Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors

Micromachined thermal gas inertial sensors based on heat convection are novel devices that compared with conventional micromachined inertial sensors offer the advantages of simple structures, easy fabrication, high shock resistance and good reliability by virtue of using a gaseous medium instead of a mechanical proof mass as key moving and sensing elements. This paper presents an analytical modeling for a micromachined thermal gas gyroscope integrated with signal conditioning. A simplified spring-damping model is utilized to characterize the behavior of the sensor. The model relies on the use of the fluid mechanics and heat transfer fundamentals and is validated using experimental data obtained from a test-device and simulation. Furthermore, the nonideal issues of the sensor are addressed from both the theoretical and experimental points of view. The nonlinear behavior demonstrated in experimental measurements is analyzed based on the model. It is concluded that the sources of nonlinearity are mainly attributable to the variable stiffness of the sensor system and the structural asymmetry due to nonideal fabrication

Fluidic mechanism for dual-axis gyroscope

In this paper, we report a further study of flow-network generating four jet flows which circulate in a sealed device to experimentally investigate the feasibility and efficiency of a dual-axis gyroscope. The experiment is carried out successfully and the experimental results reasonably agreed with those obtained by numerical analysis using OpenFOAM. The flow rectifying coefficient is determined using the mathematical lump model for a vibrating system, which takes into account of the device geometry and resonant frequency. Experimental and numerical results demonstrate that the coefficient of the new system developed in this study is significantly higher than those of conventional designs. The hotwire-integrated device which can function as a dual-axis gyroscope is tested using a turntable with speeds up to 1900 rpm. The scale factor and cross-sensitivity of the system are 0.26 microV s/o and 1.2%, respectively. The cross-sensitivity and the effects of linear acceleration, actuating voltage on the diaphragm, heating power and position of hotwires are also investigated