Generation of electrical energy using lead zirconate titanate (PZT-5A) piezoelectric material: Analytical, numerical and experimental verifications

Energy harvesting is the process of attaining energy from the external sources and transforming it into usable electrical energy. An analytical model of piezoelectric energy harvester has been developed to determine the output voltage across an electrical circuit when it is forced to undergo a base excitation. This model gives an easy approach to design and investigate the behavior of piezoelectric material. Numerical simulations have been carried out to determine the effect of frequency and loading on a Lead zirconate titanate (PZT-5A) piezoelectric material. It has been observed that the output voltage from the harvester increases when loading increases whereas its resonance frequency decreases. The analytical results were found to be in good agreement with the experimental and numerical simulation results

Design, fabrication and test of integrated micro-scale vibration based electromagnetic generator

This paper discusses the design, fabrication and testing of electromagnetic microgenerators. Three different designs of power generators are partially microfabricated and assembled. Prototype A having a wire-wound copper coil, Prototype B, an electrodeposited copper coil both on a Deep Reactive Ion etched (DRIE) silicon, beam and paddle. Prototype C uses moving NdFeB magnets in between two microfabricated coils. The integrated coil, paddle and beam were fabricated using standard micro-Electro-Mechanical Systems (MEMS) processing techniques. For Prototype A, the maximum measured power output was 148 nW at 8.08 kHz resonant frequency and 3.9 m/s2 acceleration. For prototype B, the microgenerator gave a maximum load power of 23 nW for an acceleration of 9.8 m/s2, at a resonant frequency of 9.83 kHz. This is a substantial improvement in power generated over other microfabricated silicon based generators reported in literature. This generator has a volume of 0.1 cm3 which is lowest of all the silicon based microfabricated electromagnetic power generators reported. To verify the potential of integrated coils in electromagnetic generators, Prototype C was assembled. This generated a maximum load power of 5

Kinetic energy harvesting

This paper reviews kinetic energy harvesting as a potential localised power supply for wireless applications. Harvesting devices are typically implemented as resonant devices of which the power output depends upon the size of the inertial mass, the frequency and amplitude of the driving vibrations, the maximum available mass displacement and the damping. Three transduction mechanisms are currently primarily employed to convert mechanical into electrical energy: electromagnetic, piezoelectric and electrostatic. Piezoelectric and electrostatic mechanisms are best suited to small size MEMS implementations, but the power output from such devices is at present limited to a few microwatts. An electromagnetic generator implemented with discrete components has produced a power 120 ?W with the highest recorded efficiency to date of 51% for a device of this size reported to date. The packaged device is 0.8 cm3 and weighs 1.6 grams. The suitability of the technology in space applications will be determined by the nature of the available kinetic energy and the required level of output power. A radioactively coupled device may present an opportunity where suitable vibrations do not exist

A Review of Smart Materials in Tactile Actuators for Information Delivery

As the largest organ in the human body, the skin provides the important sensory channel for humans to receive external stimulations based on touch. By the information perceived through touch, people can feel and guess the properties of objects, like weight, temperature, textures, and motion, etc. In fact, those properties are nerve stimuli to our brain received by different kinds of receptors in the skin. Mechanical, electrical, and thermal stimuli can stimulate these receptors and cause different information to be conveyed through the nerves. Technologies for actuators to provide mechanical, electrical or thermal stimuli have been developed. These include static or vibrational actuation, electrostatic stimulation, focused ultrasound, and more. Smart materials, such as piezoelectric materials, carbon nanotubes, and shape memory alloys, play important roles in providing actuation for tactile sensation. This paper aims to review the background biological knowledge of human tactile sensing, to give an understanding of how we sense and interact with the world through the sense of touch, as well as the conventional and state-of-the-art technologies of tactile actuators for tactile feedback delivery

Energy Harvesting & Recapture from Human Subjects: Dual-Stage MEMS Cantilever Energy Harvester

Recent thermal energy harvesting research has advanced alternative non-Seebeck devices and shifted attention towards applications with low temperature differentials near ambient. This research effort takes a simulation-based approach to improve the performance of a modified dual-stage MEMS cantilever energy harvester. The device employs a bimetal and a piezoelectric transducer to harvest energy from a 10° C temperature differential. The proposed application for the device is as a wearable energy harvester, capable of generating power from the human body using skin temperature (average 33° C) as the hot side and ambient air (23° C) as the cold side. A bimetal thickness scaling study is conducted, in which the 1.5 micrometers thickness yields the maximum electrical power output of 36.82 nW per device. This translates to a power density of 5.68 mW/cm2, which surpasses the performance of many Seebeck and non-Seebeck designs from the literature

Modeling And Development Of A MEMS Device For Pyroelectric Energy Scavenging

As the world faces an energy crisis with depleting fossil fuel reserves, alternate energy sources are being researched ever more seriously. In addition to renewable energy sources, energy recycling and energy scavenging technologies are also gaining importance. Technologies are being developed to scavenge energy from ambient sources such as vibration, radio frequency and low grade waste heat, etc. Waste heat is the most common form of wasted energy and is the greatest potential source of energy scavenging. Pyroelectricity is the property of some materials to change the surface charge distribution with the change in temperature. These materials produce current as temperature varies in them and can be utilized to convert thermal energy to electrical energy. In this work a novel approach to vary temperature in pyroelectric material to convert energy has been investigated. Microelectromechanical Systems or MEMS is the new technology trend that takes advantage of unique physical properties at micro scale to create mechanical systems with electrical interface using available microelectronic fabrication techniques. MEMS can accomplish functionalities that are otherwise impossible or inefficient with macroscale technologies. The energy harvesting device modeled and developed for this work takes full benefit of MEMS technology to cycle temperature in an embedded pyroelectric material to convert thermal energy from low grade waste heat to electrical energy. Use of MEMS enables improved performance and efficiency and overcomes problems plaguing previous attempts at pyroelectric energy conversion. A Numerical model provides accurate prediction of MEMS performance and sets design criteria, while physics based analytical model simplifies design steps. A SPICE model of the MEMS device incorporates electrical conversion and enables electrical interfacing for current extraction and energy storage. Experimental results provide practical implementation steps towards of the modeled device. Under ideal condition the proposed device promises to generate energy density of 400 W/L

National MEMS Technology Roadmap - Markets, Applications and Devices

MEMS teknologiaa on jo pitkään käytetty lukuisien eri laitteiden valmistamiseen. Osa näistä laitteista on ollut markkinoilla jo useita vuosia, kun taas osa on vasta kehitysvaiheessa. Jotta tutkimus ja kehitystyötä osattaisiin jatkossa kohdistaa oikeille painopistealueille, on tärkeää tietää mihin suuntaan kehitys on menossa. Tämä työ on osa kansallista MEMS teknologioiden tiekartta -projektia ja sen tavoitteena oli selvittää MEMS laitteiden kehityksen suuntaa. Työ toteutettiin laajana kirjallisuustutkimuksena. Lisäksi tulosten tueksi haastateltiin asiantuntijoita Suomen MEMS teollisuudesta. Työssä tarkasteltiin lukuisia jo markkinoilta löytyviä ja vasta kehitteillä olevia MEMS laitteita ja analysoitiin niitä sekä teknisestä että kaupallisesta näkökulmasta. Tutkimuksen perusteella kävi ilmi, että MEMS markkinat ovat pitkään muodostuneet vakiintuneista laitteista kuten mustesuihkupäistä, kiihtyvyysantureista, paineantureista sekä RF suotimista. Lisäksi mikrofonit, gyroskoopit ja optiset laitteet ovat olleet kaupallisesti saatavilla jo pitkään. Markkinat ovat hiljattain alkaneet tehdä tilaa myös uusille MEMS laitteille, joita tulee ulos nopeaa vauhtia. Viimeisimpänä markkinoille tulleita laitteita ovat erilaiset mikrofluidistiikka laitteet, mikrobolometrit sekä yhdistelmäanturit. Pian kaupallisesti saatavia laitteita ovat magnetometrit, automaattitarkennuslaitteet sekä MEMS oskillaattorit. Näiden laitteiden lisäksi kehitteillä on monia uusia MEMS laitteita, jotka saattavat tarjota merkittäviä mahdollisuuksia tulevaisuudessa. Kehitteillä olevia laitteita ovat erilaiset lääketieteelliset laitteet, atomikellot, mikrojäähdyttimet, mikrokaiuttimet, energiantuottolaitteet sekä RFID-laitteet. Kaikki kehitteillä olevista laitteista eivät välttämättä tule menestymään kaupallisesti, mutta jatkuva tutkimustyö osoittaa, että monilla MEMS laitteilla on potentiaalia useissa eri sovelluksissa. Markkinanäkökulmasta tarkasteltuna suurin potentiaali piilee kuluttajaelektroniikka markkinoilla. Muita tulevaisuuden kannalta potentiaalisia markkinoita ovat lääketieteelliset ja teollisuusmarkkinat. Tutkimus osoitti että MEMS laitteiden tutkimukseen ja kehitykseen liittyy monia potentiaalisia painopistealueita tulevaisuudessa. Käyttömahdollisuuksien parantamiseksi monet jo vakiintuneet laitteet kaipaavat vielä parannuksia. Toisaalta, jo olemassa olevia laitteita voidaan hyödyntää uusissa sovelluksissa. Lisäksi monet uusista ja kehitteillä olevista MEMS laitteista vaativat vielä kehitystyötä.MEMS technology has long been applied to the fabrication of various devices from which some have already been in use for several years, whereas others are still under development. In order to find future focus areas in research and development activities in the industry, it is important to know where the development is going. This thesis was conducted as a part of National MEMS technology roadmap, and it aimed for determining the evolution of MEMS devices. The work was conducted as an extensive literature review. In addition, experts from the Finnish MEMS industry were interviewed in order obtain a broader insight to the results. In this thesis various existing and emerging MEMS devices were reviewed and analyzed from technological and commercial perspectives. The study showed that the MEMS market has long been composed of established devices, such as inkjet print-heads, pressure sensors, accelerometers and RF filters. Also gyroscopes, microphones and optical MEMS devices have already been on the market for a long time. Lately, many new devices have started to find their place in the markets. The most recently introduced commercial devices include microfluidic devices, micro bolometers, and combo sensors. There are also a few devices including magnetometers, MEMS oscillators, and auto-focus devices that are currently crossing the gap from R&D to commercialization. In addition to the already available devices, many new MEMS devices are under development, and might offer significant opportunities in the future. These emerging devices include various bioMEMS devices, atomic clocks, micro-coolers, micro speakers, power MEMS devices, and RFID devices. All of the emerging devices might not find commercial success, but the constant stream shows, that there are numerous applications, where MEMS devices could be applied in. From a market point of view, the greatest potential in the future lies in consumer electronics market. Other highly potential markets include medical and industrial markets. The results of the thesis indicate that there are many potential focus areas in the future related to MEMS devices, including improvements of the existing devices in order to gain better utilization, application of the existing devices in new areas, and development work among the emerging devices