用热丝辅助射频等离子体化学气相沉积法（PCVd）合成：C-bn薄膜获得成功。实验结果表明，灯丝温度、反应气压、衬底温度、灯丝与衬底距离对薄膜质量有重要影响。he experimental results of synthesis of c- BN Films using hot- Filament assisted RF plasma CVDare given in this paper.The results show that Filament temperature,substrate temperature,pressure of reactivegases and substrate-to-Filament distance have very important eFFects.国家自然科学基
