Silicon and Polymer Components for Microrobots

This dissertation presents the characterization and implementation of the first microfabrication process to incorporate high aspect ratio compliant polymer structures in-plane with traditional silicon microelectromechanical systems (MEMS). This discussion begins with in situ mechanical characterization of microscale polymer springs using silicon-on-insulator-MEMS (SOI-MEMS). The analysis compares microscale samples that were tested on-chip with macroscale samples tested using a dynamic mechanical analyzer. The results describe the effect of the processing steps on the polymer during fabrication and help to guide the design of mechanisms using polymers. Characterization of the dielectric breakdown of polymer thin films with thicknesses from 2 to 14 μm between silicon electrodes was also performed. The results demonstrate that there is a strong dependence of the breakdown field on both the electrode gap and shape. The breakdown fields ranged from 250 V/μm to 635 V/μm, depending on the electrode geometry and gap, approaching 10x the breakdown fields for air gaps of the same size. These materials were then used to create compliant all-polymer thermal and electrostatic microactuators. All-polymer thermal actuators demonstrated displacements as large at 100 μm and forces as high as 55 μN. A 1 mm long electrostatic dielectric elastomer actuator demonstrated a tip displacement as high as 350 μm at 1.1 kV with a electrical power consumption of 11μW. The actuators are fabricated with elastomeric materials, so they are very robust and can undergo large strains in both tension and bending and still operate once released. Finally, the compliant polymer and silicon actuators were combined in an actuated bio-inspired system. Small insects and other animals use a multitude of materials to realize specific functions, including locomotion. By incorporating compliant elastomer structures in-plane with traditional silicon actuators, compact energy storage systems based on elastomer springs for small jumping robots were demonstrated. Results include a 4 mm x 4 mm jumping mechanism that has reached heights of 32 cm, 80x its own height, and an on-chip actuated mechanism that has been used to propel a 1.4mg projectile over 7 cm

Underwater and Surface Aquatic Locomotion of Soft Biomimetic Robot Based on Bending Rolled Dielectric Elastomer Actuators

All-around, real-time navigation and sensing across the water environments by miniature soft robotics are promising, for their merits of small size, high agility and good compliance to the unstructured surroundings. In this paper, we propose and demonstrate a mantas-like soft aquatic robot which propels itself by flapping-fins using rolled dielectric elastomer actuators (DEAs) with bending motions. This robot exhibits fast-moving capabilities of swimming at 57mm/s or 1.25 body length per second (BL/s), skating on water surface at 64 mm/s (1.36 BL/s) and vertical ascending at 38mm/s (0.82 BL/s) at 1300 V, 17 Hz of the power supply. These results show the feasibility of adopting rolled DEAs for mesoscale aquatic robots with high motion performance in various water-related scenarios.Comment: 6 Pages, 12 Figures, Published at IROS 202

A comparative review of artificial muscles for microsystem applications

Artificial muscles are capable of generating actuation in microsystems with outstanding compliance. Recent years have witnessed a growing academic interest in artificial muscles and their application in many areas, such as soft robotics and biomedical devices. This paper aims to provide a comparative review of recent advances in artificial muscle based on various operating mechanisms. The advantages and limitations of each operating mechanism are analyzed and compared. According to the unique application requirements and electrical and mechanical properties of the muscle types, we suggest suitable artificial muscle mechanisms for specific microsystem applications. Finally, we discuss potential strategies for energy delivery, conversion, and storage to promote the energy autonomy of microrobotic systems at a system level

Towards the Use of Dielectric Elastomer Actuators as Locomotive Devices for Millimeter-Scale Robots

Dielectric elastomer actuators (DEAs) are electromechanical transducers that are promising for small scale applications. The work presented in this thesis seeks to develop DEAs as an actuation technology that would serve the purpose of ambulating millimeter-scale robots in a robust and predictable manner. To begin, the "planar" DEA configuration was characterized and the performances of various elastomers were investigated. Then, based on the requirements of a proposed robot walking gait, two principles were examined as means of converting in-plane actuation strain to bending actuation. Bending DEAs were fabricated and tested, and a maximum end displacement of 1.5 mm was achieved for a 10 mm long sample. Bending actuator design was optimized by maximizing both speed and payload capabilities. Finally, some challenges facing the design of robots ambulated by DEAs were outlined; of particular note is the DEAs' electrostatic interaction with each other and their surroundings

Towards enduring autonomous robots via embodied energy.

Autonomous robots comprise actuation, energy, sensory and control systems built from materials and structures that are not necessarily designed and integrated for multifunctionality. Yet, animals and other organisms that robots strive to emulate contain highly sophisticated and interconnected systems at all organizational levels, which allow multiple functions to be performed simultaneously. Herein, we examine how system integration and multifunctionality in nature inspires a new paradigm for autonomous robots that we call Embodied Energy. Whereas most untethered robots use batteries to store energy and power their operation, recent advancements in energy-storage techniques enable chemical or electrical energy sources to be embodied directly within the structures and materials used to create robots, rather than requiring separate battery packs. This perspective highlights emerging examples of Embodied Energy in the context of developing autonomous robots

Proxy-based sliding-mode tracking control of dielectric elastomer actuators through eliminating rate-dependent viscoelasticity

This work was partially supported by the State Key Laboratory of Mechanical Transmissions (SKLMT-ZDKFKT-202004) and the National Natural Science Foundation of China (52005322 and 52025057).Peer reviewedPostprin

Design, Actuation, and Functionalization of Untethered Soft Magnetic Robots with Life-Like Motions: A Review

Soft robots have demonstrated superior flexibility and functionality than conventional rigid robots. These versatile devices can respond to a wide range of external stimuli (including light, magnetic field, heat, electric field, etc.), and can perform sophisticated tasks. Notably, soft magnetic robots exhibit unparalleled advantages among numerous soft robots (such as untethered control, rapid response, and high safety), and have made remarkable progress in small-scale manipulation tasks and biomedical applications. Despite the promising potential, soft magnetic robots are still in their infancy and require significant advancements in terms of fabrication, design principles, and functional development to be viable for real-world applications. Recent progress shows that bionics can serve as an effective tool for developing soft robots. In light of this, the review is presented with two main goals: (i) exploring how innovative bioinspired strategies can revolutionize the design and actuation of soft magnetic robots to realize various life-like motions; (ii) examining how these bionic systems could benefit practical applications in small-scale solid/liquid manipulation and therapeutic/diagnostic-related biomedical fields

A review on actuation principls for few cubic millimeter sized mobile micro-robots

Actuation systems for few cubic millimeter sized mobile autonomous robots are subject to severe constraints in terms of e.g. size, fabrication or power consumption. Also the onboard electronics has limited performance due to both size and power restrictions, so actuation voltages, currents and frequency should be minimized. Various principles of electrical to mechanical energy conversion will be presented (piezoelectric, polymer, electrostatic) and their performances compared considering the above mentioned constraints. For propulsion, a further mechanical to mechanical conversion is necessary to allow long strokes. We will compare four principles for this conversion: inertial drives, walking, inch-worm and propulsion based on asymmetrical friction forces. Solutions where the energy is not onboard but rather scavenged in the environment are also reviewed. These solutions try to circumvent the energy limitations but present some inconveniences, especially when several micro-robots have to be simultaneously steered and/or propelled

Multimodal locomotion ultra-thin soft robots for exploration of narrow spaces

From power plants on land to bridges over the sea, safety-critical built environments require periodic inspections for detecting issues to avoid functional discontinuities of these installations. However, navigation paths in these environments are usually challenging as they often contain difficult-to-access spaces (near-millimetre and submillimetre-high gaps) and multiple domains (solid, liquid and even aerial). In this paper, we address these challenges by developing a class of Thin Soft Robots (TS-Robot: thickness, 1.7mm) that can access narrow spaces and perform cross-domain multimodal locomotion. We adopted a dual-actuation sandwich structure with a tuneable Poisson's ratio tensioning mechanism for developing the TS-Robots driven by dielectric elastomers, providing them with two types of gaits (linear and undulating), remarkable output force (~41 times their weight) and speed (1.16 times Body Length/s and 13.06 times Body Thickness/s). Here, we demonstrated that TS-Robots can crawl, climb, swim and collaborate for transitioning between domains in environments with narrow entries