MEMS Accelerometers

Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc

BioMEMS for cardiac tissue monitoring and maturation

Diseases of the heart have been the most common cause of death in the United States since the middle of the 20th century. The development of engineered cardiac tissue over the last three decades has yielded human induced pluripotent stem cell-derived (hiPSC) cardiomyocytes (CMs), microscale “heart-on-a-chip” platforms, optical interrogation techniques, and more. Having spawned its own scientific field, ongoing research promises lofty goals to address the heart disease burden around the world, such as patient-specific disease models, and clinical trials on chip-based platforms. The greatest academic pursuit for engineered cardiac tissues is to increase their maturity, thereby increasing relevance to native adult tissue. Investigation of cardiomyocyte maturity necessitates the development of 3D-tissue compatible techniques for measuring and perturbing cardiac biology with enhanced precision. This dissertation focuses on the development of biological microelectromechanical systems (BioMEMS) for precision measurement and perturbation of cardiac tissue. We discuss three unique approaches to interfacing MEMS-based tools with cardiac biology. The first is a high resolution magnetic sensor, which directly measures the spatial gradient of a magnetic field. This has an ideal application in magnetocardiography (MCG), as the flux of ions during cardiac contractions produces measurable magnetic signals around the tissue and can be leveraged for noncontact diagnosis. The second is a highly functionalized heart-on-a-chip platform, wherein the mechanical contractions of cardiac microtissues can be simultaneously recorded and actuated. Contractile dynamics are leading indicators of maturity in engineered cardiac tissue and mechanical conditioning has shown recent promise as a critical component of cardiac maturation. The third is the imaging of contractile nanostructures in engineered cardiomyocytes at depth in a 3D microtissue. We use small angle X-ray scattering (SAXS) to discern the periodic arrangement of myofilaments in their native 3D environment. We enable a significant structural analysis to provide insight for functional maturation. Enabling these three thrusts required developing two supporting technologies. The first is the engineered control of dynamic second order systems, a foundational element of all our MEMS and magnetic techniques. We demonstrate numerous algorithms to improve settling time or decrease dead-time such that samples with fast temporal effects can be measured. The second is a microscale gluing technique for integrating myriad of materials with MEMS devices, yielding unique sensors and actuators.2022-05-15T00:00:00

Phase-advanced attitude sensing and control for fixed-wing micro aerial vehicles in turbulence

The scale of fixed-wing Micro Aerial Vehicles (MAVs) lend them to many unique applications. These applications often require low speed flights close to the ground, in the vicinity of large obstacles and in the wake of buildings. A particular challenge for MAVs is attitude control in the presence of high turbulence. Such flights pose a challenging operational environment for MAVs, and in particular, ensuring sufficient attitude control in the presence of significant turbulence. Low-level flight in the atmospheric boundary layer without sufficient attitude control is hazardous, mainly due to the high levels of turbulence intensity close to the ground. MAV accidents have occurred due to the lack of a reliable attitude control system in turbulent conditions as reported in the literature. Challenges associated with flight control of fixed-wing MAVs operating in complex environments are significantly different to any larger scale vehicle. The scale of MAVs makes them particularly sensitive to atmospheric disturbances thus limiting their operation. A review of the literature revealed that rolling inputs from turbulence were the most challenging whereby conventional inertial-based attitude control systems lack the responsiveness for roll control in high turbulence environments. The solution might lie with flying animals, which have adapted to flight within turbulence. The literature survey identified bio-inspired phase-advanced sensors as a promising sensory solution for complementing current reactive attitude sensors. The development of a novel bio-inspired phase-advanced sensor and associated control system, which can sense the flow disturbances before an attitude perturbation, is the focus of this research. The development of such a system required an in-depth understanding of the features of the disturbing phenomena; turbulence. Correlation studies were conducted between the oncoming turbulence and wing-surface pressure variations. It was found that the highest correlation exists between upstream flow pitch angle variation and the wing-surface pressure fluctuations. However, due to the insufficient time-forward advantage, surface pressure sensing was not used for attitude control. A second sensing approach was explored to cater for the control system’s time-lags. Multi-hole pressure probes were embedded in the wings of the MAV to sense flow pitch angle and magnitude variation upstream of the wing. The sensors provide an estimate of the disturbing turbulence. This approach caters for the time-lags of the system providing sufficient time to counteract the gust before it results in an inertial response. Statistical analysis was used to assess the disturbance rejection performance of the phase-advanced sensory system, which was benchmarked against a conventional inertial-based sensory system in a range of turbulence conditions. Unconstrained but controlled test flights were conducted inside the turbulence environment of two wind-tunnels, in addition to outdoor flight testing in the atmosphere. These three different turbulence conditions enabled testing of a wide range of turbulence spectra believed to be most detrimental to the MAV. A significant improvement in disturbance rejection performance was observed in relation to conventional inertial-based sensory systems. It can be concluded that sensory systems providing time-forward estimates of turbulence can complement conventional inertial-based sensors to improve the attitude stability performance

Research on Gravitational Mass Sensors

Gravitational sensor development to measure mass distribution of moon and asteroid

Precision engineering center. 1988 Annual report, Volume VI

To reverse the downward trend in the balance of trade, American companies must concentrate on increasing research into new products, boosting productivity, and improving manufacturing processes. The Precision Engineering Center at North Carolina State University is a multidisciplinary research and graduate education program dedicated to providing the new technology necessary to respond to this challenge. One extremely demanding manufacturing area is the fabrication and assembly of optical systems. These systems are at the heart of such consumer products as cameras, lenses, copy machines, laser bar-code scanners, VCRs, and compact audio discs - products that the Japanese and other East Asian countries are building dominance. A second critical area is the fabrication of VLSI and ULSI circuits. The tolerances required to produce the next generation of components for such systems have created the need for new approaches - approaches that could either make or break America`s competitive position. This report contains individual reports on research projects grouped into three broad areas: measurement and actuation; real-time control; precision fabrication. Separate abstracts for these articles have been indexed into the energy database

Large space structures and systems in the space station era: A bibliography with indexes (supplement 04)

Bibliographies and abstracts are listed for 1211 reports, articles, and other documents introduced into the NASA scientific and technical information system between 1 Jul. and 30 Dec. 1991. Its purpose is to provide helpful information to the researcher, manager, and designer in technology development and mission design according to system, interactive analysis and design, structural concepts and control systems, electronics, advanced materials, assembly concepts, propulsion, and solar power satellite systems

New generation of interactive platforms based on novel printed smart materials

Programa doutoral em Engenharia Eletrónica e de Computadores (área de Instrumentação e Microssistemas Eletrónicos)The last decade was marked by the computer-paradigm changing with other digital devices suddenly becoming available to the general public, such as tablets and smartphones. A shift in perspective from computer to materials as the centerpiece of digital interaction is leading to a diversification of interaction contexts, objects and applications, recurring to intuitive commands and dynamic content that can proportionate more interesting and satisfying experiences. In parallel, polymer-based sensors and actuators, and their integration in different substrates or devices is an area of increasing scientific and technological interest, which current state of the art starts to permit the use of smart sensors and actuators embodied within the objects seamlessly. Electronics is no longer a rigid board with plenty of chips. New technological advances and perspectives now turned into printed electronics in polymers, textiles or paper. We are assisting to the actual scaling down of computational power into everyday use objects, a fusion of the computer with the material. Interactivity is being transposed to objects erstwhile inanimate. In this work, strain and deformation sensors and actuators were developed recurring to functional polymer composites with metallic and carbonaceous nanoparticles (NPs) inks, leading to capacitive, piezoresistive and piezoelectric effects, envisioning the creation of tangible user interfaces (TUIs). Based on smart polymer substrates such as polyvinylidene fluoride (PVDF) or polyethylene terephthalate (PET), among others, prototypes were prepared using piezoelectric and dielectric technologies. Piezoresistive prototypes were prepared with resistive inks and restive functional polymers. Materials were printed by screen printing, inkjet printing and doctor blade coating. Finally, a case study of the integration of the different materials and technologies developed is presented in a book-form factor.A última década foi marcada por uma alteração do paradigma de computador pelo súbito aparecimento dos tablets e smartphones para o público geral. A alteração de perspetiva do computador para os materiais como parte central de interação digital levou a uma diversificação dos contextos de interação, objetos e aplicações, recorrendo a comandos intuitivos e conteúdos dinâmicos capazes de tornarem a experiência mais interessante e satisfatória. Em simultâneo, sensores e atuadores de base polimérica, e a sua integração em diferentes substratos ou dispositivos é uma área de crescente interesse científico e tecnológico, e o atual estado da arte começa a permitir o uso de sensores e atuadores inteligentes perfeitamente integrados nos objetos. Eletrónica já não é sinónimo de placas rígidas cheias de componentes. Novas perspetivas e avanços tecnológicos transformaram-se em eletrónica impressa em polímeros, têxteis ou papel. Neste momento estamos a assistir à redução da computação a objetos do dia a dia, uma fusão do computador com a matéria. A interatividade está a ser transposta para objetos outrora inanimados. Neste trabalho foram desenvolvidos atuadores e sensores e de pressão e de deformação com recurso a compostos poliméricos funcionais com tintas com nanopartículas (NPs) metálicas ou de base carbónica, recorrendo aos efeitos capacitivo, piezoresistivo e piezoelétrico, com vista à criação de interfaces de usuário tangíveis (TUIs). Usando substratos poliméricos inteligentes tais como fluoreto de polivinilideno (PVDF) ou politereftalato de etileno (PET), entre outos, foi possível a preparação de protótipos de tecnologia piezoelétrica ou dielétrica. Os protótipos de tecnologia piezoresistiva foram feitos com tintas resistivas e polímeros funcionais resistivos. Os materiais foram impressos por serigrafia, jato de tinta, impressão por aerossol e revestimento de lâmina doctor blade. Para terminar, é apresentado um caso de estudo da integração dos diferentes materiais e tecnologias desenvolvidos sob o formato de um livro.This project was supported by FCT – Fundação para a Ciência e a Tecnologia, within the doctorate grant with reference SFRH/BD/110622/2015, by POCH – Programa Operacional Capital Humano, and by EU – European Union

Micro/Nano Structures and Systems

Micro/Nano Structures and Systems: Analysis, Design, Manufacturing, and Reliability is a comprehensive guide that explores the various aspects of micro- and nanostructures and systems. From analysis and design to manufacturing and reliability, this reprint provides a thorough understanding of the latest methods and techniques used in the field. With an emphasis on modern computational and analytical methods and their integration with experimental techniques, this reprint is an invaluable resource for researchers and engineers working in the field of micro- and nanosystems, including micromachines, additive manufacturing at the microscale, micro/nano-electromechanical systems, and more. Written by leading experts in the field, this reprint offers a complete understanding of the physical and mechanical behavior of micro- and nanostructures, making it an essential reference for professionals in this field