利用射频等离子体化学气相沉积法（r，f.PCVd），在石英玻璃上生长出透明均匀的薄膜，经过电子衍射，激光喇曼散射，可见光透过率等测试，证明是金刚石薄膜，通过透射电子显微镜看不到颗粒。polycrystalline diamondFilms have been prepared on quartz glass by means ofradio Frenquency plasma assisted chemical vapor depositlon(PCVD).The surFace morphology,crystall structure and some physical properties of the Films are examined by Raman oscopy transs-mission electron microscopy,IR and UV-visible oscopies,It is conFirmed that the Film is com-posed of microcrystalline diamond
