Microsystems technology: objectives

This contribution focuses on the objectives of microsystems technology (MST). The reason for this is two fold. First of all, it should explain what MST actually is. This question is often posed and a simple answer is lacking, as a consequence of the diversity of subjects that are perceived as MST. The second reason is that a map of the somewhat chaotic field of MST is needed to identify sub-territories, for which standardization in terms of system modules an interconnections is feasible. To define the objectives a pragmatic approach has been followed. From the literature a selection of topics has been chosen and collected that are perceived as belonging to the field of MST by a large community of workers in the field (more than 250 references). In this way an overview has been created with `applications¿ and `generic issues¿ as the main characteristics

Robot Manipulators

Robot manipulators are developing more in the direction of industrial robots than of human workers. Recently, the applications of robot manipulators are spreading their focus, for example Da Vinci as a medical robot, ASIMO as a humanoid robot and so on. There are many research topics within the field of robot manipulators, e.g. motion planning, cooperation with a human, and fusion with external sensors like vision, haptic and force, etc. Moreover, these include both technical problems in the industry and theoretical problems in the academic fields. This book is a collection of papers presenting the latest research issues from around the world

Accelerated neuromorphic cybernetics

Accelerated mixed-signal neuromorphic hardware refers to electronic systems that emulate electrophysiological aspects of biological nervous systems in analog voltages and currents in an accelerated manner. While the functional spectrum of these systems already includes many observed neuronal capabilities, such as learning or classification, some areas remain largely unexplored. In particular, this concerns cybernetic scenarios in which nervous systems engage in closed interaction with their bodies and environments. Since the control of behavior and movement in animals is both the purpose and the cause of the development of nervous systems, such processes are, however, of essential importance in nature. Besides the design of neuromorphic circuit- and system components, the main focus of this work is therefore the construction and analysis of accelerated neuromorphic agents that are integrated into cybernetic chains of action. These agents are, on the one hand, an accelerated mechanical robot, on the other hand, an accelerated virtual insect. In both cases, the sensory organs and actuators of their artificial bodies are derived from the neurophysiology of the biological prototypes and are reproduced as faithfully as possible. In addition, each of the two biomimetic organisms is subjected to evolutionary optimization, which illustrates the advantages of accelerated neuromorphic nervous systems through significant time savings

Volume 1 – Symposium

We are pleased to present the conference proceedings for the 12th edition of the International Fluid Power Conference (IFK). The IFK is one of the world’s most significant scientific conferences on fluid power control technology and systems. It offers a common platform for the presentation and discussion of trends and innovations to manufacturers, users and scientists. The Chair of Fluid-Mechatronic Systems at the TU Dresden is organizing and hosting the IFK for the sixth time. Supporting hosts are the Fluid Power Association of the German Engineering Federation (VDMA), Dresdner Verein zur Förderung der Fluidtechnik e. V. (DVF) and GWT-TUD GmbH. The organization and the conference location alternates every two years between the Chair of Fluid-Mechatronic Systems in Dresden and the Institute for Fluid Power Drives and Systems in Aachen. The symposium on the first day is dedicated to presentations focused on methodology and fundamental research. The two following conference days offer a wide variety of application and technology orientated papers about the latest state of the art in fluid power. It is this combination that makes the IFK a unique and excellent forum for the exchange of academic research and industrial application experience. A simultaneously ongoing exhibition offers the possibility to get product information and to have individual talks with manufacturers. The theme of the 12th IFK is “Fluid Power – Future Technology”, covering topics that enable the development of 5G-ready, cost-efficient and demand-driven structures, as well as individual decentralized drives. Another topic is the real-time data exchange that allows the application of numerous predictive maintenance strategies, which will significantly increase the availability of fluid power systems and their elements and ensure their improved lifetime performance. We create an atmosphere for casual exchange by offering a vast frame and cultural program. This includes a get-together, a conference banquet, laboratory festivities and some physical activities such as jogging in Dresden’s old town.:Group A: Materials Group B: System design & integration Group C: Novel system solutions Group D: Additive manufacturing Group E: Components Group F: Intelligent control Group G: Fluids Group H | K: Pumps Group I | L: Mobile applications Group J: Fundamental

Advanced control of active magnetic bearings with learning control schemes

Master'sMASTER OF ENGINEERIN

Modeling and Simulation in Engineering

This book provides an open platform to establish and share knowledge developed by scholars, scientists, and engineers from all over the world, about various applications of the modeling and simulation in the design process of products, in various engineering fields. The book consists of 12 chapters arranged in two sections (3D Modeling and Virtual Prototyping), reflecting the multidimensionality of applications related to modeling and simulation. Some of the most recent modeling and simulation techniques, as well as some of the most accurate and sophisticated software in treating complex systems, are applied. All the original contributions in this book are jointed by the basic principle of a successful modeling and simulation process: as complex as necessary, and as simple as possible. The idea is to manipulate the simplifying assumptions in a way that reduces the complexity of the model (in order to make a real-time simulation), but without altering the precision of the results

The Fifth National Technology Transfer Conference and Exposition

No abstract availabl

Single-Chip Scanning Probe Microscopes

Scanning probe microscopes (SPMs) are the highest resolution imaging instruments available today and are among the most important tools in nanoscience. Conventional SPMs suffer from several drawbacks owing to their large and bulky construction and to the use of piezoelectric materials. Large scanners have low resonant frequencies that limit their achievable imaging bandwidth and render them susceptible to disturbance from ambient vibrations. Array approaches have been used to alleviate the bandwidth bottleneck; however as arrays are scaled upwards, the scanning speed must decline to accommodate larger payloads. In addition, the long mechanical path from the tip to the sample contributes thermal drift. Furthermore, intrinsic properties of piezoelectric materials result in creep and hysteresis, which contribute to image distortion. The tip-sample interaction signals are often measured with optical configurations that require large free-space paths, are cumbersome to align, and add to the high cost of state-of-the-art SPM systems. These shortcomings have stifled the widespread adoption of SPMs by the nanometrology community. Tiny, inexpensive, fast, stable and independent SPMs that do not incur bandwidth penalties upon array scaling would therefore be most welcome. The present research demonstrates, for the first time, that all of the mechanical and electrical components that are required for the SPM to capture an image can be scaled and integrated onto a single CMOS chip. Principles of microsystem design are applied to produce single-chip instruments that acquire images of underlying samples on their own, without the need for off-chip scanners or sensors. Furthermore, it is shown that the instruments enjoy a multitude of performance benefits that stem from CMOS-MEMS integration and volumetric scaling of scanners by a factor of 1 million. This dissertation details the design, fabrication and imaging results of the first single-chip contact-mode AFMs, with integrated piezoresistive strain sensing cantilevers and scanning in three degrees-of-freedom (DOFs). Static AFMs and quasi-static AFMs are both reported. This work also includes the development, fabrication and imaging results of the first single-chip dynamic AFMs, with integrated flexural resonant cantilevers and 3 DOF scanning. Single-chip Amplitude Modulation AFMs (AM-AFMs) and Frequency Modulation AFMs (FM-AFMs) are both shown to be capable of imaging samples without the need for any off-chip sensors or actuators. A method to increase the quality factor (Q-factor) of flexural resonators is introduced. The method relies on an internal energy pumping mechanism that is based on the interplay between electrical, mechanical, and thermal effects. To the best of the author’s knowledge, the devices that are designed to harness these effects possess the highest electromechanical Qs reported for flexural resonators operating in air; electrically measured Q is enhanced from ~50 to ~50,000 in one exemplary device. A physical explanation for the underlying mechanism is proposed. The design, fabrication, imaging, and tip-based lithographic patterning with the first single-chip Scanning Thermal Microscopes (SThMs) are also presented. In addition to 3 DOF scanning, these devices possess integrated, thermally isolated temperature sensors to detect heat transfer in the tip-sample region. Imaging is reported with thermocouple-based devices and patterning is reported with resistive heater/sensors. An “isothermal electrothermal scanner” is designed and fabricated, and a method to operate it is detailed. The mechanism, based on electrothermal actuation, maintains a constant temperature in a central location while positioning a payload over a range of >35μm, thereby suppressing the deleterious thermal crosstalk effects that have thus far plagued thermally actuated devices with integrated sensors. In the thesis, models are developed to guide the design of single-chip SPMs and to provide an interpretation of experimental results. The modelling efforts include lumped element model development for each component of single-chip SPMs in the electrical, thermal and mechanical domains. In addition, noise models are developed for various components of the instruments, including temperature-based position sensors, piezoresistive cantilevers, and digitally controlled positioning devices