Development of novel micropneumatic grippers for biomanipulation

Microbjects with dimensions from 1 μm to 1 mm have been developed recently for different aspects and purposes. Consequently, the development of handling and manipulation tools to fulfil this need is urgently required. Micromanipulation techniques could be generally categorized according to their actuation method such as electrostatic, thermal, shape memory alloy, piezoelectric, magnetic, and fluidic actuation. Each of which has its advantage and disadvantage. The fluidic actuation has been overlooked in MEMS despite its satisfactory output in the micro-scale. This thesis presents different families of pneumatically driven, low cost, compatible with biological environment, scalable, and controllable microgrippers. The first family demonstrated a polymeric microgripper that was laser cut and actuated pneumatically. It was tested to manipulate microparticles down to 200 microns. To overcome the assembly challenges that arise in this family, the second family was proposed. The second family was a micro-cantilever based microgripper, where the device was assembled layer by layer to form a 3D structure. The microcantilevers were fabricated using photo-etching technique, and demonstrated the applicability to manipulate micro-particles down to 200 microns using automated pick-and-place procedure. In addition, this family was used as a tactile-detector as well. Due to the angular gripping scheme followed by the above mentioned families, gripping smaller objects becomes a challenging task. A third family following a parallel gripping scheme was proposed allowing the gripping of smaller objects to be visible. It comprises a compliant structure microgripper actuated pneumatically and fabricated using picosecond laser technology, and demonstrated the capability of gripping microobject as small as 100 μm microbeads. An FEA modelling was employed to validate the experimental and analytical results, and excellent matching was achieved

Microrobots for wafer scale microfactory: design fabrication integration and control.

Future assembly technologies will involve higher automation levels, in order to satisfy increased micro scale or nano scale precision requirements. Traditionally, assembly using a top-down robotic approach has been well-studied and applied to micro-electronics and MEMS industries, but less so in nanotechnology. With the bloom of nanotechnology ever since the 1990s, newly designed products with new materials, coatings and nanoparticles are gradually entering everyone’s life, while the industry has grown into a billion-dollar volume worldwide. Traditionally, nanotechnology products are assembled using bottom-up methods, such as self-assembly, rather than with top-down robotic assembly. This is due to considerations of volume handling of large quantities of components, and the high cost associated to top-down manipulation with the required precision. However, the bottom-up manufacturing methods have certain limitations, such as components need to have pre-define shapes and surface coatings, and the number of assembly components is limited to very few. For example, in the case of self-assembly of nano-cubes with origami design, post-assembly manipulation of cubes in large quantities and cost-efficiency is still challenging. In this thesis, we envision a new paradigm for nano scale assembly, realized with the help of a wafer-scale microfactory containing large numbers of MEMS microrobots. These robots will work together to enhance the throughput of the factory, while their cost will be reduced when compared to conventional nano positioners. To fulfill the microfactory vision, numerous challenges related to design, power, control and nanoscale task completion by these microrobots must be overcome. In this work, we study three types of microrobots for the microfactory: a world’s first laser-driven micrometer-size locomotor called ChevBot，a stationary millimeter-size robotic arm, called Solid Articulated Four Axes Microrobot (sAFAM), and a light-powered centimeter-size crawler microrobot called SolarPede. The ChevBot can perform autonomous navigation and positioning on a dry surface with the guidance of a laser beam. The sAFAM has been designed to perform nano positioning in four degrees of freedom, and nanoscale tasks such as indentation, and manipulation. And the SolarPede serves as a mobile workspace or transporter in the microfactory environment

The Milli-Motein: A self-folding chain of programmable matter with a one centimeter module pitch

The Milli-Motein (Millimeter-Scale Motorized Protein) is ca chain of programmable matter with a 1 cm pitch. It can fold itself into digitized approximations of arbitrary three-dimensional shapes. The small size of the Milli-Motein segments is enabled by the use of our new electropermanent wobble stepper motors, described in this paper, and by a highly integrated electronic and mechanical design. The chain is an interlocked series of connected motor rotors and stators, wrapped with a continuous flex circuit to provide communications, control, and power transmission capabilities. The Milli-Motein uses off-the-shelf electronic components and fasteners, and custom parts fabricated by conventional and electric discharge machining, assembled with screws, glue, and solder using tweezers under a microscope. We perform shape reconfiguration experiments using a four-segment Milli-Motein. It can switch from a straight line to a prescribed shape in 5 seconds, consuming 2.6 W power during reconfiguration. It can hold its shape indefinitely without power. During reconfiguration, a segment can lift the weight of one but not two segments as a horizontal cantilever.United States. Defense Advanced Research Projects Agency. Programmable Matter ProgramUnited States. Defense Advanced Research Projects Agency. Maximum Mobility and Manipulation (M3) ProgramUnited States. Army Research Office (Grant W911NF-08-1-0254)United States. Army Research Office (Grant W911NF-11-1-0096)Massachusetts Institute of Technology. Center for Bits and Atom

Untethered Microrobots of the Rolling, Jumping & Flying kinds

In this dissertation we study microrobot design for three modes of locomotion, namely rolling, jumping, and flying. This work covers power electronics, actuator and mechanical transmission design for these types of microrobots along with power source selection. Though interesting, we do not cover the sensors, controllers/computers, communications and useful payloads for these bots. This remains a topic for future work. Piezoelectric and electrostatic actuators generally have been the actuators of choice for researchers working in microrobotics, since conventional electromagnetic motor designs don't scale down well. Here we design an electromagnetic actuator in a way that significantly reduces its scaling down disadvantages, while still retaining its original advantages. This has enabled us to achieve untethered operation for our bots, which is one of the coveted goals for researchers working in this domain. Though untethered rolling and jumping is demonstrated, the untethered flying bot reported in this dissertation remains underpowered and doesn't take flight yet. First a micro-ratcheting mechanism is developed as a means to convert small periodic motions of actuators to continuous rotational motion. A supercapacitor, a fixed frequency H-bridge, and a low-voltage electromagnetic actuator is then used to drive this micro-ratchet to achieve untethered rolling motion for 8 seconds at 27mm/s. At 130mg mass, this is the lightest and fastest untethered rolling microrobot reported yet. The same continuous rotation mechanism developed for the rolling bot is then used to load a spring in an energy storage mechanism that can then release the stored energy rapidly and passively, via use of magnets, after the stored energy crosses a certain threshold. In this case, the continuous rotation mechanism is driven using laser-powered photovoltaic cells and untethered jumping up to heights of 8mm is demonstrated. At 75mg mass, it is the lightest untethered jumping microrobot with onboard power source. Next, a highly efficient resonant low-voltage electromagnetic actuator is developed to generate insect-like flapping wing motion. It is demonstrated to produce 90% of its weight in lift. Further light-weight and power-efficient power electronics are developed to power this actuator using laser-powered photovoltaic cells. The designed power electronics are an order of magnitude lighter and two orders of magnitude more efficient than all other power electronics units reported yet for flying microrobots. While sufficient lift for flight is not achieved, due to the actuator being underpowered because of power source overheating, untethered flapping wing motion is demonstrated. To provide inspiration to future generations of microroboticists, a fruit fly scale flapping winged robot is developed. At 0.7mg mass, even though tethered, it is the lightest and smallest bot to demonstrate flapping wing kinematics

Novel Integrated System Architecture for an Autonomous Jumping Micro-Robot

As the capability and complexity of robotic platforms continue to evolve from the macro to micro-scale, innovation of such systems is driven by the notion that a robot must be able to sense, think, and act [1]. The traditional architecture of a robotic platform consists of a structural layer upon which, actuators, controls, power, and communication modules are integrated for optimal system performance. The structural layer, for many micro-scale platforms, has commonly been implemented using a silicon die, thus leading to robotic platforms referred to as "walking chips" [2]. In this thesis, the first-ever jumping microrobotic platform is demonstrated using a hybrid integration approach to assemble on-board sensing and power directly onto a polymer chassis. The microrobot detects a change in light intensity and ignites 0.21mg of integrated nanoporous energetic silicon, resulting in 246µJ of kinetic energy and a vertical jump height of 8cm

Microgripper design and evaluation for automated µ-wire assembly: a survey

Microgrippers are commonly used for micromanipulation of micro-objects from 1 to 100 µm and attain features of reliable accuracy, low cost, wide jaw aperture and variable applied force. This paper aim is to review the design of different microgrippers which can manipulate and assemble µ-wire to PCB connectors. A review was conducted on microgrippers’ technologies, comparing fundamental components of structure and actuators’ types, which determined the most suitable design for the required micromanipulation task. Various microgrippers’ design was explored to examine the suitability and the execution of requirements needed for successful micromanipulation

A reconfigurable tactile display based on polymer MEMS technology

This research focuses on the development of polymer microfabrication technologies for the realization of two major components of a pneumatic tactile display: a microactuator array and a complementary microvalve (control) array. The concept, fabrication, and characterization of a kinematically-stabilized polymeric microbubble actuator (¡°endoskeletal microbubble actuator¡±) were presented. A systematic design and modeling procedure was carried out to generate an optimized geometry of the corrugated diaphragm to satisfy membrane deflection, force, and stability requirements set forth by the tactile display goals. A refreshable Braille cell as a tactile display prototype has been developed based on a 2x3 endoskeletal microbubble array and an array of commercial valves. The prototype can provide both a static display (which meets the displacement and force requirement of a Braille display) and vibratory tactile sensations. Along with the above capabilities, the device was designed to meet the criteria of lightness and compactness to permit portable operation. The design is scalable with respect to the number of tactile actuators while still being simple to fabricate. In order to further reduce the size and cost of the tactile display, a microvalve array can be integrated into the tactile display system to control the pneumatic fluid that actuates the microbubble actuator. A piezoelectrically-driven and hydraulically-amplified polymer microvalve has been designed, fabricated, and tested. An incompressible elastomer was used as a solid hydraulic medium to convert the small axial displacement of a piezoelectric actuator into a large valve head stroke while maintaining a large blocking force. The function of the microvalve as an on-off switch for a pneumatic microbubble tactile actuator was demonstrated. To further reduce the cost of the microvalve, a laterally-stacked multilayer PZT actuator has been fabricated using diced PZT multilayer, high aspect ratio SU-8 photolithography, and molding of electrically conductive polymer composite electrodes.Ph.D.Committee Chair: Allen,Mark; Committee Member: Bucknall,David; Committee Member: Book,Wayne; Committee Member: Griffin,Anselm; Committee Member: Yao,Donggan

Electropermanent magnetic connectors and actuators : devices and their application in programmable matter

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2010.Cataloged from PDF version of thesis.Includes bibliographical references (p. 199-206).Programmable matter is a digital material having computation, sensing, and actuation capabilities as continuous properties active over its whole extent. To make programmable matter economical to fabricate, we want to use electromagnetic direct drive, rather than clockwork, to actuate the particles. Previous attempts to fabricate small scale (below one centimeter) robotic systems with electromagnetic direct-drive have typically run into problems with insufficient force or torque, excessive power consumption and heat generation (for magnetic-drive systems), or high-voltage requirements, humidity sensitivity, and air breakdown. (for electrostatic-drive systems) The electropermanent magnet is a solid-state device whose external magnetic flux can be stably switched on and off by a discrete electrical pulse. Electropermanent magnets can provide low-power connection and actuation for programmable matter and other small-scale robotic systems. The first chapter covers the electropermanent magnet, its physics, scaling, fabrication, and our experimental device performance data. The second introduces the idea of electropermanent actuators, covers their fundamental limits and scaling, and shows prototype devices and performance measurements. The third chapter describes the smart pebbles system, which consists of 12-mm cubes that can form shapes by stochastic self-assembly and self-disassembly. The fourth chapter describes the millibot, a continuous chain of programmable matter which forms shapes by folding.by Ara Nerses Knaian.Ph.D

Thermally actuated mechanical systems

This thesis will discuss the generation of controlled sub-micron motions using novel micro actuators. Our research focuses on the development of an arm-type actuator and a free-motion locomotive walking device. Nano-science and nano-technology focuses on the creation of novel functional materials and also at the development of new fabrication techniques incorporating them. In the fields of novel fabrication techniques, manipulations of micron or sub-micron objects by micro actuators have been suggested in the science and engineering societies for mainly two reasons. From a scientific standpoint, new tools enable new prospective sciences, as is evident from the development of the atomic force microscope. From an engineering standpoint, the miniaturization of manipulation tools will require less material and less energy during a material's production. In spite of such importance, progress in the actuator miniaturization is in a primitive state, especially for the micro mobile devices. The thesis will be a key step in pursuit of this goal with an emphasis on generating motions. Our static actuator uses the excellent elastic properties of multiwall carbon nanotubes as a template for a bimorph system. Deflections in response to temperature variations are demonstrated. The mobile device itself is a bimorph system consisting of thin metal films. Control mechanisms for its velocity and steering are discussed. Finally, fundamental limits on the capabilities of the two devices in a more general sense are discussed under via laws of physics