Fast scatterometric measurement of periodic surface structures plasma-etching processes

To satisfy the continuous demand of ever smaller feature sizes, plasma etching technologies in microelectronics processing enable the fabrication of device structures with dimensions in the nanometer range. In a typical plasma etching system a plasma phase of a selected etching gas is activated, thereby generating highly energetic and reactive gas species which ultimately etch the substrate surface. Such dry etching processes are highly complex and require careful adjustment of many process parameters to meet the high technology requirements on the structure geometry. In this context, real-time access of the structures dimensions during the actual plasma process would be of great benefit by providing full dimension control and film integrity in real-time. In this paper, we evaluate the feasibility of reconstructing the etched dimensions with nanometer precision from reflectivity spectra of the etched surface, which are measured in real-time throughout the entire etch process. We develop and test a novel and fast reconstruction algorithm, using experimental reflection spectra taken about every second during the etch process of a periodic 2D model structure etched into a silicon substrate. Unfortunately, the numerical simulation of the reflectivity by Maxwell solvers is time consuming since it requires separate time-harmonic computations for each wavelength of the spectrum. To reduce the computing time, we propose that a library of spectra should be generated before the etching process. Each spectrum should correspond to a vector of geometry parameters s.t. the vector components scan the possible range of parameter values for the geometrical dimensions. We demonstrate that by replacing the numerically simulated spectra in the reconstruction algorithm by spectra interpolated from the library, it is possible to compute the geometry parameters in times less than a second. Finally, to also reduce memory size and computing time for the library, we reduce the scanning of the parameter values to a sparse grid

Fast scatterometric measurement of periodic surface structures in plasma-etching processes

To satisfy the continuous demand of ever smaller feature sizes, plasma etching technologies in microelectronics processing enable the fabrication of device structures with dimensions in the nanometer range. In a typical plasma etching system a plasma phase of a selected etching gas is activated, thereby generating highly energetic and reactive gas species which ultimately etch the substrate surface. Such dry etching processes are highly complex and require careful adjustment of many process parameters to meet the high technology requirements on the structure geometry. In this context, real-time access of the structure's dimensions during the actual plasma process would be of great benefit by providing full dimension control and film integrity in real-time. In this paper, we evaluate the feasibility of reconstructing the etched dimensions with nanometer precision from reflectivity spectra of the etched surface, which are measured in real-time throughout the entire etch process. We develop and test a novel and fast reconstruction algorithm, using experimental reflection spectra taken about every second during the etch process of a periodic 2D model structure etched into a silicon substrate. Unfortunately, the numerical simulation of the reflectivity by Maxwell solvers is time consuming since it requires separate time-harmonic computations for each wavelength of the spectrum. To reduce the computing time, we propose that a library of spectra should be generated before the etching process. Each spectrum should correspond to a vector of geometry parameters s.t. the vector components scan the possible range of parameter values for the geometrical dimensions. We demonstrate that by replacing the numerically simulated spectra in the reconstruction algorithm by spectra interpolated from the library, it is possible to compute the geometry parameters in times less than a second. Finally, to also reduce memory size and computing time for the library, we reduce the scanning of the parameter values to a sparse grid

Multipurpose S-shaped solvable profiles of the refractive index: application to modeling of antireflection layers and quasi-crystals

A class of four-parameter solvable profiles of the electromagnetic admittance has recently been discovered by applying the newly developed Property & Field Darboux Transformation method (PROFIDT). These profiles are highly flexible. In addition, the related electromagnetic-field solutions are exact, in closed-form and involve only elementary functions. In this paper, we focus on those who are S-shaped and we provide all the tools needed for easy implementation. These analytical bricks can be used for high-level modeling of lightwave propagation in photonic devices presenting a piecewise-sigmoidal refractive-index profile such as, for example, antireflection layers, rugate filters, chirped filters and photonic crystals. For small amplitude of the index modulation, these elementary profiles are very close to a cosine profile. They can therefore be considered as valuable surrogates for computing the scattering properties of components like Bragg filters and reflectors as well. In this paper we present an application for antireflection layers and another for 1D quasicrystals (QC). The proposed S-shaped profiles can be easily manipulated for exploring the optical properties of smooth QC, a class of photonic devices that adds to the classical binary-level QC.Comment: 14 pages, 18 fi

Optimizing scoped and immortal memory management in real-time java

This thesis was submitted for the degree of Doctor of Philosophy and awarded by Brunel University.The Real-Time Specification for Java (RTSJ) introduces a new memory management model which avoids interfering with the garbage collection process and achieves better deterministic behaviour. In addition to the heap memory, two types of memory areas are provided - immortal and scoped. The research presented in this Thesis aims to optimize the use of the scoped and immortal memory model in RTSJ applications. Firstly, it provides an empirical study of the impact of scoped memory on execution time and memory consumption with different data objects allocated in scoped memory areas. It highlights different characteristics for the scoped memory model related to one of the RTSJ implementations (SUN RTS 2.2). Secondly, a new RTSJ case study which integrates scoped and immortal memory techniques to apply different memory models is presented. A simulation tool for a real-time Java application is developed which is the first in the literature that shows scoped memory and immortal memory consumption of an RTSJ application over a period of time. The simulation tool helps developers to choose the most appropriate scoped memory model by monitoring memory consumption and application execution time. The simulation demonstrates that a developer is able to compare and choose the most appropriate scoped memory design model that achieves the least memory footprint. Results showed that the memory design model with a higher number of scopes achieved the least memory footprint. However, the number of scopes per se does not always indicate a satisfactory memory footprint; choosing the right objects/threads to be allocated into scopes is an important factor to be considered. Recommendations and guidelines for developing RTSJ applications which use a scoped memory model are also provided. Finally, monitoring scoped and immortal memory at runtime may help in catching possible memory leaks. The case study with the simulation tool developed showed a space overhead incurred by immortal memory. In this research, dynamic code slicing is also employed as a debugging technique to explore constant increases in immortal memory. Two programming design patterns are presented for decreasing immortal memory overheads generated by specific data structures. Experimental results showed a significant decrease in immortal memory consumption at runtime

5G Infrastructure Network Slicing: E2E Mean Delay Model and Effectiveness Assessment to Reduce Downtimes in Industry 4.0

This work has been partially funded by the H2020 project 5G-CLARITY (Grant No. 871428) and the Spanish national project TRUE-5G (PID2019-108713RB-C53).Fifth Generation (5G) is expected to meet stringent performance network requisites of the Industry 4.0. Moreover, its built-in network slicing capabilities allow for the support of the traffic heterogeneity in Industry 4.0 over the same physical network infrastructure. However, 5G network slicing capabilities might not be enough in terms of degree of isolation for many private 5G networks use cases, such as multi-tenancy in Industry 4.0. In this vein, infrastructure network slicing, which refers to the use of dedicated and well isolated resources for each network slice at every network domain, fits the necessities of those use cases. In this article, we evaluate the effectiveness of infrastructure slicing to provide isolation among production lines (PLs) in an industrial private 5G network. To that end, we develop a queuing theory-based model to estimate the end-to-end (E2E) mean packet delay of the infrastructure slices. Then, we use this model to compare the E2E mean delay for two configurations, i.e., dedicated infrastructure slices with segregated resources for each PL against the use of a single shared infrastructure slice to serve the performance-sensitive traffic from PLs. Also we evaluate the use of Time-Sensitive Networking (TSN) against bare Ethernet to provide layer 2 connectivity among the 5G system components. We use a complete and realistic setup based on experimental and simulation data of the scenario considered. Our results support the effectiveness of infrastructure slicing to provide isolation in performance among the different slices. Then, using dedicated slices with segregated resources for each PL might reduce the number of the production downtimes and associated costs as the malfunctioning of a PL will not affect the network performance perceived by the performance-sensitive traffic from other PLs. Last, our results show that, besides the improvement in performance, TSN technology truly provides full isolation in the transport network compared to standard Ethernet thanks to traffic prioritization, traffic regulation, and bandwidth reservation capabilities.H2020 project 5G-CLARITY 871428Spanish Government PID2019-108713RB-C53TRUE-5

On the cyclic bending behaviour of a hard coating on a ductile substrate with periodic surface hardened regions

AbstractA cyclic bending experiment is designed to investigate the interface fracture behaviour of a hard chromium coating on a ductile substrate with periodic surface hardened regions. The unique deflection pattern of the vertical cracks after they run through the coating and impinge at the interface is revealed experimentally. A simple double-layer elastic beam model is adopted to investigate the interfacial shear stresses analytically. A FE model is employed to compute the stresses of the tri-phase structure under a single round of bending, and to investigate the effect of the loading conditions on the deflection pattern of the vertical cracks at the interface

Efficiently and Transparently Maintaining High SIMD Occupancy in the Presence of Wavefront Irregularity

Demand is increasing for high throughput processing of irregular streaming applications; examples of such applications from scientific and engineering domains include biological sequence alignment, network packet filtering, automated face detection, and big graph algorithms. With wide SIMD, lightweight threads, and low-cost thread-context switching, wide-SIMD architectures such as GPUs allow considerable flexibility in the way application work is assigned to threads. However, irregular applications are challenging to map efficiently onto wide SIMD because data-dependent filtering or replication of items creates an unpredictable data wavefront of items ready for further processing. Straightforward implementations of irregular applications on a wide-SIMD architecture are prone to load imbalance and reduced occupancy, while more sophisticated implementations require advanced use of parallel GPU operations to redistribute work efficiently among threads. This dissertation will present strategies for addressing the performance challenges of wavefront- irregular applications on wide-SIMD architectures. These strategies are embodied in a developer framework called Mercator that (1) allows developers to map irregular applications onto GPUs ac- cording to the streaming paradigm while abstracting from low-level data movement and (2) includes generalized techniques for transparently overcoming the obstacles to high throughput presented by wavefront-irregular applications on a GPU. Mercator forms the centerpiece of this dissertation, and we present its motivation, performance model, implementation, and extensions in this work