Ambient temperature-gradient compensated low-drift thermopile flow sensor

A highly-sensitive thermal flow sensor for liquid flow with nl-min-1 resolution has been realised. The sensor consists of freely-suspended silicon-rich silicon-nitride microchannels with integrated Al heater resistors and Al/poly-Si++ thermopiles. The influence of drift in the thin-film metal resistors is effectively eliminated by using thermopiles combined with an adequate measurement method, where the power in the heater resistors is controlled, e.g. constant-power calorimetric method or temperature balancing method. The special meandering layout of the microchannels and the placement of thermopile junctions increases sensitivity by summing the thermopile voltages due to convection by fluid flow, whereas the influence of ambient temperature gradients is compensated for

Precise measurement of gas volumes by means of low-offset MEMS flow sensors with µL/min resolution

Experiments devoted to evaluate the performance of a MEMS thermal flow sensor in measuring gas volumes are described. The sensor is a single-chip platform, including several sensing structures and a low-offset, low-noise readout interface. A recently proposed offset compensation approach is implemented obtaining low temperature drift and excellent long time stability. The sensor is fabricated by applying a simple micromachining procedure to a chip produced using the BCD6s process of STMicroelectronics. Application of a gas conveyor allowed inclusion of the sensing structure into a channel of sub-millimeter cross-section. The results of measurements performed by making controlled air volumes pass through the sensor channel in both directions at rates from 0.1 to 5 mL/min are described

DESIGN OF SMART SENSORS FOR DETECTION OF PHYSICAL QUANTITIES

Microsystems and integrated smart sensors represent a flourishing business thanks to the manifold benefits of these devices with respect to their respective macroscopic counterparts. Miniaturization to micrometric scale is a turning point to obtain high sensitive and reliable devices with enhanced spatial and temporal resolution. Power consumption compatible with battery operated systems, and reduced cost per device are also pivotal for their success. All these characteristics make investigation on this filed very active nowadays. This thesis work is focused on two main themes: (i) design and development of a single chip smart flow-meter; (ii) design and development of readout interfaces for capacitive micro-electro-mechanical-systems (MEMS) based on capacitance to pulse width modulation conversion. High sensitivity integrated smart sensors for detecting very small flow rates of both gases and liquids aiming to fulfil emerging demands for this kind of devices in the industrial to environmental and medical applications. On the other hand, the prototyping of such sensor is a multidisciplinary activity involving the study of thermal and fluid dynamic phenomenon that have to be considered to obtain a correct design. Design, assisted by finite elements CAD tools, and fabrication of the sensing structures using features of a standard CMOS process is discussed in the first chapter. The packaging of fluidic sensors issue is also illustrated as it has a great importance on the overall sensor performances. The package is charged to allow optimal interaction between fluids and the sensors and protecting the latter from the external environment. As miniaturized structures allows a great spatial resolution, it is extremely challenging to fabricate low cost packages for multiple flow rate measurements on the same chip. As a final point, a compact anemometer prototype, usable for wireless sensor network nodes, is described. The design of the full custom circuitry for signal extraction and conditioning is coped in the second chapter, where insights into the design methods are given for analog basic building blocks such as amplifiers, transconductors, filters, multipliers, current drivers. A big effort has been put to find reusable design guidelines and trade-offs applicable to different design cases. This kind of rational design enabled the implementation of complex and flexible functionalities making the interface circuits able to interact both with on chip sensors and external sensors. In the third chapter, the chip floor-plan designed in the STMicroelectronics BCD6s process of the entire smart flow sensor formed by the sensing structures and the readout electronics is presented. Some preliminary tests are also covered here. Finally design and implementation of very low power interfaces for typical MEMS capacitive sensors (accelerometers, gyroscopes, pressure sensors, angular displacement and chemical species sensors) is discussed. Very original circuital topologies, based on chopper modulation technique, will be illustrated. A prototype, designed within a joint research activity is presented. Measured performances spurred the investigation of new techniques to enhance precision and accuracy capabilities of the interface. A brief introduction to the design of active pixel sensors interface for hybrid CMOS imagers is sketched in the appendix as a preliminary study done during an internship in the CNM-IMB institute of Barcelona

Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

Flow sensors are the key elements in most systems for monitoring and controlling fluid flows. With the introduction of MEMS thermal flow sensors, unprecedented performances, such as ultra wide measurement ranges, low power consumptions and extreme miniaturization, have been achieved, although several critical issues have still to be solved. In this work, a systematic approach to the design of integrated thermal flow sensors, with specification of resolution, dynamic range, power consumption and pressure insertion loss is proposed. All the critical components of the sensors, namely thermal microstructure, package and read-out interface are examined, showing their impact on the sensor performance and indicating effective optimization strategies. The proposed design procedures are supported by experiments performed using a recently developed test chip,including several different sensing structures and a flexible electronic interface

Automatic compensation of pressure effects on smart flow sensors in the analog and digital domain

Two different approaches for the automatic compensation of pressure effects on thermal flow sensors are investigated. One approach operates in the analog domain and it is based on a closed-loop circuit that uses a pressure dependent signal to keep the sensor output constant. The digital approach operates in an open loop fashion and is capable of producing also a pressure reading. The effectiveness of the proposed methods has been verified by means of a smart flow sensor integrating on the same chip the sensing structures and a configurable electronic interface performing signal reading and non idealities compensation. The chip has been designed with a commercial CMOS process and fabricated by means of a post-processing technique. The experimental results performed in nitrogen confirm that both methods are capable of reducing the sensitivity of the flow sensor output signal to pressure variation

Earth radiation budget measurement from a spinning satellite: Conceptual design of detectors

The conceptual design, sensor characteristics, sensor performance and accuracy, and spacecraft and orbital requirements for a spinning wide-field-of-view earth energy budget detector were investigated. The scientific requirements for measurement of the earth's radiative energy budget are presented. Other topics discussed include the observing system concept, solar constant radiometer design, plane flux wide FOV sensor design, fast active cavity theory, fast active cavity design and error analysis, thermopile detectors as an alternative, pre-flight and in-flight calibration plane, system error summary, and interface requirements

Acceleration of the measurement time of thermopiles using sigma-delta control

This work presents a double sliding mode control designed for accelerating the measurement of heat fluxes using thermopiles. The slow transient response generated in the thermopile, when it is placed in contact with the surface to be measured, is due to the changes in the temperature distributions that this operation triggers. It is shown that under some conditions the proposed controls keep the temperature distribution of the whole system constant and that changes in the heat flux at the thermopile are almost instantaneously compensated by the controls. One-dimensional simulations and experimental results using a commercial thermopile, showing the goodness of the proposed approach, are presented. A first rigorous analysis of the control using the Sliding Mode Control and Diffusive Representation theories is also made.Peer ReviewedPostprint (published version

Prototype of a Hand-Held RF Dosimeter Based on 8-Bit Processor and an Integrated Temperature Sensor

School of Electrical and Computer Engineerin