Discrete Modeling and Sliding Mode Control of Piezoelectric Actuators

With the ability to generate fine displacements with a resolution down to sub-nanometers, piezoelectric actuators (PEAs) have found wide applications in various nano-positioning systems. However, existence of various effects in PEAs, such as hysteresis and creep, as well as dynamics can seriously degrade the PEA performance or even lead to instability. This raises a great need to model and control PEAs for improved performance, which have drawn remarkable attention in the literature. Sliding mode control (SMC) shows its potential to the control of PEA, by which the hysteresis and other nonlinear effects can be regard as disturbance to the dynamic model and thus rejected or compensated by its switching control. To implement SMC in digital computers, this research is aimed at developing novel discrete models and discrete SMC (DSMC)-based control schemes for PEAs, along with their experimental validation. The first part of this thesis concerns with the modeling and control of one-degree of freedom (DOF) PEA, which can be treated as a single-input-single-output (SISO) system. Specifically, a novel discrete model based on the concept of auto-regressive moving average (ARMA) was developed for the PEA hysteresis; and to compensate for the PEA hysteresis and improve its dynamics, an output tracking integrated discrete proportional-integral-derivative-based SMC (PID-SMC) was developed. On this basis, by making use of the availability of PEA hysteresis models, two control schemes, named “the discrete inversion feedforward based PID-SMC” and “the discrete disturbance observer (DOB)-based PID-SMC”, were further developed. To illustrate the effectiveness of the developed models and control schemes, experiments were designed and conducted on a commercially available one-DOF PEA, as compared with the existing ones. The second part of the thesis presents the extension of the developed modeling and control methods to multi-DOF PEAs. Given the fact that details with regard to the PEA internal configurations is not typically provided by the manufacturer, a state space model based on the black box system identification was developed for the three-DOF PEA. The developed model was then integrated in the output tracking based discrete PID-SMC, with its effectiveness verified through the experiments on a commercially available three-DOF PEA. The superiority of the proposed control method over the conventional PID controller was also experimentally investigated and demonstrated. Finally, by integrating with a DOB in the discrete PID-based SMC, a novel control scheme is resulted to compensate for the nonlinearities of the three-DOF PEA. To verify its effectiveness, the discrete DOB based PID-SMC was applied in the control experiments and compared with the existing SMC. The significance of this research lies in the development of the discrete models and PID-based SMC for PEAs, which is of great help to improve their performance. The successful application of the proposed method in the control of multi-DOF PEA allows the application of SMC to the control of complicated multi-inputs-multi-outputs (MIMO) systems without details regarding the internal configuration. Also, integration of the inversion based feedforward control and the DOB in the SMC design has been proven effective for the tracking control of PEAs

Modeling and Control of Piezoelectric Actuators

Piezoelectric actuators (PEAs) utilize the inverse piezoelectric effect to generate fine displacement with a resolution down to sub-nanometers and as such, they have been widely used in various micro- and nanopositioning applications. However, the modeling and control of PEAs have proven to be challenging tasks. The main difficulties lie in the existence of various nonlinear or difficult-to-model effects in PEAs, such as hysteresis, creep, and distributive vibration dynamics. Such effects can seriously degrade the PEA tracking control performances or even lead to instability. This raises a great need to model and control PEAs for improved performance. This research is aimed at developing novel models for PEAs and on this basis, developing model-based control schemes for the PEA tracking control taking into account the aforementioned nonlinear effects. In the first part of this research, a model of a PEA for the effects of hysteresis, creep, and vibration dynamics was developed. Notably, the widely-used Preisach hysteresis model cannot represent the one-sided hysteresis of PEAs. To overcome this shortcoming, a rate-independent hysteresis model based on a novel hysteresis operator modified from the Preisach hysteresis operator was developed, which was then integrated with the models of creep and vibration dynamics to form a comprehensive model for PEAs. For its validation, experiments were carried out on a commercially-available PEA and the results obtained agreed with those from model simulations. By taking into account the linear dynamics and hysteretic behavior of the PEA as well as the presliding friction between the moveable platform and the end-effector, a model of the piezoelectric-driven stick-slip (PDSS) actuator was also developed in the first part of the research. The effectiveness of the developed model was illustrated by the experiments on the PDSS actuator prototyped in the author's lab. In the second part of the research, control schemes were developed based on the aforementioned PEA models for tracking control of PEAs. Firstly, a novel PID-based sliding mode (PIDSM) controller was developed. The rational behind the use of a sliding mode (SM) control is that the SM control can effectively suppress the effects of matched uncertainties, while the PEA hysteresis, creep, and external load can be represented by a lumped matched uncertainty based on the developed model. To solve the chattering and steady-state problems, associated with the ideal SM control and the SM control with boundary layer (SMCBL), the novel PIDSM control developed in the present study replaces the switching control term in the ideal SM control schemes with a PID regulator. Experiments were carried out on a commercially-available PEA and the results obtained illustrate the effectiveness of the PIDSM controller, and its superiorities over other schemes of PID control, ideal SM control, and the SMCBL in terms of steady state error elimination, chattering suppression, and tracking error suppression. Secondly, a PIDSM observer was also developed based on the model of PEAs to provide the PIDSM controller with state estimates of the PEA. And the PIDSM controller and the PIDSM observer were combined to form an integrated control scheme (PIDSM observer-controller or PIDSMOC) for PEAs. The effectiveness of the PIDSM observer and the PIDSMOC were also validated experimentally. The superiority of the PIDSMOC over the PIDSM controller with σ-β filter control scheme was also analyzed and demonstrated experimentally. The significance of this research lies in the development of novel models for PEAs and PDSS actuators, which can be of great help in the design and control of such actuators. Also, the development of the PIDSM controller, the PIDSM observer, and their integrated form, i.e., PIDSMOC, enables the improved performance of tracking control of PEAs with the presence of various nonlinear or difficult-to-model effects

Model reference control for ultra-high precision positioning systems

Due to the increasing demands of high-density semiconductors, molecular biology, optoelectronics, and MEMS/NEMS in the past decades, control of ultra-high precision positioning using piezoelectricity has become an important area because of its high displacement resolution, wide bandwidth, low power consumption, and potential low cost. However, the relatively small displacement range limits its application. This work proposed a practical ultra-high precision piezoelectric positioning system with a complementary high displacement range actuation technology. Solenoids are low cost, high speed electromagnetic actuators which are commonly used in on-off mode only because of the inherent high nonlinear force-stroke characteristics and unipolar forces (push/pull) generated by the magnetic fields. In this work, an integrated positioning system based on a monolithic piezoelectric positioner and a set of push-pull dual solenoid actuators is designed for high speed and high precision positioning applications. The overall resolution can be sub-nanometer while the moving range is in millimeters, a three order of magnitude increase from using piezoelectric positioner alone. The dynamic models of the dual solenoid actuator and piezoelectric nanopositioner are derived. The main challenge of designing such positioning systems is to maintain the accuracy and stability in the presence of un-modeled dynamics, plant variations, and parasitic nonlinearities, specifically in this work, the friction and forcestroke nonlinearities of the dual solenoid actuator, and the friction, hysteresis and coupling effects of piezoelectric actuator, which are impossible to be modeled accurately and even time-varying. A model reference design approach is presented to attenuate linear as well as nonlinear uncertainties, with a fixed order controller augmenting a reference model that embeds the nominal dynamics of the plant. To improve transient characteristics, a Variable Model Reference Zero Vibration (VMRZV) control is also proposed to stabilize the system and attenuate the adverse effect of parasitic nonlinearities of micro-/nano- positioning actuators and command-induced vibrations. The speed of the ultra-high precision system with VMRZV control can also be quantitatively adjusted by systematically varying the reference model. This novel control method improves the robustness and performance significantly. Preliminary experimental data on dual solenoid system confirm the feasibility of the proposed method

Simultaneous use of Piezoelectric Transducer as Actuator and Sensor in real-time applications

The role of piezoelectric actuators in application at micro and nano scale has been growing over the past three decades. Piezoelectric actuators have high displacement resolution and large bandwidth, therefore they are used in micro and nano scale control applications. Despite enormous research and development, there are challenges in the control of piezoelectric actuators - mainly due to the intrinsic non-linear properties of hysteresis, creep and external conditions dependant complex dielectric properties of piezoelectric material. A more recent development in the control of piezoelectric actuators is simultaneous actuation and sensing of piezoelectric actuators - also called as self-sensing. In this thesis the challenge of simultaneous use of piezoelectric material as actuator and sensor is addressed. A novel method for determining the actuator strain is proposed and experimentally tested. The thesis proposal is to assume a piezoelectric stack actuator as a parallel plate capacitor and to estimate the strain/displacement of the actuator from its capacitance. The capacitance signal is intended to be used as a feedback signal for displacement control purpose. The thesis work started from the scratch - where the proposal was very unclear and needed to be studied and tested experimentally. For experiments a test setup was needed which was designed and built in a clean room environment. In the test setup capacitance of the actuator was measured. A relationship between strain and capacitance was studied from the experimental data. For capacitance measurement a simple low-noise electric circuit based on Op-Amps was designed and built. Whereas strain of the actuator was measured using an interferometer (laser sensor). Charge amplifier was used to give the control signal to the actuator. The capacitance and strain data were acquired using Speedgoat hardware and analyzed in xPC target environment of Matlab. Results show that there exists hysteresis in the capacitance-strain graph, even when the control signal is provided from a charge amplifier. Piezoelectric actuator cannot be modelled as a parallel plate capacitor, due to the fact that piezoelectric material has complex dielectric properties which are control signal's amplitude and frequency dependant and that the resistance of the actuator changes with the strain as well

Inversion-based feedforward-feedback control: theory and implementation to high-speed atomic force microscope imaging

In this dissertation, a suite of inversion-based feedforward-feedback control techniques are developed and applied to achieve high speed AFM imaging. In the last decade, great efforts have been made in developing the inversion-based feedforward control as an effective approach for precision output tracking. Such efforts are facilitated by the fruitful results obtained in the stable-inversion theory, including, mainly, the bounded inverse of nonminimum-phase systems, the preview-based inversion method that quantified the effect of the future desired trajectory on the inverse input, the consideration of the model uncertainties in the system inverse, and the integration of inversion with feedback and iterative control. However, challenges still exist in those inversion-based approaches. For example, although it has been shown that the inversion-based iterative control (IIC) technique can effectively compensate for the vibrational dynamics during the output tracking in the repetitive applications, however, compensating for both the hysteresis effect and the dynamics effect simultaneously using the IIC approach has not been established yet. Moreover, the current design of the inversion-based feedforward feedback two-degree-of-freedom (2DOF) controller is ad-hoc, and the minimization of the model uncertainty effects on the feedforward control has not been addressed. Furthermore, although it is possible to combine system inversion with both iterative learning and feedback control in the so-called current cycle feedback iterative learning control (CCF-ILC) approach, the current controller design is limited to be casual and the use of such CCF-ILC approach for rejecting slowly varying periodic disturbance has not been explored. These challenges, as magnified in applications such as high-speed AFM imaging, motivate the research of this dissertation. Particularly, it is shown that the IIC approach can effectively compensate for both the hysteresis and vibrational dynamics effects of smart actuators. The convergence of the IIC algorithm is investigated by capturing the input-output behavior of piezo actuators with a cascade model consisting of a rate-independent hysteresis at the input followed by the dynamics part of the system. The size of the hysteresis and the vibrational dynamics variations that can be compensated for (by using the IIC method) has been quantified. Secondly, a novel robust-inversion has been developed for single-input-single-output (SISO) LTI systems, which minimized the dynamics uncertainty effect and obtained a guaranteed tracking performance for bounded dynamics uncertainties. Based on the robust-inversion approach, a systematic design of inversion-based two-degree-of-freedom (2DOF)-control was developed. Finally, the robust inversion- based current cycle feedback iterative learning control approach was developed for the rejection of slow varying periodic disturbances. The proposed CCF-ILC controller design utilizes the recently-developed robust-inversion technique to minimize the model uncertainty effect on the feedforward control, as well as to remove the causality constraints in other CCFILC approaches. It is shown that the iterative law converges, and attains a bounded tracking error upon noise and disturbances. In this dissertation, these techniques have been successfully implemented to achieve high-speed AFM imaging of large-size samples. Specifically, it is shown that precision positioning of the probe in the AFM lateral (x-y) scanning can be successfully achieved by using the inversion-based iterative-control (IIC) techniques and robust-inversion based 2DOF control design approach. The AFM imaging speed as well as the sample estimation can be substantially improved by using the CCF-ILC approach for the precision positioning of the probe in the vertical direction

Performance-driven control of nano-motion systems

The performance of high-precision mechatronic systems is subject to ever increasing demands regarding speed and accuracy. To meet these demands, new actuator drivers, sensor signal processing and control algorithms have to be derived. The state-of-the-art scientific developments in these research directions can significantly improve the performance of high-precision systems. However, translation of the scientific developments to usable technology is often non-trivial. To improve the performance of high-precision systems and to bridge the gap between science and technology, a performance-driven control approach has been developed. First, the main performance limiting factor (PLF) is identified. Then, a model-based compensation method is developed for the identified PLF. Experimental validation shows the performance improvement and reveals the next PLF to which the same procedure is applied. The compensation method can relate to the actuator driver, the sensor system or the control algorithm. In this thesis, the focus is on nano-motion systems that are driven by piezo actuators and/or use encoder sensors. Nano-motion systems are defined as the class of systems that require velocities ranging from nanometers per second to millimeters per second with a (sub)nanometer resolution. The main PLFs of such systems are the actuator driver, hysteresis, stick-slip effects, repetitive disturbances, coupling between degrees-of-freedom (DOFs), geometric nonlinearities and quantization errors. The developed approach is applied to three illustrative experimental cases that exhibit the above mentioned PLFs. The cases include a nano-motion stage driven by a walking piezo actuator, a metrological AFM and an encoder system. The contributions of this thesis relate to modeling, actuation driver development, control synthesis and encoder sensor signal processing. In particular, dynamic models are derived of the bimorph piezo legs of the walking piezo actuator and of the nano-motion stage with the walking piezo actuator containing the switching actuation principle, stick-slip effects and contact dynamics. Subsequently, a model-based optimization is performed to obtain optimal drive waveforms for a constant stage velocity. Both the walking piezo actuator and the AFM case exhibit repetitive disturbances with a non-constant period-time, for which dedicated repetitive control methods are developed. Furthermore, control algorithms have been developed to cope with the present coupling between and hysteresis in the different axes of the AFM. Finally, sensor signal processing algorithms have been developed to cope with the quantization effects and encoder imperfections in optical incremental encoders. The application of the performance-driven control approach to the different cases shows that the different identified PLFs can be successfully modeled and compensated for. The experiments show that the performance-driven control approach can largely improve the performance of nano-motion systems with piezo actuators and/or encoder sensors

High-speed atomic force microscopy for nano-visualization of dynamic biomolecular processes

金沢大学理工研究域数物科学系The atomic force microscope (AFM) has a unique capability of allowing the high-resolution imaging of biological samples on substratum surfaces in physiological solutions. Recent technological progress of AFM in biological research has resulted in remarkable improvements in both the imaging rate and the tip force acting on the sample. These improvements have enabled the direct visualization of dynamic structural changes and dynamic interactions occurring in individual biological macromolecules, which is currently not possible with other techniques. Therefore, high-speed AFM is expected to have a revolutionary impact on biological sciences. In addition, the recently achieved atomic-resolution in liquids will further expand the usefulness of AFM in biological research. In this article, we first describe the various capabilities required of AFM in biological sciences, which is followed by a detailed description of various devices and techniques developed for high-speed AFM and atomic-resolution in-liquid AFM. We then describe various imaging studies performed using our cutting-edge microscopes and their current capabilities as well as their limitations, and conclude by discussing the future prospects of AFM as an imaging tool in biological research. © 2008 Elsevier Ltd. All rights reserved

Precision Control of Piezo Electric Actuator

芝浦工業大学201