6 research outputs found

    THE EFFECT of GROWTH CONDITIONS ON QUALITY of c-BN FILMS THESISED BY HOT- FILAMENT ASSISTED RF PLASMA CVD METHOD

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    用热丝辅助射频等离子体化学气相沉积法(PCVd)合成:C-bn薄膜获得成功。实验结果表明,灯丝温度、反应气压、衬底温度、灯丝与衬底距离对薄膜质量有重要影响。he experimental results of synthesis of c- BN Films using hot- Filament assisted RF plasma CVDare given in this paper.The results show that Filament temperature,substrate temperature,pressure of reactivegases and substrate-to-Filament distance have very important eFFects.国家自然科学基

    Deposition p-Type Microcrystalline diamond Films on Quartz Grass Using Radio Frequency PCVD

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    利用射频化学气相沉积法,通过硼的掺杂,在石英玻璃衬底上生长出P型微晶金刚石薄膜,范德堡法的测试表明,我们得到的薄膜最小电阻率为4x10-2Ω.CM,最大空穴迁移率为50CM/V.S;从电阻率与温度关系近似计算出杂质激活能p-Type polycrystalline diamond Films were prepared on quartz grass by radio Frequency plasma assisted chemical vapor deposition (PCVD), and doped with boron.The surFace morphologyl crystal structure and some physical properties of the Films were examined by transmission electron microscopy, UV-visible transmission spectrum.The test of Van der Pauw method comFirmed that the lowest electric resistivity of the Films is 5 × 10-2.cm, and the highest hole mobility of the Film is 50cm2/V.s

    The Calculation of Volume of Tidal Prism and Water Exchange Time of Yundang Lake

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    通过在筼筜湖引水渠和出水渠断面设置流向、流速、水深等要素的测量断面,以获得筼筜湖纳潮情况下的水动力特征并由此计算筼筜湖的纳潮量和海水交换周期,在中潮条件下,筼筜湖的纳潮量为3.5×105m3,海水平均半交换周期为8.5 d.The dynamic feature of Yundang Lake was analyzed by using a set of RCM.9 current meters and tidal gauges.Based on the measured data,the volume of tidal prism in Yundang Lake is estimated as about 3.5×10~5m~3 and the half tidal exchanging-period is about 8.5 days at the middle tidal.As the tidal range becomes larger,the volume of tidal prism will become larger and the half tidal exchanging-period will be shorter

    Deposition Microcrystallne Diamond Film on QuartZ Glass Using Radio Frequency PCVD

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    利用射频等离子体化学气相沉积法(r,f.PCVd),在石英玻璃上生长出透明均匀的薄膜,经过电子衍射,激光喇曼散射,可见光透过率等测试,证明是金刚石薄膜,通过透射电子显微镜看不到颗粒。polycrystalline diamondFilms have been prepared on quartz glass by means ofradio Frenquency plasma assisted chemical vapor depositlon(PCVD).The surFace morphology,crystall structure and some physical properties of the Films are examined by Raman oscopy transs-mission electron microscopy,IR and UV-visible oscopies,It is conFirmed that the Film is com-posed of microcrystalline diamond
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