Overview of microgrippers and design of a micro-manipulation station based on a MMOC microgripper

International audienceThis paper deals with an overview of recent microgrippers. As the end-effectors of micromanipulation systems, microgrippers are crucial point of such systems for their efficiency and their reliability. The performances of current microgrippers are presented and offer a stroke extending from 50 m to approximately 2mm and a maximum forces varying from 0,1mN to 600 mN. Then, micromanipulation system based on a piezoelectric microgripper and a SCARA robot is presented

Dynamic modelling for thermal micro-actuators using thermal networks.

International audienceThermal actuators are extensively used in microelectromechanical systems (MEMS). Heat transfer through and around these microstructures are very complex. Knowing and controlling them in order to improve the performance of the micro-actuator, is currently a great challenge. This paper deals with this topic and proposes a dynamic thermal modelling of thermal micro-actuators. Thermal problems may be modelled using electrical analogy. However, current equivalent electrical models (thermal networks) are generally obtained considering only heat transfers through the thickness of structures having considerable height and length in relation to width (walls). These models cannot be directly applied to micro-actuators. In fact, microactuator congurations are based on 3D beam structures, and heat transfers occur through and around length. New dynamic and static thermal networks are then proposed in this paper. The validities of both types of thermal networks have been studied. They are successfully validated by comparison with nite elements simulation and analytical calculations

Development of novel micropneumatic grippers for biomanipulation

Microbjects with dimensions from 1 μm to 1 mm have been developed recently for different aspects and purposes. Consequently, the development of handling and manipulation tools to fulfil this need is urgently required. Micromanipulation techniques could be generally categorized according to their actuation method such as electrostatic, thermal, shape memory alloy, piezoelectric, magnetic, and fluidic actuation. Each of which has its advantage and disadvantage. The fluidic actuation has been overlooked in MEMS despite its satisfactory output in the micro-scale. This thesis presents different families of pneumatically driven, low cost, compatible with biological environment, scalable, and controllable microgrippers. The first family demonstrated a polymeric microgripper that was laser cut and actuated pneumatically. It was tested to manipulate microparticles down to 200 microns. To overcome the assembly challenges that arise in this family, the second family was proposed. The second family was a micro-cantilever based microgripper, where the device was assembled layer by layer to form a 3D structure. The microcantilevers were fabricated using photo-etching technique, and demonstrated the applicability to manipulate micro-particles down to 200 microns using automated pick-and-place procedure. In addition, this family was used as a tactile-detector as well. Due to the angular gripping scheme followed by the above mentioned families, gripping smaller objects becomes a challenging task. A third family following a parallel gripping scheme was proposed allowing the gripping of smaller objects to be visible. It comprises a compliant structure microgripper actuated pneumatically and fabricated using picosecond laser technology, and demonstrated the capability of gripping microobject as small as 100 μm microbeads. An FEA modelling was employed to validate the experimental and analytical results, and excellent matching was achieved

Surface characterization of polyvinylidene fluoride (pvdf) in its application as an actuator

Polyvinylidene Fluoride (PVDF) is a common piezoelectric polymer. It is widely utilized because of its advantageous mechanical, chemical, and electromechanical properties. An interesting application for its properties lies in using it as an actuator, specifically for a microgripper device. The microgripper has many applications such as surgeries, microassembly, and micromanipulation. The friction force is an important criterion that greatly affects the gripping. This research studies the frictional behavior of the PVDF and effects of applied electrical potential. Approaches include tribological investigation of the polymer associated with surface properties. The surface characterization was conducted using a profilometer and an Atomic Force Microscope (AFM). In addition, the application of a PVDF material as a microgripper is addressed along with the design of the gripper. It was found that the friction could be turned-on and off because of external applied electrical potential. Such behavior was associated with the microstructure, where dipoles were aligned in an electrical field. Such active-friction has not been reported in the past. This work opens new areas of research in fundamental friction that benefits the design and development of small devices such as a microgripper

Integration of shape memory alloy for microactuation

Shape memory alloy (SMA) actuators in microelectromechanical system (MEMS) have a broad range of applications. The alloy material has unique properties underlying its high working density, simple structures, large displacement and excellent biocompatibility. These features have led to its commercialization in several applications such as micro-robotics and biomedical areas. However, full utilization of SMA is yet to be exploited as it faces various practical issues. In the area of microactuators in particular, fabricated devices suffer from low degrees of freedom (DoF), complex fabrication processes, larger sizes and limited displacement range. This thesis presents novel techniques of developing bulk-micromachined SMA microdevices by applying integration of multiple SMA microactuators, and monolithic methods using standard and unconventional MEMS fabrication processes. The thermomechanical behavior of the developed bimorph SMA microactuator is analyzed by studying the parameters such as thickness of SMA sheet, type and thickness of stress layer and the deposition temperature that affect the displacement. The microactuators are then integrated to form a novel SMA micromanipulator that consists of two links and a gripper at its end to provide three-DoF manipulation of small objects with overall actuation x- and y- axes displacement of 7.1 mm and 5.2 mm, respectively. To simplify the fabrication and improve the structure robustness, a monolithic approach was utilized in the development of a micro-positioning stage using bulk-micromachined SMA sheet that was fabricated in a single machining step. The design consisted of six spring actuators that provided large stage displacement range of 1.2 mm and 1.6 mm in x- and y-axes, respectively, and a rotation of 20° around the z-axis. To embed a self-sensing functionality in SMA microactuators, a novel wireless displacement sensing method based on integration of an SMA spiral-coil actuator in a resonant circuit is developed. These devices have the potential to promote the application of bulk-micromachined SMA actuator in MEMS area

Modeling And Development Of A MEMS Device For Pyroelectric Energy Scavenging

As the world faces an energy crisis with depleting fossil fuel reserves, alternate energy sources are being researched ever more seriously. In addition to renewable energy sources, energy recycling and energy scavenging technologies are also gaining importance. Technologies are being developed to scavenge energy from ambient sources such as vibration, radio frequency and low grade waste heat, etc. Waste heat is the most common form of wasted energy and is the greatest potential source of energy scavenging. Pyroelectricity is the property of some materials to change the surface charge distribution with the change in temperature. These materials produce current as temperature varies in them and can be utilized to convert thermal energy to electrical energy. In this work a novel approach to vary temperature in pyroelectric material to convert energy has been investigated. Microelectromechanical Systems or MEMS is the new technology trend that takes advantage of unique physical properties at micro scale to create mechanical systems with electrical interface using available microelectronic fabrication techniques. MEMS can accomplish functionalities that are otherwise impossible or inefficient with macroscale technologies. The energy harvesting device modeled and developed for this work takes full benefit of MEMS technology to cycle temperature in an embedded pyroelectric material to convert thermal energy from low grade waste heat to electrical energy. Use of MEMS enables improved performance and efficiency and overcomes problems plaguing previous attempts at pyroelectric energy conversion. A Numerical model provides accurate prediction of MEMS performance and sets design criteria, while physics based analytical model simplifies design steps. A SPICE model of the MEMS device incorporates electrical conversion and enables electrical interfacing for current extraction and energy storage. Experimental results provide practical implementation steps towards of the modeled device. Under ideal condition the proposed device promises to generate energy density of 400 W/L

Performance of Smart Materials-Based Instrumentation for Force Measurements in Biomedical Applications: A Methodological Review

The introduction of smart materials will become increasingly relevant as biomedical technologies progress. Smart materials sense and respond to external stimuli (e.g., chemical, electrical, mechanical, or magnetic signals) or environmental circumstances (e.g., temperature, illuminance, acidity, or humidity), and provide versatile platforms for studying various biological processes because of the numerous analogies between smart materials and biological systems. Several applications based on this class of materials are being developed using different sensing principles and fabrication technologies. In the biomedical field, force sensors are used to characterize tissues and cells, as feedback to develop smart surgical instruments in order to carry out minimally invasive surgery. In this regard, the present work provides an overview of the recent scientific literature regarding the developments in force measurement methods for biomedical applications involving smart materials. In particular, performance evaluation of the main methods proposed in the literature is reviewed on the basis of their results and applications, focusing on their metrological characteristics, such as measuring range, linearity, and measurement accuracy. Classification of smart materials-based force measurement methods is proposed according to their potential applications, highlighting advantages and disadvantages

Characterization Of Commercially Available Conductive Filament And Their Application In Sensors And Actuators

The primary aim of this study is to contribute to the field of additives that would enable the fabrication of electrical sensors and actuators completely via Material Extrusion based Additive Manufacturing (MEAM). The second aim of the study is to provide the necessary characterization to facilitate the development of applications that predicts electrical part performance. The electrical characterization of two conductive poly-lactic acid (PLA) filaments, namely, c-PLA with carbon black and graphene PLA was performed to study the temperature coefficient of the resistance. Resistivity of carbon black filament was compared to a printed single layer and with that of a cube. The raw and printed c-PLA showed a positive temperature coefficient of resistance (α) ranging from ~0.03-0.01 ℃-1 while its counterpart in the study, graphene PLA, did not exhibit significant (α). Parts from graphene PLA with multilayer MEAM exhibited a negative α to a certain temperature before exhibiting positive α. The resistivity of the printed parts was 300 times higher for c-PLA and 1500 times for graphene PLA. However, no microstructural or chemical compositional changes were observed between the raw filaments and the printed parts. Due to the high α of the c-PLA, it was deemed as the better material for constructing electro thermal sensors and actuators using MEAM. First, c-PLA was used to fabricate and package a completely 3D printed flow meter that operates on the principle of Joule heating and hotwire anemometry. When the designed flowmeter was simulated using a finite element package, a flow sensitivity of -2.33 Ω sccm-1 and a relative change in resistivity of 0.036 sccm-1 was expected. For an operating voltage of 12-15 V, the experimental results showed a flow sensitivity within the range of 0.014-0.032 sccm-1 and the relative change in resistivity ranged from 0.039 – 0.065 sccm-1. Thus, a completely 3D printed flowmeter was demonstrated. Second, using the same principle of Joule heating, an actuator inspired from MEMS chevron grippers was designed, simulated, and fabricated. Simulation showed the feasibility of the structure and further predicted a displacement of a few hundred microns with a potential as low as 3 V with a cooling time as little less than 120 seconds. Experimentally, a displacement of 120.04, 97.05, and 88.96 μm were achieved in 15, 10, and 5 seconds with actuation potentials of 12.7, 13.8, and 17.9 V, respectively. As predicted by the simulation results, it took longer for the gripper to cool (close to 180 seconds) when compared to actuation times. During the above studies, we discovered the printing parameters altered the part resistance. Our final study examined how extrusion temperature and printing speed affects the impedance of the MEAM printed parts. Further, anisotropy in the impedance was observed and the influence of the interface to it was examined. From the experimental results, the anisotropy was quantified with a Z/F ratio and was found to be nearly constant, ~2.15±0.23. Impedance scaling with the number of interfaces was measured and showed conclusively that the interlayer bonding was the sole source for the observed Z/F ratio. Scanning electron microscope images shows the absence of air gaps at the interface, and energy dispersion spectroscopy shows the absence of oxidation at the interface. By investigating the role of print parameters and scaling of impedance with interfaces, a framework to model and predict electrical behavior of electro thermal sensors and actuators made via MEAM can be realized

Negative Poisson’s ratio polyethylene matrix and 0.5BaCa0.8Zr0.2O3-0.5Ba0.7Ca0.3TiO3 based piezocomposite for sensing and energy harvesting applications

Abstract Finite element studies were conducted on 0.5Ba(Zr0.2 Ti0.8) O3–0.5(Ba0.7 Ca0.3)TiO3 (BCZT) piezoelectric particles embedded in polyethylene matrix to create a piezocomposite having a positive and negative Poisson's ratio of −0.32 and 0.2. Polyethylene with a positive Poisson's ratio is referred to as non-auxetic while those with negative Poisson's ratio are referred to as auxetic or inherently auxetic. The effective elastic and piezoelectric properties were calculated at volume fractions of (4%, 8% to 24%) to study their sensing and harvesting performance. This study compared lead-free auxetic 0–3 piezocomposite for sensing and energy harvesting with non-auxetic one. Inherently auxetic piezocomposites have been studied for their elastic and piezoelectric properties and improved mechanical coupling, but their sensing and energy harvesting capabilities and behavior patterns have not been explored in previous literatures. The effect of Poisson's ratio ranging between −0.9 to 0.4 on the sensing and energy harvesting performance of an inherently auxetic lead free piezocomposite composite with BCZT inclusions has also not been studied before, motivating the author to conduct the present study. Auxetic piezocomposite demonstrated an overall improvement in performance in terms of higher sensing voltage and harvested power. The study was repeated at a constant volume fraction of 24% for a range of Poisson's ratio varied between −0.9 to 0.4. Enhanced performance was observed at the extreme negative end of the Poisson's ratio spectrum. This paper demonstrates the potential improvements by exploiting auxetic matrices in future piezocomposite sensors and energy harvesters

Enhanced Piezoelectric Performance of Printed PZT Films on Low Temperature Substrates

Since piezoelectric effect was discovered in 1880, it has been widely used in micro-actuators, sensors, and energy harvesters. Lead Zirconate Titanate (PZT) is a commonly used piezoelectric material due to the high piezoelectric response. The basic PZT film fabrication process includes deposition, sintering, and poling. However, due to the high sintering temperature (\u3e 800 °C) of PZT, only high melting point material can be served as the substrate. Otherwise, complex film transfer approach is needed to achieve flexible and foldable PZT devices. The exploration is accordingly necessary to realize direct fabrication of PZT films on low melting point substrates without affecting the piezoelectric performance. In order to lower the PZT film sintering temperature, in this work, the effect of the powder size and sintering aid on the sintering temperature was studied. A maskless, CAD driven, non-contact direct printing system, aerosol jet printer, was used to deposit PZT thick films on the substrate. This technique allows creating features without masking and etching processes that are generally required for realizing designed features via conventional deposition approaches. Broadband, sub-millisecond, high intensity flash pulses were used to sinter the PZT films. The role of all sintering parameters was investigated to regulate the sintering quality of the PZT thick films. The photonically sintered films showed much lower substrate temperature increase mainly due to the extremely short pulse duration and temperature gradient through the film thickness. The superior piezoelectric property to thermally sintered group was also obtained. This process significantly shortens the processing duration and dramatically expands the possible substrate materials. It accordingly opens the possibility of processing PZT film directly on low melting point materials. A PZT energy harvester based on this process was directly fabricated on the polyethylene terephthalate (PET) substrate to demonstrate the capability. The relation between the load and the generated power was investigated to obtain the highest output power. Up to 0.1 μW was generated from this flexible energy harvester when connected with 10 MΩ resistive load. Photonic sintering of PZT film also creates the opportunity of processing poling during sintering. Different combinations of the sintering and poling techniques were studied. It was observed that the best piezoelectric property was obtained while performing poling during photonic sintering. Consequently, a new method of printing, sintering, and poling of micro-scaled PZT films was demonstrated in this work resulting in high performance films. This process provides the capability of realizing PZT devices on low temperature substrate, facilitates the fabrication of flexible piezoelectric devices, and enhances the piezoelectric property