Bayesian Analysis for Photolithographic Models

The use of optical proximity correction (OPC) as a resolution enhancement technique (RET) in microelectronic photolithographic manufacturing demands increasingly accurate models of the systems in use. Model building and inference techniques in the data science community have seen great strides in the past two decades in the field of Bayesian statistics. This work aims to demonstrate the predictive power of using Bayesian analysis as a method for parameter selection in lithographic models by probabilistically considering the uncertainty in physical model parameters and the wafer data used to calibrate them. We will consider the error between simulated and measured critical dimensions (CDs) as Student’s t-distributed random variables which will inform our likelihood function, via sums of log-probabilities, to maximize Bayes’ rule and generate posterior distributions for each parameter. Through the use of a Markov chain Monte Carlo (MCMC) algorithm, the model’s parameter space is explored to find the most credible parameter values. We use an affine invariant ensemble sampler (AIES) which instantiates many walkers which semi-independently explore the space in parallel, which lets us exploit the slow model evaluation time. Posterior predictive checks are used to analyze the quality of the models that use parameter values from their highest density intervals (HDIs). Finally, we explore the concept of model hierarchy, which is a flexible method of adding hyperparameters to the Bayesian model structure

Technology Directions for the 21st Century, volume 1

For several decades, semiconductor device density and performance have been doubling about every 18 months (Moore's Law). With present photolithography techniques, this rate can continue for only about another 10 years. Continued improvement will need to rely on newer technologies. Transition from the current micron range for transistor size to the nanometer range will permit Moore's Law to operate well beyond 10 years. The technologies that will enable this extension include: single-electron transistors; quantum well devices; spin transistors; and nanotechnology and molecular engineering. Continuation of Moore's Law will rely on huge capital investments for manufacture as well as on new technologies. Much will depend on the fortunes of Intel, the premier chip manufacturer, which, in turn, depend on the development of mass-market applications and volume sales for chips of higher and higher density. The technology drivers are seen by different forecasters to include video/multimedia applications, digital signal processing, and business automation. Moore's Law will affect NASA in the areas of communications and space technology by reducing size and power requirements for data processing and data fusion functions to be performed onboard spacecraft. In addition, NASA will have the opportunity to be a pioneering contributor to nanotechnology research without incurring huge expenses

Microelectromechanical Systems

Micro-electromechanical systems (MEMS) is an enabling technology that merges computation and communication with sensing and actuation to change the way people and machines interact with the physical world. MEMS is a manufacturing technology that will impact widespread applications including: miniature inertial measurement measurement units for competent munitions and personal navigation; distributed unattended sensors; mass data storage devices; miniature analytical instruments; embedded pressure sensors; non-invasive biomedical sensors; fiber-optics components and networks; distributed aerodynamic control; and on-demand structural strength. The long term goal of ARPA's MEMS program is to merge information processing with sensing and actuation to realize new systems and strategies for both perceiving and controlling systems, processes, and the environment. The MEMS program has three major thrusts: advanced devices and processes, system design, and infrastructure

UWB Technology

Ultra Wide Band (UWB) technology has attracted increasing interest and there is a growing demand for UWB for several applications and scenarios. The unlicensed use of the UWB spectrum has been regulated by the Federal Communications Commission (FCC) since the early 2000s. The main concern in designing UWB circuits is to consider the assigned bandwidth and the low power permitted for transmission. This makes UWB circuit design a challenging mission in today's community. Various circuit designs and system implementations are published in this book to give the reader a glimpse of the state-of-the-art examples in this field. The book starts at the circuit level design of major UWB elements such as filters, antennas, and amplifiers; and ends with the complete system implementation using such modules

Optofluidic plasmonic onchip nanosensor array for biodetection

Thesis (Ph.D.)--Boston UniversitySurface plasmon resonance (SPR) sensing has been demonstrated in the past decade to be the gold standard technique for biochemical interaction analysis, and plays an important role in drug discovery and biomedical research. The technique circumvents the need of fluorescence/radioactive tagging or enzymatic detection, enables ultrasensitive remote sensing, and quantitatively monitors bio-interaction in real time. Although SPR has these attractive features that can satisfy most research/clinic requirements, there still exist problems that limit its applications. First, the reflection geometry of the prism coupling scheme adds limitations for high throughput screening application. Additionally, SPR instrumentations are bulky and not suitable for point-of-care settings. Moreover, the SPR sensor is embedded in conventional micro-fluidic cells, in which the sensor performance is limited by inefficient analyte transport. Suspended plasmonic nanohole array (PNA) offers an opportunity to overcome these limitations. A collinear excitation/collection coupling scheme combined with the small footprint of PNA provides unique platform for multiplexing and system minimization. The suspended nanohole structure also offers a unique configuration to integrate nano-photonics with nano-fluidics. This thesis focuses on developing a lab-on-a-chip PNA platform for point-of-care bio-detection. To achieve this, we first demonstrate that the figure-of-merit of our PNA sensor surpasses that of the prism coupled SPR. We also show that the ultrasensitive label-free PNA sensor is able to directly detect intact viruses from biological media at clinically relevant concentrations with little sample preparation. We then present a plasmonic microarray with over one million PNA sensors on a microscope slide for high throughput screening applications. A dual-color filter imaging method is introduced to increase the accuracy, reliability, and signal-to-noise ratio in a highly multiplexed manner. Finally, we present a nanoplasmonic-nanofluidic platform enabling active delivery of analyte to the sensor. Sensor response time is reduced by an order of magnitude compared to the conventional flow scheme. A dynamic range spanning 5 orders of magnitude from 10^3 to 10^7 particles/mL is shown on this platform corresponding to analyte concentration sufficient for clinical applications. The proposed approach opens up opportunities of a lab-on-a-chip bio-detection system for drug screening, disease diagnostic as well as clinic studies

Magnetophoretic circuits for digital control of single particles and cells.

The ability to manipulate small fluid droplets, colloidal particles and single cells with the precision and parallelization of modern-day computer hardware has profound applications for biochemical detection, gene sequencing, chemical synthesis and highly parallel analysis of single cells. Drawing inspiration from general circuit theory and magnetic bubble technology, here we demonstrate a class of integrated circuits for executing sequential and parallel, timed operations on an ensemble of single particles and cells. The integrated circuits are constructed from lithographically defined, overlaid patterns of magnetic film and current lines. The magnetic patterns passively control particles similar to electrical conductors, diodes and capacitors. The current lines actively switch particles between different tracks similar to gated electrical transistors. When combined into arrays and driven by a rotating magnetic field clock, these integrated circuits have general multiplexing properties and enable the precise control of magnetizable objects

Integration of optical interconnections and optoelectronic components in flexible substrates

Licht als informatiedrager voor datacommunicatie kende een ongezien succes in de laatste decennia. Wegens de lage verliezen en hoge datasnelheden hebben ze voor het overbruggen van lange afstanden hun elektrische tegenhangers reeds geruime tijd verdrongen. Deze trend zet zich ook voort voor korte afstand communicatie op printplaten. Naast zijn functie als informatiedrager, wordt licht ook gebruikt om een waaier aan fysische grootheden te meten. Ook hier heeft licht enkele significante voordelen t.o.v elektrische informatiedragers, waardoor optische sensoren wijdverspreid zijn. Een tweede duidelijke trend binnen de elektronica is het gebruik van flexibele printkaarten. Deze zijn veel dunner, lichter en betrouwbaarder dan de klassieke harde printkaarten, waardoor ze uiterst geschikt zijn voor draagbare toepassingen waar compactheid en een laag gewicht hoge vereisten zijn. De flexibiliteit van de printplaten laat ook toe hen te gebruiken op onvlakke oppervlakken en op bewegende onderdelen. Het doel van het gepresenteerde doctoraatswerk is de ontwikkeling van een nieuw technologieplatform dat bovengenoemde trends combineert. Alle bouwblokken van optische communicatie, gaande van actieve opto-elektronische componenten, aanstuurelektronica, golfgeleiderbaantjes en galvanische verbindingen tot optische koppelstructuren tussen de verschillende bouwblokken, worden zodanig gerealiseerd dat elke component flexibel is en geïntegreerd wordt in een dunne folie met een dikte van slechts 150µm. Op die manier bekomen we een flexibele folie met alle passieve en actieve onderdelen voor optische communicatie geïntegreerd met enkel een elektrische interface naar de buitenwereld, wat de aanvaarding en toepassing van deze technologie in de huidige elektronica aanzienlijk kan versnellen. Binnen het doctoraatswerk werden alle voorgestelde technologieën en processen gerealiseerd en geoptimaliseerd. Bovendien werden de optische verliezen, warmteaspecten, hoogfrequent gedrag, mechanisch gedrag en betrouwbaarheid van de technologie gekarakteriseerd en vergeleken met de huidige state-of-the-art

Microlens Array Fabrication Technique and its Application in Surface Nanopatterning

Ph.DDOCTOR OF PHILOSOPH

Implantable Nanofluidic Membrane and Smart Electronic System for Drug Release Control

L'abstract è presente nell'allegato / the abstract is in the attachmen

Microfabricated Ion Traps

Ion traps offer the opportunity to study fundamental quantum systems with high level of accuracy highly decoupled from the environment. Individual atomic ions can be controlled and manipulated with electric fields, cooled to the ground state of motion with laser cooling and coherently manipulated using optical and microwave radiation. Microfabricated ion traps hold the advantage of allowing for smaller trap dimensions and better scalability towards large ion trap arrays also making them a vital ingredient for next generation quantum technologies. Here we provide an introduction into the principles and operation of microfabricated ion traps. We show an overview of material and electrical considerations which are vital for the design of such trap structures. We provide guidance in how to choose the appropriate fabrication design, consider different methods for the fabrication of microfabricated ion traps and discuss previously realized structures. We also discuss the phenomenon of anomalous heating of ions within ion traps, which becomes an important factor in the miniaturization of ion traps