ„ ๊ฒฝ๊ณผ์— ๋”ฐ๋ผ ์ ‘์ด‰๊ฐ์ด ์ž๋ฐœ์ ์œผ๋กœ ์ฆ๊ฐ€ํ•˜์˜€๊ณ  ์ดˆ๋ฐœ์ˆ˜์„ฑ์— ๊ฐ€๊นŒ์šด ์ ‘์ด‰๊ฐ์„ ๋ณด์ด๊ฒŒ ๋˜์—ˆ๋‹ค. XPS ๋ถ„์„๊ฒฐ๊ณผ F1s ์ธก์ • ๊ฒฐ๊ณผ๋Š” Bias power๊ฐ€ ์ฆ๊ฐ€ํ•จ์— ๋”ฐ๋ผ 684.4 eV์˜ peak๊ฐ€ ์ฆ๊ฐ€ํ•˜๋Š” ๊ฒƒ์ด ํ™•์ธ๋˜์—ˆ๊ณ  684.4 eV ๋ถ€๊ทผ์˜ peak ์™€ ๋ฐœ์ˆ˜์„ฑ ํšŒ๋ณต ํ˜„์ƒ์ด ์ƒ๋‹นํžˆ ๋ฐ€์ ‘ํ•œ ๊ด€๊ณ„๊ฐ€ ์žˆ์„ ๊ฒƒ์œผ๋กœ ์ถ”์ •๋˜์–ด ๋ฐœ์ˆ˜์„ฑ ํšŒ๋ณต ํ˜„์ƒ์— ๋Œ€ํ•œ ์ถ”๊ฐ€ ์—ฐ๊ตฌ๋ฅผ ์ง„ํ–‰ํ•˜์˜€๋‹ค. 25W์˜ Bias power๋ฅผ ์ธ๊ฐ€ํ•œ ํ”Œ๋ผ์ฆˆ๋งˆ์ฒ˜๋ฆฌ ํ›„ ์‹œ๊ฐ„๊ฒฝ๊ณผ์— ๋”ฐ๋ผ ์ ‘์ด‰๊ฐ๋ณ€ํ™”๋ฅผ ์ธก์ •ํ•˜๊ณ  XPS ํ‘œ๋ฉด ๋ถ„์„์„ ์ง„ํ–‰ํ•˜์˜€๋‹ค. ์‹œ๊ฐ„๊ฒฝ๊ณผ์— ๋”ฐ๋ฅธ XPS ์ธก์ •๊ฒฐ๊ณผ, 684.4 eV ๋ถ€๊ทผ์˜ F1s peak๊ฐ€ ์‹œ๊ฐ„๊ฒฝ๊ณผ์— ๋”ฐ๋ผ ๊ฐ์†Œํ•˜๋Š” ๊ฒƒ์„ ๊ด€์ฐฐํ•  ์ˆ˜ ์žˆ์—ˆ๋‹ค. 684.4 eV ๋ถ€๊ทผ์˜ peak๋Š” Carbon ์›์†Œ๋‚˜ ๊ฒฐํ•ฉ๊ณผ๋Š” ์ƒ๊ด€์—†๋Š” ์•ฝํ•œ ๋ถˆ์†Œ๊ฒฐํ•ฉ์œผ๋กœ ํ”Œ๋ผ์ฆˆ๋งˆ ๊ณต์ •๊ณผ์ •์—์„œ Ion bombardment์— ์˜ํ•ด ์†์ƒ๋œ CFn ๊ฒฐํ•ฉ์œผ๋กœ๋ถ€ํ„ฐ ๋‚˜์˜จ ๊ฒƒ์œผ๋กœ ์ถ”์ •๋œ๋‹ค. ๊ธฐ์กด์—ฐ๊ตฌ์—์„œ์˜ ๋ฐœ์ˆ˜์„ฑ ํšŒ๋ณต์— ๋Œ€ํ•œ ๋ฉ”์ปค๋‹ˆ์ฆ˜๋“ค์€ O2, Ar, water vapor, ๋˜๋Š” ammonia plasmas ๋“ฑ์— ๋Œ€ํ•ด ์ œ์•ˆ๋œ ๋ฐ” ์žˆ์œผ๋‚˜ CF4 ํ”Œ๋ผ์ฆˆ๋งˆ์— ๋Œ€ํ•ด์„œ๋Š” ๋ณด๊ณ ๋œ ๋ฐ” ์—†๋‹ค. ์ถ”๊ฐ€์ ์ธ ์—ฐ๊ตฌ๊ฐ€ ํ•„์š”ํ•จ์—๋„ ๋ถˆ๊ตฌํ•˜๊ณ  ์ด๋™ ๋˜๋Š” ์žฌ๊ฒฐํ•ฉ์„ ํ†ตํ•ด ์ƒ์„ฑ๋œ ๊ฒƒ์œผ๋กœ ๋ณด์ด๋Š” ionic fluoride ๋†๋„๊ฐ€ ์ž๋ฐœ์ ์œผ๋กœ ๊ฐ์†Œํ•˜๋Š” ํ˜„์ƒ์ด ๋ฐœ์ˆ˜์„ฑ ํšŒ๋ณต์˜ ๊ทผ๋ณธ ์›์ธ์œผ๋กœ ํ™•์ธ๋˜์—ˆ๋‹ค. ์ฃผ์š”์–ด: ์žํ™” ์œ ๋„๊ฒฐํ•ฉ ํ”Œ๋ผ์ฆˆ๋งˆ (Magnetized inductively coupled plasma), ํ”Œ๋ผ์ฆˆ๋งˆ ์‹๊ฐ (Plasma etching), ACL (Amorphous Carbon Layer), TSV (Through Silicon Via), ์ด์˜จ์—๋„ˆ์ง€๋ถ„์„๊ธฐ (Ion Energy Analyzer), ๊ด‘๋ฐฉ์ถœ๋ถ„์„๋ฒ• (Optical Emission Spectroscopy)๋ชฉ ์ฐจ ๊ตญ ๋ฌธ ์ดˆ ๋ก i ๋ชฉ ์ฐจ vi ์ œ 1 ์žฅ ์„œ ๋ก  1 1.1 ์•„๋ชจํผ์Šค์นด๋ณธ๋ฐ•๋ง‰์—์„œ์˜ ๊ฑด์‹์‹๊ฐํŠน์„ฑ 4 1.2 Through Silicon Via (TSV) ๊ฑด์‹์‹๊ฐํŠน์„ฑ 6 1.3 ๋…ผ๋ฌธ์˜ ๊ตฌ์„ฑ 6 ์ œ 2 ์žฅ ํ”Œ๋ผ์ฆˆ๋งˆ๋ฅผ ์ด์šฉํ•œ ๊ฑด์‹ ์‹๊ฐ ์žฅ์น˜ 9 2.1 ๊ฑด์‹ ์‹๊ฐ์— ์ด์šฉ๋˜๋Š” ํ”Œ๋ผ์ฆˆ๋งˆ ์†Œ์Šค์˜ ์ข…๋ฅ˜ 9 2.2 ์œ ๋„ ๊ฒฐํ•ฉ ํ”Œ๋ผ์ฆˆ๋งˆ(ICP) 13 2.2.1 ์œ ๋„ ๊ฒฐํ•ฉ ํ”Œ๋ผ์ฆˆ๋งˆ์˜ ์†Œ์Šคํ˜•ํƒœ์™€ ๋ฐœ์ƒ์›๋ฆฌ 13 2.3 ๊ธฐ์กด์˜ ์ž๊ธฐ์žฅ์ด ์ด์šฉ๋œ ํ”Œ๋ผ์ฆˆ๋งˆ ์‹๊ฐ์žฅ์น˜ 17 2.4 M-ICP์‹œ์Šคํ…œ 19 2.4.1 ์œ ๋„๊ฒฐํ•ฉํ˜• ํ”Œ๋ผ์ฆˆ๋งˆ์™€ ์ž๊ธฐ์žฅ์ด ์ธ๊ฐ€๋œ ์œ ๋„๊ฒฐํ•ฉํ˜• ํ”Œ๋ผ์ฆˆ๋งˆ์˜ ํŠน์„ฑ๋น„๊ต 19 2.4.2 ํ”Œ๋ผ์ฆˆ๋งˆ ์‹คํ—˜ ์žฅ์น˜ 22 ์ œ 3 ์žฅ ํ”Œ๋ผ์ฆˆ๋งˆ ์ง„๋‹จ ์žฅ์น˜ ์†Œ๊ฐœ 29 3.1 Ion Energy Analyzer์— ์˜ํ•œ ํ”Œ๋ผ์ฆˆ๋งˆ ์ง„๋‹จ์›๋ฆฌ ๋ฐ ์žฅ์น˜ 29 3.2 ์ด์˜จ ์—๋„ˆ์ง€ ๋ถ„ํฌ 32 3.3 ๋ถ„๊ด‘ ๋ถ„์„๋ฒ•์— ์˜ํ•œ ํ”Œ๋ผ์ฆˆ๋งˆ ์ง„๋‹จ ์›๋ฆฌ ๋ฐ ์žฅ์น˜ 34 ์ œ 4 ์žฅ ๋‚˜๋…ธ๊ธ‰ ์•„๋ชจํผ์Šค ์นด๋ณธ ํŒจํ„ด์˜ ๊ฑด์‹ ์‹๊ฐ ํŠน์„ฑ 39 4.1 ์•„๋ชจํผ์Šค ์นด๋ณธ ์†Œ๊ฐœ ๋ฐ ์„ ํ–‰ ์—ฐ๊ตฌ ๋™ํ–ฅ 39 4.1.1 ์•„๋ชจํผ์Šค ์นด๋ณธ ์†Œ๊ฐœ 39 4.1.2 ์„ ํ–‰ ์—ฐ๊ตฌ ๋™ํ–ฅ 43 4.2 ํ‰๊ฐ€ ์‹œ๋ฃŒ ๋ฐ ์‹คํ—˜ ๋ฐฉ๋ฒ• 45 4.3 ์‹๊ฐ Gas ๋ฐ ์กฐ๊ฑด ์„ ์ • 46 4.4 M-ICP ์žฅ์น˜์—์„œ์˜ ํŒŒ๋ผ๋ฏธํ„ฐ๋ณ„ ์‹๊ฐ ์˜ํ–ฅ 48 4.4.1 ์••๋ ฅ์˜ ์˜ํ–ฅ 48 4.4.2 Source power์˜ ์˜ํ–ฅ 53 4.4.3 Bias power์˜ ์˜ํ–ฅ 58 4.4.4 ๊ธฐํŒ ์˜จ๋„ (Substrate Temperature) ์˜ ์˜ํ–ฅ 62 4.4.5 O2 ์ฒจ๊ฐ€์˜ ์˜ํ–ฅ 64 4.5 M-ICP์™€ ICP ์กฐ๊ฑด์—์„œ์˜ ์‹๊ฐ์–‘์ƒ ๋น„๊ต 68 4.5.1 ์žํ™”์—ฌ๋ถ€์— ๋”ฐ๋ฅธ ๋น„๊ต- ๋™์ผ์กฐ๊ฑด 69 4.5.2 ์žํ™”์—ฌ๋ถ€์— ๋”ฐ๋ฅธ ๋น„๊ต- Source power 71 4.5.3 ์žํ™”์—ฌ๋ถ€์— ๋”ฐ๋ฅธ ๋น„๊ต- Bias power 75 4.6 ์š”์•ฝ ๋ฐ ํ–ฅํ›„ ๊ณผ์ œ 78 ์ œ 5 ์žฅ ๊ด€ํ†ตํ˜• ๋น„์•„ํ™€ ๊ฑด์‹ ์‹๊ฐ ํŠน์„ฑ 81 5.1 ์‹ค๋ฆฌ์ฝ˜ ๋น„์•„ ํ™€ ์‹๊ฐ์— ๋Œ€ํ•œ ์†Œ๊ฐœ ๋ฐ ์„ ํ–‰ ์—ฐ๊ตฌ 81 5.2 ์‹๊ฐ Gas ๋ฐ ์กฐ๊ฑด ์„ ์ •์„ ์œ„ํ•œ Screening Test 88 5.2.1 SF6, C4F8 ํ˜ผํ•ฉ ๊ฐ€์Šค ์ ์šฉ ์‹œ ์‹๊ฐํŠน์„ฑ 89 5.2.2 ์ƒ์˜จ์—์„œ์˜ SF6, O2 ๊ฐ€์Šค ์ ์šฉ ์‹œ ์‹๊ฐํŠน์„ฑ 91 5.3 SF6, O2 ํ”Œ๋ผ์ฆˆ๋งˆ์—์„œ์˜ ์‹ค๋ฆฌ์ฝ˜ ๋น„์•„ํ™€ ์‹๊ฐํŠน์„ฑ 93 5.3.1 ์‹คํ—˜์—์„œ์˜ ์‹ค๋ฆฌ์ฝ˜ ๋น„์•„ํ™€ ์‹๊ฐ ์‹œ๋ฃŒ ์ œ์ž‘ ๋ฐ ์‹คํ—˜ ๋ฐฉ๋ฒ• 93 5.3.2 SF6, O2 ํ”Œ๋ผ์ฆˆ๋งˆ์—์„œ ๊ธฐํŒ์˜จ๋„์˜ ์‹๊ฐ์— ๋Œ€ํ•œ ์˜ํ–ฅ 96 5.3.3 Contact hole diameter์— ๋”ฐ๋ฅธ ์‹๊ฐ์†๋„์ฐจ์˜ ์›์ธ 107 5.3.3.1 ARDE (Aspect Ratio Dependent Etching) ์˜ ์ •์˜ 107 5.3.3.2 ARDE ( RIE Lag )์˜ ์›์ธ 109 5.3.3.3 ๋ณธ ์‹คํ—˜์—์„œ์˜ ARDE ( RIE Lag )์˜ ์›์ธ๋“ค 112 5.4 ๊ณต์ • Parameter๋ณ„ ์‹๊ฐ์˜ํ–ฅ 113 5.4.1 ์••๋ ฅ์— ๋”ฐ๋ฅธ ์˜ํ–ฅ 114 5.4.2 Source power์— ๋”ฐ๋ฅธ ์˜ํ–ฅ 118 5.4.3 Self bias voltage์— ๋”ฐ๋ฅธ ์˜ํ–ฅ 120 5.4.4 SF6, O2 ๊ฐ€์Šค ํ˜ผํ•ฉ๋น„์˜ ๋ณ€ํ™”์— ๋”ฐ๋ฅธ ์˜ํ–ฅ 123 5.5 ์žํ™”์—ฌ๋ถ€์— ๋”ฐ๋ฅธ ์‹๊ฐ ํŠน์„ฑ ๋ณ€ํ™” 127 5.6 ์š”์•ฝ ๋ฐ ํ–ฅํ›„ ๊ณผ์ œ 132 ์ œ 6 ์žฅ ๊ฒฐ ๋ก  135 ๋ถ€๋ก. PET film์˜ ๊ฑด์‹ํ”Œ๋ผ์ฆˆ๋งˆ์— ์˜ํ•œ ์ดˆ๋ฐœ์ˆ˜์„ฑ ์—ฐ๊ตฌ 141 A.1 Polymer ํ‘œ๋ฉด์ฒ˜๋ฆฌ ๋ฐฉ๋ฒ•๊ณผ ํŠน์ง• 141 A.2 PET ๋“ฑ ํด๋ฆฌ๋จธ ๋ฐ•๋ง‰์—์„œ ์†Œ์ˆ˜์„ฑ ํ‘œ๋ฉด ๊ตฌํ˜„์„ ์œ„ํ•œ ์ข…๋ž˜์˜ ์—ฐ๊ตฌ 145 A.3 PET ์‹œ๋ฃŒ ์ค€๋น„ ๋ฐ ์‹คํ—˜ ๋ฐฉ๋ฒ• 147 A.4 Etch Parameter์— ๋”ฐ๋ฅธ PET Film์˜ ์‹๊ฐํŠน์„ฑ 150 A.4.1 PET film ์†Œ๊ฐœ 150 A.4.2 Source power์˜ ์˜ํ–ฅ 153 A.4.3 ์ฒ˜๋ฆฌ์‹œ๊ฐ„์˜ ์˜ํ–ฅ 155 A.4.4 Bias power์˜ ์˜ํ–ฅ 157 A.4.5 ์‹œ๊ฐ„ ๊ฒฝ๊ณผ์— ๋”ฐ๋ฅธ ๋ฐœ์ˆ˜์„ฑ ํšŒ๋ณต ํ˜„์ƒ 162 A.5 ์š”์•ฝ ๋ฐ ํ–ฅํ›„ ๊ณผ์ œ 168 ์ฐธ ๊ณ  ๋ฌธ ํ—Œ 171 ABSTRACT 181Docto

    Quantum circuit of n.n. G(A,B) gates and its classical simulation

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    ํ•™์œ„๋…ผ๋ฌธ (์„์‚ฌ)-- ์„œ์šธ๋Œ€ํ•™๊ต ๋Œ€ํ•™์› : ์ˆ˜๋ฆฌ๊ณผํ•™๋ถ€, 2012. 2. ์ง€๋™ํ‘œ.๊ณ„์‚ฐ ๋ณต์žก์„ฑ์€ ๊ณ„์‚ฐ๋ฌธ์ œ๋ฅผ ํ’€๊ธฐ์œ„ํ•ด์„œ ํ•„์š”ํ•œ ์‹œ๊ฐ„๊ณผ ๊ณต๊ฐ„์— ๋Œ€ํ•ด ์—ฐ๊ตฌํ•œ๋‹ค. ๊ณ ์ „ ์ปดํ“จํ„ฐ์—์„œ ํšจ์œจ์ ์œผ๋กœ ํ’€๋ฆฌ์ง€ ์•Š๋Š” ๋งŽ์€ ๋ฌธ์ œ๋“ค์ด ์žˆ๋‹ค. ๋”ฐ๋ผ์„œ ์šฐ๋ฆฌ๋Š” ์ˆœ์ˆ˜ํ•œ ๊ณ„์‚ฐ์—์„œ ์–‘์ž ๊ณ„์‚ฐ๋ฒ•์ด ๊ณ ์ „ ๊ณ„์‚ฐ๋ฒ•๋ณด๋‹ค ๊ฐ•๋ ฅํ•˜๊ธธ ๊ธฐ๋Œ€ํ•œ๋‹ค. ๊ทธ๋Ÿฌ๋‚˜ ํ˜„์žฌ๊นŒ์ง€ BPP=BQP ์ธ์ง€๋Š” ์•Œ๋ ค์ง€์ง€ ์•Š์•˜๋‹ค. ์ด๋Ÿฐ ๊ด€์ ์—์„œ ์šฐ๋ฆฌ๋Š” ์–‘์ž ๊ณ„์‚ฐ๋ฒ•๊ณผ ๊ณ ์ „ ๊ณ„์‚ฐ๋ฒ•์ด ๊ฐ™์•„์ง€๋Š” ํŠน๋ณ„ํ•œ ์ƒํ™ฉ์„ ๊ด€์ฐฐํ• ๊ฒƒ์ด๋‹ค. ๋” ๋‚˜์•„๊ฐ€ ๋ฌด์—‡์ด ๋‘˜ ์‚ฌ์ด์˜ ์ฐจ์ด๋ฅผ ๊ฐ€์ ธ์˜ฌ์ˆ˜ ์žˆ๋Š”์ง€๋ฅผ ํ™•์ธํ• ๊ฒƒ์ด๋‹ค.Computational complexity is the study of the time and space resources required to solve computational problems. In classical computation there are many problems which are not efficiently solved. So we expect that quantum computation is more powerful than classical computation for pure computation. However, it is not known so far whether BPP=BQP. This implies that it is still possible that efficient classical and quantum computational power might be equal. In this sense we will investigate a special situation in which quantum and classical computational power are equal. Furthermore, in this circumstance we will observe what makes the differences between the two parts if it exists.Maste

    Analysis of prognostic factors in gastric cancer patients treated with total gastrectomy

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    ์˜ํ•™๊ณผ/์„์‚ฌ[ํ•œ๊ธ€] ์ „์„ธ๊ณ„์ ์œผ๋กœ ์œ„์•”์˜ ๋นˆ๋„๋Š” ์ ์ฐจ ์ค„์–ด๋“ค๊ณ  ์žˆ์œผ๋‚˜ ์ƒ๋ถ€์œ„์•”์˜ ์ƒ๋Œ€์  ๋นˆ๋„๋Š” ์˜คํžˆ๋ ค ์ฆ๊ฐ€ํ•˜๊ณ  ์žˆ๋Š” ์ถ”์„ธ๋กœ ์œ„์ „์ ˆ์ œ์ˆ ์˜ ๋นˆ๋„๋„ ์ฆ๊ฐ€ํ•˜๊ณ  ์žˆ๋‹ค. ์ผ๋ฐ˜์ ์œผ๋กœ ์œ„์•„์ „์ ˆ์ œ์ˆ ์„ ์‹œํ–‰ํ•œ ๊ฒฝ์šฐ๋ณด๋‹ค ์œ„์ „์ ˆ์ œ์ˆ  ์‹œํ–‰์˜ˆ์—์„œ ์ƒ์กด์œจ์ด ๋–จ์–ด์ง„๋‹ค๊ณ  ์•Œ๋ ค์ ธ ์žˆ๊ณ  ์ˆ ํ›„ ํ•ฉ๋ณ‘์ฆ ๋ฐ ์ดํ™˜์œจ๋„ ์ƒ๋Œ€์ ์œผ๋กœ ๋†’์•˜์œผ๋‚˜, ์œ„์•”์˜ ์กฐ๊ธฐ๋ฐœ๊ฒฌ์œจ์˜ ์ฆ๊ฐ€ ๋ฐ ๊ทผ๋ž˜ ๋ฐœ๋‹ฌ๋œ ์œ„์•” ์ˆ˜์ˆ ๋ฐฉ๋ฒ•๊ณผ ์ˆ ํ›„ ํ™˜์ž๊ด€๋ฆฌ์˜ ๋ฐœ์ „์— ํž˜์ž…์–ด ์ƒ์กด์œจ์ด ์ฆ๊ฐ€ํ•˜๊ณ  ์ˆ ํ›„ํ•ฉ๋ณ‘์ฆ ๋“ฑ์˜ ๋ฌธ์ œ์ ๋“ค์ด ์ ์ฐจ ๊ฐœ์„ ๋˜๊ณ  ์žˆ๋‹ค. ์œ„์•”์˜ ์˜ˆํ›„์ธ์ž์— ๊ด€ํ•ด์„œ๋„ ๋งŽ์€ ์—ฐ๊ตฌ๊ฒฐ๊ณผ๋“ค์ด ์•Œ๋ ค์ ธ ์žˆ์œผ๋‚˜ ๋Œ€๋ถ€๋ถ„ ์œ„์•„์ „์ ˆ์ œ์ˆ ์„ ์‹œํ–‰ํ•˜์˜€๊ฑฐ๋‚˜ ๊ณ ์‹์  ์ˆ˜์ˆ ์˜ˆ๋“ฑ์„ ํฌํ•จํ•œ ์ „์ฒด ์œ„์•”ํ™˜์ž๋“ค์„ ๋Œ€์ƒ์œผ๋กœ ํ•œ ์—ฐ๊ตฌ๊ฒฐ๊ณผ๋“ค์ด ๋Œ€๋ถ€๋ถ„์œผ๋กœ ์œ„์ „์ ˆ์ œ์ˆ ์„ ์‹œํ–‰ํ•œ ์˜ˆ๋งŒ์„ ๋Œ€์ƒ์œผ๋กœ ํ•œ ์—ฐ๊ตฌ๋Š” ๋งŽ์ง€ ์•Š๋‹ค. ์ด์— ์ €์ž๋Š” 1987๋…„ 1์›”๋ถ€ํ„ฐ 1993๋…„ 12์›”๊นŒ์ง€ 7๋…„๊ฐ„ ์—ฐ์„ธ๋Œ€ํ•™๊ต ์˜๊ณผ๋Œ€ํ•™ ์™ธ๊ณผํ•™๊ต์‹ค์—์„œ ์œ„์„ ์•”์œผ๋กœ ์ง„๋‹จ๋ฐ›๊ณ  ์œ„์ „์ ˆ์ œ์ˆ ์„ ์‹œํ–‰๋ฐ›์€ 557์˜ˆ๋ฅผ ๋Œ€์ƒ์œผ๋กœ ํ›„ํ–ฅ์  ์—ฐ๊ตฌ๋ฅผ ์‹œํ–‰ํ•˜์—ฌ, ์˜ˆํ›„๊ฐ€ ๋น„๊ต์  ์ข‹์ง€ ์•Š๋‹ค๊ณ  ์•Œ๋ ค์ง„ ์œ„์ „์ ˆ์ œ์ˆ  ์‹œํ–‰์˜ˆ์—์„œ์˜ ์ƒ์กด์œจ์„ ์•Œ์•„๋ณด๊ณ  ์˜ˆํ›„์ธ์ž๋ฅผ ๋ถ„์„ํ•œ ๊ฒฐ๊ณผ, ๋‹ค์Œ๊ณผ ๊ฐ™์€ ๊ฒฐ๊ณผ๋ฅผ ์–ป์—ˆ๋‹ค. 1. ์ „์ฒด 557์˜ˆ ์ค‘ ๋‚จ์ž 356์˜ˆ, ์—ฌ์ž 201์˜ˆ๋กœ ๋‚จ๋…€๋น„๋Š” 1.8:1, ํ‰๊ท  ์—ฐ๋ น์€ 52.4์„ธ์˜€์œผ๋ฉฐ, ์ด์ค‘ ์‚ฌ๋ง์˜ˆ๋Š” 248์˜ˆ, 1996๋…„ 3์›”๊นŒ์ง€ ์ƒ์กด์ด ํ™•์ธ๋œ ์˜ˆ๋Š” 257์˜ˆ์˜€๊ณ  ์ƒ์กด์—ฌ๋ถ€๊ฐ€ ๋ถˆํ™•์‹คํ•œ ์˜ˆ๋Š” 52์˜ˆ๋กœ ์ถ”์ ์œจ์€ 90.6%์˜€๋‹ค. 2. ์ „์ฒด 5๋…„ ์ƒ์กด์œจ์€ 49.7%์˜€๊ณ , ๊ฐ ๋ณ‘๊ธฐ์— ๋”ฐ๋ฅธ 5๋…„ ์ƒ์กด์œจ์€ stage โ… a 92.0%, โ… b 85.5%, โ…ก 64.1%, โ…ขa 55.0%, โ…ขb 26.5%, โ…ฃ 6.3%์˜€๋‹ค. ์ˆ˜์ˆ ํ›„ 30์ผ ์ด๋‚ด์— ์‚ฌ๋งํ•œ ์˜ˆ๋Š” 6์˜ˆ๋กœ ์ˆ˜์ˆ  ์‚ฌ๋ง์œจ์€ 1.1% ์˜€๋‹ค. 3. ๋น„์žฅ์ ˆ์ œ๊ตฐ๊ณผ ๋น„์žฅ๋ณด์กด๊ตฐ์˜ 5๋…„ ์ƒ์กด์œจ์€ ๊ฐ๊ฐ 51.9%, 61.2%๋กœ ๋น„์žฅ ๋ณด์กด๊ตฐ์—์„œ ์ƒ์กด์œจ์ด ๋†’์•˜์œผ๋‚˜ ํ†ต๊ณ„์  ์œ ์˜์„ฑ์€ ์—†์—ˆ๋‹ค (p>0.05). ๊ฐ ๋ณ‘๊ธฐ โ… a, โ… b, โ…ก,โ…ขa, โ…ขb, โ…ฃ์— ๋”ฐ๋ฅธ 5๋…„ ์ƒ์กด์œจ์€ ๋น„์žฅ์ ˆ์ œ๊ตฐ์—์„œ 92.1%, 82.9%, 57.0%, 59.4%, 28.1%, 10.8%์˜€๊ณ , ๋น„์žฅ๋ณด์กด๊ตฐ์—์„œ๋Š” 90.8%, 100.0%, 94.1%, 42.0%, 13.3%, 0.0%๋กœ ๋‚˜ํƒ€๋‚ฌ๋‹ค. ๋ณ‘๊ธฐ โ… , โ…ก์—์„œ๋Š” ๋น„์žฅ ๋ณด์กด๊ตฐ์ด ์ƒ์กด์œจ์ด ๋†’์•˜๊ณ  ๋ณ‘๊ธฐ โ…ข, โ…ฃ์—์„œ๋Š” ๋น„์žฅ ์ ˆ์ œ๊ตฐ์ด ์ƒ์กด์œจ์ด ๋†’์•˜์œผ๋‚˜ ํ†ต๊ณ„์  ์œ ์˜์„ฑ์€ ์—†์—ˆ๋‹ค (p>0.05). ๋”ฐ๋ผ์„œ ๋น„๊ต์  ์ดˆ๊ธฐ ๋ณ‘๊ธฐ์ธ ๋ณ‘๊ธฐ โ… , โ…ก์—์„œ๋Š” ๋ฉด ์—ญํ•™์ ์ธ ๊ธฐ๋Šฅ๋ณด์ „์„ ์œ„ํ•ด ๊ฐ€๋Šฅํ•œ ํ•œ ๋น„์žฅ์„ ๋ณด์กดํ•˜๊ณ , ์ง„ํ–‰๋œ ๋ณ‘๊ธฐ์ด๊ฑฐ๋‚˜ ๋น„๋ฌธ ๋ฐ ๋น„๋™๋งฅ์˜ ๊ตญ์†Œ์ด์ƒ์†Œ๊ฒฌ์ด ์žˆ์„ ๋•Œ ๋น„์žฅ์ ˆ์ œ๋ฅผ ํ•˜๋Š” ๊ฒƒ์ด ํ•ฉ๋‹นํ•˜๋‹ค๊ณ  ์ƒ๊ฐ๋˜์—ˆ๋‹ค. 4. ๋‹จ๋ณ€๋Ÿ‰ ๋ถ„์„์—์„œ ์œ„์•”ํ™˜์ž์˜ ์ƒ์กด์— ์˜ํ–ฅ์„ ์ฃผ๋Š” ์ธ์ž๋กœ๋Š” ์—ฐ๋ น, ์•”์˜ ์นจ์œค๋„, ๋ฆผํ”„์ ˆ ์ „์ด ๋ฒ”์œ„, ์ „์ด๋œ ๋ฆผํ”„์ ˆ์˜ ๊ฐœ์ˆ˜, ๋ฆผํ”„์ ˆ ์ „์ด๋น„์œจ(node ratio;์ „์ด๋œ ๋ฆผํ”„์ ˆ ๊ฐœ์ˆ˜๋ฅผ ๋ฆผํ”„์ ˆ ์ด์ˆ˜๋กœ ๋‚˜๋ˆˆ ์ˆ˜์น˜), ์›๊ฒฉ์ „์ด(๋ณต๋ง‰์ „์ด ๋ฐ ๊ฐ„์ „์ด), TNM ๋ณ‘๊ธฐ, ์กฐ์งํ•™์  ๋ถ„ํ™”๋„, ์œก์•ˆ์  ํ˜•ํƒœ, ์ข…์–‘์˜ ํฌ๊ธฐ, ์œ„์น˜ ๋ฐ ๊ทผ์น˜์  ์ ˆ์ œ์—ฌ๋ถ€ ๋“ฑ์ด์—ˆ๋‹ค. 5. ๋‹ค๋ณ€๋Ÿ‰ ๋ถ„์„์—์„œ ๊ฐ€์žฅ ์ค‘์š”ํ•œ ์˜ˆํ›„์ธ์ž๋Š” TNM ๋ณ‘๊ธฐ๋กœ ๋‚˜ํƒ€๋‚ฌ์œผ๋ฉฐ, TNM ๋ณ‘๊ธฐ์ด์™ธ์— ์ค‘์š”ํ•œ ์˜ˆํ›„์ธ์ž๋กœ๋Š” ๋ณต๋ง‰์ „์ด(Ratio of risk=3.11), ๋ฆผํ”„์ ˆ ๋น„์œจ(R.R=1.91), ๋ฆผํ”„์ ˆ ์ „์ด(R.R=1.83), ์ „์ด๋œ ๋ฆผํ”„์ ˆ ๊ฐœ์ˆ˜(R.R=1.64), ์•”์˜ ์นจ์œค๋„(R.R=1.50) ๋“ฑ์ด์—ˆ๋‹ค. 6. ๋ฆผํ”„์ ˆ ์ „์ด๊ฐœ์ˆ˜์™€ ๋ฆผํ”„์ ˆ ์ „์ด๋น„์œจ์€ ์ˆ˜์ˆ ์˜ ๊ทผ์น˜๋„๊ฐ€ ์œ ์ง€ ๋  ๋•Œ ์ƒ์กด์œจ๊ณผ ๋ฐ€์ ‘ํ•œ ๊ด€๋ จ์„ ๊ฐ€์ง€๋Š” ๋…๋ฆฝ์  ์˜ˆํ›„์ธ์ž๋กœ์„œ, ํ–ฅํ›„ ๋ณ‘๊ธฐ๋ถ„๋ฅ˜์— ์‘์šฉ๋  ์ˆ˜ ์žˆ์„ ๊ฒƒ์œผ๋กœ ์ƒ๊ฐ๋˜์—ˆ๋‹ค. ๋ณธ ์—ฐ๊ตฌ์—์„œ ์ˆ˜์ˆ ํ›„ ๋ฐœ๊ฒฌ๋œ ๋ฆผํ”„์ ˆ ์ˆ˜์˜ ํ‰๊ท ์€ 42.3๊ฐœ ์˜€์œผ๋ฉฐ, ๋‹ค๋ฅธ ๋ณด๊ณ ์™€ ๋น„๊ตํ•ด ๋ณผ ๋•Œ ๋น„๊ต์  ์ˆ˜์ˆ ์˜ ๊ทผ์น˜๋„๊ฐ€ ๋†’์•˜์Œ์„ ์•Œ ์ˆ˜ ์žˆ์—ˆ๋‹ค. ๊ณฝ์ฒญ๋œ ๋ฆผํ”„์ ˆ์˜ ์ˆ˜๋Š” ์œก์•ˆ์ ์œผ๋กœ ๋ณด์•„ ์ง„ํ–‰๋œ ๋ณ‘๊ธฐ์˜ ์•”์—์„œ ์œ ์˜ํ•˜๊ฒŒ ์ฆ๊ฐ€ํ•˜์˜€๋‹ค (p<0.05). 7, 4๊ธฐ ์œ„์•”์—์„œ ์ œ 3๊ตฐ ๋ฆผํ”„์ ˆ์— ์ „์ด๊ฐ€ ์žˆ์œผ๋ฉด์„œ ๋ณต๋ง‰ ๋ฐ ๊ฐ„์— ์›๊ฒฉ์ „์ด๊ฐ€ ์—†๋Š” ํ™˜์ž๊ตฐ๊ณผ, ๋ณต๋ง‰ ๋ฐ ๊ฐ„์— ์›๊ฒฉ์ „์ด๊ฐ€ ์žˆ๋Š” ํ™˜์ž๊ตฐ์‚ฌ์ด์—๋Š” ์œ ์˜ํ•œ ์ƒ์กด์œจ์˜ ์ฐจ์ด๊ฐ€ ๋ฐœ๊ฒฌ๋˜์—ˆ๋‹ค (p<0.05). ์ œ 3๊ตฐ ๋ฆผํ”„์ ˆ ์ „์ด๋Š” ์ž ์žฌ์ ์œผ๋กœ ์ˆ˜์ˆ ๋กœ์จ ์น˜์œ ๊ฐ€ ๊ฐ€๋Šฅํ•œ ์š”์ธ์œผ๋กœ ์ƒ๊ฐ๋˜๋ฉฐ, ๋”ฐ๋ผ์„œ ํ˜„์žฌ ๊ฐ™์€ 4๊ธฐ๋กœ ๋ถ„๋ฅ˜๋˜๊ณ  ์žˆ๋Š” ์ œ 3๊ตฐ ๋ฆผํ”„์ ˆ ์ „์ด์™€ ์›๊ฒฉ์ „์ด๋Š” ๋ณ‘๊ธฐ ๋ฐ ์ˆ˜์ˆ ์  ์ ‘๊ทผ์—์„œ ๋‹ฌ๋ฆฌ ์ทจ๊ธ‰๋˜์–ด์•ผ ํ•œ๋‹ค๊ณ  ์ƒ๊ฐ๋œ๋‹ค. ์ด์ƒ์˜ ๊ฒฐ๊ณผ๋กœ ์œ„์ „์ ˆ์ œ์ˆ ์„ ์‹œํ–‰๋ฐ›์€ ์œ„์•”ํ™˜์ž์˜ ์ƒ์กด์œจ์€ 49.7%๋กœ ๋น„๊ต์  ์–‘ํ˜ธํ•จ์„ ์•Œ์ˆ˜ ์žˆ์—ˆ์œผ๋ฉฐ ๊ณผ๊ฑฐ์˜ ์—ฌ๋Ÿฌ ๋ณด๊ณ ๋ณด๋‹ค ํ–ฅ์ƒ๋˜์—ˆ์Œ์„ ์•Œ ์ˆ˜ ์žˆ์—ˆ๋‹ค. ์ƒ์กด์œจ์— ์˜ํ–ฅ์„ ์ฃผ๋Š” ์˜ˆํ›„์ธ์ž๋กœ๋Š” ์œ„๋ฒฝ ์นจ์œค๋„, ๋ฆผํ”„์ ˆ ์ „์ด, ๋ฆผํ”„์ ˆ ์ „์ด ๊ฐœ์ˆ˜, ๋ฆผํ”„์ ˆ ๋น„์œจ, ๋ณต๋ง‰์ „์ด ๋“ฑ์ด ์ค‘์š”ํ•œ ์ธ์ž๋กœ ํŒŒ์•…๋˜์—ˆ๊ณ  ์ด๋“ค์˜ ๊ฒฐํ•ฉ์ธ TNM ๋ณ‘๊ธฐ๊ฐ€ ๊ฐ€์žฅ ์˜ˆํ›„์™€ ๋ฐ€์ ‘ํ•œ ๊ด€๋ จ์„ ๊ฐ€์ง์„ ์•Œ์ˆ˜ ์žˆ์—ˆ๋‹ค. ๋ฆผํ”„์ ˆ ์ „์ด ๊ฐœ์ˆ˜, ๋ฆผํ”„์ ˆ ๋น„์œจ, ๋ณต๋ง‰์ „์ด ๋“ฑ์ด ์ค‘์š”ํ•œ ์ธ์ž๋กœ ํŒŒ์•…๋˜์—ˆ๊ณ  ์ด๋“ค์˜ ๊ฒฐํ•ฉ์ธ TNM ๋ณ‘๊ธฐ๊ฐ€ ๊ฐ€์žฅ ์˜ˆํ›„์™€ ๋ฐ€์ ‘ํ•œ ๊ด€๋ จ์„ ๊ฐ€์ง์„ ์•Œ ์ˆ˜ ์žˆ์—ˆ๋‹ค. ๋ฆผํ”„์ ˆ ์ „์ด ๊ฐœ์ˆ˜ ๋ฐ ๋ฆผํ”„์ ˆ ๋น„์œจ(node ratio)์€ ๊ธฐ์กด์˜ ๋ฆผํ”„์ ˆ ๋ถ„๋ฅ˜์— ๋”ฐ๋ฅธ ๋ณ‘๊ธฐ ๊ฒฐ์ •๋ณด๋‹ค ๋” ๊ฐ๊ด€์ ์ธ ์ง€ํ‘œ๋กœ ํ™œ์šฉ๋  ์ˆ˜ ์žˆ๋‹ค๊ณ  ์ƒ๊ฐ๋˜์—ˆ๋‹ค. ๋˜ํ•œ ์ œ 3๊ตฐ ๋ฆผํ”„์ ˆ ์ „์ด๋Š” ํ˜„์žฌ์˜ ๋ณ‘๊ธฐ๋ถ„๋ฅ˜๋กœ๋Š” ์›๊ฒฉ์ „์ด๋กœ ๊ฐ„์ฃผ๋˜์–ด ์™”์œผ๋‚˜ ๋ณต๋ง‰ ๋ฐ ๊ฐ„ ๋“ฑ์˜ ์›๊ฒฉ์ „์ด์™€๋Š” ๋‹ฌ๋ฆฌ ์ˆ˜์ˆ ์  ์ ‘๊ทผ์œผ๋กœ ์น˜์œ ๋ฅผ ๊ธฐ๋Œ€ํ•  ์ˆ˜ ์žˆ๋Š” ์š”์ธ์œผ๋กœ ์ƒ๊ฐ๋˜๋ฉฐ, ์ด๋Ÿฌํ•œ ์š”์†Œ๊ฐ€ ํ–ฅํ›„ ๋ณ‘๊ธฐ๊ฒฐ์ •์— ๋ฐ˜์˜๋˜์–ด์•ผ ํ•˜๋ฆฌ๋ผ๊ณ  ์ƒ๊ฐ๋˜์—ˆ๋‹ค. [์˜๋ฌธ] Although the incidence of gastric cancer is gradually decreasing, the relative proportion of the upper third gastric cancer is steadily increasing, resulting in the increase of total gastrectomy cases. The prognosis of the gastric cancer patients treated with total gastrectomy is known to be somewhat discouraging, due to the relatively low survival rate, relatively high frequency of postoperative mortality or morbidity and long term complications such as nutritional deficiency. The author evaluated the 5-year survival rate and analyzed the prognostic factors in 557 patients with gastric cancer, all treated with total gastrectomy during the period between Jan. 1987 and Dec. 1993. The overall 5-year survival rate was 49.7%, and the survival rates according to the stage were : stage โ… a 92.0%, โ… b 85.5%, โ…ก 64.1%, โ…ขa 26.5%, and stage โ…ฃ 6.3%. Postoperative mortality rate was 1.1%. In using univariate analysis to evaluate the prognostic factors of age, depth of invasion, range of lymph node metastasis(according to the Japanese rule), number of involved nodes, lymph node ratio, distant metastasis (peritoneal and/or hepatic), the size of tumor, location, gross type, histological type, surgical curability and finally, the TNM stages were found to be related with the survival of the patients. In the multivariate analysis using 15 variables, the TNM stage was the most significant prognostic factor. Besides the TNM, depth of invasion (R.R=1.50), range of lymph node metastasis(R.R=1.83), number of involved nodes(R.R=1.64), lymph node ratio(R.R=1.91), peritoneal metastasis(R.R=3.11) were found to be independent prognostic factors influencing the survival. The author thinks if surgical radicality is improved, the number of involved nodes and lymph node ratio would have stronger prognostic implication; surgical radicality could be reflected in the number of removed nodes per specimen. In this study, the average number of removed nodes was 42.3 per specimen and it was clear that adequate lymphadenectomy was performed for almost all grossly curable cancers. The survival rate in patients with tertiary node(N3) metastasis and no peritoneal or hepatic metastasis, was 16.8% ; in patients with peritoneal or hepatic metastasis, the survival rate was 0.0%. There was a significant survival difference in the two groups(p<0.05). The author also had the impression that the tertiary notre metastasis was a potentially curable factor, and it should be classified otherwise in the current TNM system. The survival rates between the patients who underwent total gastrectomy and splenectomy, and the patients who underwent total gastrectomy without splenectomy showed no statistical difference in overall survival rate or survival rate according to the stages(p<0.05). In conclusion, the overall survival rates in the patients treated with total gastrectomy was favourable compared with other reports. Depth of invasion, lymph node metastasis, number of involved nodes, lymph node ratio were important prognostic factors, not to mention the TNM stage. The current TNM staging system was regarded as quite reasonable in this study, but the probable curability for tertiary node metastasis could be re-evaluated to re-classify the stage โ…ฃ.restrictio

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    Audio Search Interface Using Touch Sensitive Sliders

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    ํ•™์œ„๋…ผ๋ฌธ (์„์‚ฌ)-- ์„œ์šธ๋Œ€ํ•™๊ต ๋Œ€ํ•™์› : ์œตํ•ฉ๊ณผํ•™๊ธฐ์ˆ ๋Œ€ํ•™์› ์œตํ•ฉ๊ณผํ•™๋ถ€, 2018. 2. ์ด๊ต๊ตฌ.์˜ํ™” ์Œํ–ฅ ๋ฏน์‹ฑ ์—”์ง€๋‹ˆ์–ด๋Š” ์ž์‹ ์ด ๋ณ€ํ˜•ํ•˜๋ ค๊ณ  ํ•˜๋Š” ํšจ๊ณผ์Œ์„ ์ฐพ๋Š”๋ฐ ๋งŽ์€ ์‹œ๊ฐ„์„ ์‚ฌ์šฉํ•œ๋‹ค. ์ด๋Š” ์ œํ•œ๋œ ์‹œ๊ฐ„์— ์ฝ˜ํ…์ธ ๋ฅผ ๋งŒ๋“ค์–ด์•ผ ํ•˜๋Š” ํ˜„์žฌ์˜ ์˜ํ™” ์ œ์ž‘ ๊ตฌ์กฐ์ƒ ์Œํ–ฅ ๋ฏน์‹ฑ ์—”์ง€๋‹ˆ์–ด๋ฅผ ์ œ์•ฝํ•œ๋‹ค. ์ด๋ฅผ ํ•ด๊ฒฐํ•˜๊ธฐ ์œ„ํ•ด ์Œํ–ฅ ๋ฏน์‹ฑ ๊ณผ์ •์—์„œ ์‚ฌ์šฉํ•˜๋Š” ์Œํ–ฅ ์ฝ˜์†”์— ํŠธ๋ž™๋ณ„๋กœ ์Œ์›์„ ๋” ์ž˜ ์‹œ๊ฐํ™”ํ•ด์ฃผ๋Š” ๋ฐœ์ „์ด ์žˆ์—ˆ์ง€๋งŒ ๋งค์šฐ ๋งŽ์€ ์ˆ˜์˜ ํŠธ๋ž™์„ ์‚ฌ์šฉํ•˜๋Š” ์˜ํ™” ์Œํ–ฅ ๋ฏน์‹ฑ ์—”์ง€๋‹ˆ์–ด๋ฅผ ๋•๊ธฐ์—๋Š” ํ•œ๊ณ„๊ฐ€ ์žˆ๋‹ค. ํ•œํŽธ, ์˜ํ™” ์Œํ–ฅ ๋ฏน์‹ฑ ์—”์ง€๋‹ˆ์–ด๋ฅผ ๋•๊ธฐ ์œ„ํ•œ ์—ฐ๊ตฌ๋Š” ์•„๋‹ˆ์ง€๋งŒ ๋ชฉ์†Œ๋ฆฌ, ํƒœํ•‘, ๋ชธ ์›€์ง์ž„ ๋“ฑ ๊ฐ์ข… ์งˆ์˜(query)๋ฅผ ํ†ตํ•œ ํšจ๊ณผ์Œ ๊ฒ€์ƒ‰ ์—ฐ๊ตฌ๊ฐ€ ์ง„ํ–‰๋˜์–ด ์™”๋‹ค. ๋˜ํ•œ ํšจ๊ณผ์Œ์—์„œ ์ถ”์ถœํ•œ ์†Œ๋ฆฌ ํฌ๊ธฐ ๋ณ€ํ™” ๊ณก์„ , ์Œ ๋†’์ด ๋ณ€ํ™” ๊ณก์„  ๋“ฑ๊ณผ ๊ฐ™์€ ์Œํ–ฅ ํŠน์„ฑ๊ณผ ์‚ฌ๋žŒ์—๊ฒŒ ํšจ๊ณผ์Œ์„ ๋“ค๋ ค์ฃผ๋ฉฐ ๋ชธ์˜ ์›€์ง์ž„์„ ์‚ฌ์šฉํ•ด์„œ ํ‘œํ˜„ํ•˜๋„๋ก ์ง€์‹œํ•ด์„œ ์–ป์€ ์›€์ง์ž„ ๋ฐ์ดํ„ฐ๋ฅผ ๋น„๊ตํ•ด์„œ ๊ทธ ์—ฐ๊ด€์„ฑ์„ ์ฐพ๊ธฐ ์œ„ํ•œ ์†Œ๋ฆฌ ํˆฌ์‚ฌ ์—ฐ๊ตฌ๋„ ์ด๋ฃจ์–ด์ง€๊ณ  ์žˆ๋‹ค. ๋ณธ ์—ฐ๊ตฌ๋Š” ํ„ฐ์น˜ ์Šฌ๋ผ์ด๋”๋ฅผ ์ด์šฉํ•œ ์†Œ๋ฆฌ ํˆฌ์‚ฌ ์—ฐ๊ตฌ๋ฅผ ์ง„ํ–‰ํ•˜๊ณ  ์ด๋ฅผ ํ™œ์šฉํ•ด์„œ ์˜ํ™” ์Œํ–ฅ ๋ฏน์‹ฑ ์—”์ง€๋‹ˆ์–ด๋“ค์ด ํšจ๊ณผ์Œ ๊ฒ€์ƒ‰์— ์‚ฌ์šฉ ๊ฐ€๋Šฅํ•œ ์ธํ„ฐํŽ˜์ด์Šค๋ฅผ ๊ฐœ๋ฐœํ•˜๊ณ  ๊ทธ ์‚ฌ์šฉ์„ฑ์„ ํ‰๊ฐ€ํ•˜๋Š” ๊ฒƒ์„ ๋ชฉํ‘œ๋กœ ํ•œ๋‹ค.์ œ 1 ์žฅ ์„œ๋ก  1 ์ œ 1 ์ ˆ ์—ฐ๊ตฌ ๋ฐฐ๊ฒฝ 1 ์ œ 2 ์ ˆ ์—ฐ๊ตฌ ๋ชฉํ‘œ 8 ์ œ 2 ์žฅ ์„ ํ–‰ ์—ฐ๊ตฌ ๋ฐ ๊ด€๋ จ ๊ฐœ๋… 9 ์ œ 1 ์ ˆ ์Œํ–ฅ ์ฝ˜์†”์—์„œ ์†Œ๋ฆฌ ํƒ์ƒ‰ ์—ฐ๊ตฌ 9 ์ œ 2 ์ ˆ ์งˆ์˜ ๊ธฐ๋ฐ˜ ์†Œ๋ฆฌ ๊ฒ€์ƒ‰ ์—ฐ๊ตฌ 15 ์ œ 3 ์ ˆ ์†Œ๋ฆฌ ํˆฌ์‚ฌ ์—ฐ๊ตฌ 17 ์ œ 4 ์ ˆ ํ„ฐ์น˜ ์Šฌ๋ผ์ด๋” 19 ์ œ 3 ์žฅ ์—ฐ๊ตฌ ๋ฐฉ๋ฒ• ๋ฐ ์ œ์•ˆ ํŠน์„ฑ 21 ์ œ 1 ์ ˆ ์—ฐ๊ตฌ ๋ฌธ์ œ 21 ์ œ 2 ์ ˆ ์ œ์•ˆ ํŠน์„ฑ 23 3.2.1 ์ œ์•ˆ ์Œํ–ฅ ํŠน์„ฑ 23 3.2.2 ์ œ์•ˆ ์›€์ง์ž„ ํŠน์„ฑ 25 ์ œ 3 ์ ˆ ์†Œ๋ฆฌ ํˆฌ์‚ฌ ์‹คํ—˜ 26 3.3.1 ํšจ๊ณผ์Œ ๋ฐ์ดํ„ฐ 26 3.3.2 ์†Œ๋ฆฌ ํˆฌ์‚ฌ ์‹คํ—˜ 29 3.3.3 ์†Œ๋ฆฌ ํˆฌ์‚ฌ ๋ฐ์ดํ„ฐ ์ฒ˜๋ฆฌ 31 ์ œ 4 ์ ˆ ์†Œ๋ฆฌ ํˆฌ์‚ฌ ๋ชจ๋ธ 32 ์ œ 4 ์žฅ ์ œ์•ˆ ์ธํ„ฐํŽ˜์ด์Šค 35 ์ œ 1 ์ ˆ ์ธํ„ฐํŽ˜์ด์Šค ๊ฐœ์š” 35 4.1.1 ๊ฒ€์ƒ‰ ์ธํ„ฐํŽ˜์ด์Šค ๊ฐœ์š” 35 4.1.2 ๊ฒ€์ƒ‰ ์•Œ๊ณ ๋ฆฌ์ฆ˜ ๊ฐœ์š” 37 ์ œ 2 ์ ˆ ์ธํ„ฐํŽ˜์ด์Šค ํ‰๊ฐ€ 39 4.2.1 ์ธํ„ฐํŽ˜์ด์Šค ํ‰๊ฐ€ ๋ฐฉ๋ฒ• 39 4.2.2 ์ •ํ™•๋„ ํ‰๊ฐ€ ๊ฒฐ๊ณผ 46 4.2.3 ์‚ฌ์šฉ์„ฑ ํ‰๊ฐ€ ๊ฒฐ๊ณผ 47 ์ œ 5 ์žฅ ์—ฐ๊ตฌ ์˜์˜ ๋ฐ ๋…ผ์˜ 56 ์ฐธ๊ณ ๋ฌธํ—Œ 59 Abstract 62Maste

    Control Algorithm of the Lower-limb Powered Exoskeleton Robot using an Intention of the Human Motion from Muscle

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    This paper present a novel approach to control the lower body power assistive exoskeleton system of a HEXAR-CR35 aimed at improving a muscular strength. More specifically the control of based on the human intention is crucial of importance to ensure intuitive and dexterous motion with the human. In this contribution, we proposed the detection algorithm of the human intention using the MCRS which are developed to measure the contraction of the muscle with variation of the circumference. The proposed algorithm provides a joint motion of exoskeleton corresponding the relate muscles. The main advantages of the algorithm are its simplicity, computational efficiency to control one joint of the HEXAR-CR35 which are consisted knee-active type exoskeleton (the other joints are consisted with the passive or quasi-passive joints that can be arranged by analyzing of the human joint functions). As a consequence, the motion of exoskeleton is generated according to the gait phase: swing and stance phase which are determined by the foot insole sensors. The experimental evaluation of the proposed algorithm is achieved in walking with the exoskeleton while carrying the external mass in the back side.2
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