The LISA pathfinder mission

ISA Pathfinder (LPF), the second of the European Space Agency's Small Missions for Advanced Research in Technology (SMART), is a dedicated technology validation mission for future spaceborne gravitational wave detectors, such as the proposed eLISA mission. LISA Pathfinder, and its scientific payload - the LISA Technology Package - will test, in flight, the critical technologies required for low frequency gravitational wave detection: it will put two test masses in a near-perfect gravitational free-fall and control and measure their motion with unprecedented accuracy. This is achieved through technology comprising inertial sensors, high precision laser metrology, drag-free control and an ultra-precise micro-Newton propulsion system. LISA Pathfinder is due to be launched in mid-2015, with first results on the performance of the system being available 6 months thereafter. The paper introduces the LISA Pathfinder mission, followed by an explanation of the physical principles of measurement concept and associated hardware. We then provide a detailed discussion of the LISA Technology Package, including both the inertial sensor and interferometric readout. As we approach the launch of the LISA Pathfinder, the focus of the development is shifting towards the science operations and data analysis - this is described in the final section of the paper

CAPACITANCE METROLOGY OF CURVED SURFACES: STUDY AND CHARACTERIZATION OF A NOVEL PROBE DESIGN

Capacitive sensors are frequently applied to curved target surfaces for precision displacement measurements. In most cases, these sensors have not been recalibrated to take the curvature of the target into consideration. This recalibration becomes more critical as the target surface becomes smaller in comparison to the sensor. Calibration data are presented for a variety of capacitance probe sizes with widely varying geometries. One target surface particularly difficult to characterize is the inner surface of small holes, less than one millimeter in diameter. Although contact probes can successfully measure the inner surface of a hole, these probes are often fragile and require additional sensors to determine when contact occurs. Probes may adhere to the wall of the hole, and only a small number of data points are collected. Direct capacitance measurement of small holes requires a completely new capacitance probe geometry and method of operation. A curved, elongated surface minimizes the gap between the sensor surface and the inner surface of the hole. Reduction in the size of the sensing area is weighed against electronics limitations. The performance of a particular probe geometry is studied using computer simulations to determine the optimal probe design. Multiple, overlapping passes are deconvolved to reveal finer features on the surface of the hole. A prototype sub-millimeter capacitance probe is machined from tungsten carbide, with four additional material layers added using ebeam deposition. Several techniques are studied to remove these layers and create a sensing area along one side of the probe. Both mechanical processes and photolithography are employed

Design, control and error analysis of a fast tool positioning system for ultra-precision machining of freeform surfaces

This thesis was previously held under moratorium from 03/12/19 to 03/12/21Freeform surfaces are widely found in advanced imaging and illumination systems, orthopaedic implants, high-power beam shaping applications, and other high-end scientific instruments. They give the designers greater ability to cope with the performance limitations commonly encountered in simple-shape designs. However, the stringent requirements for surface roughness and form accuracy of freeform components pose significant challenges for current machining techniques—especially in the optical and display market where large surfaces with tens of thousands of micro features are to be machined. Such highly wavy surfaces require the machine tool cutter to move rapidly while keeping following errors small. Manufacturing efficiency has been a bottleneck in these applications. The rapidly changing cutting forces and inertial forces also contribute a great deal to the machining errors. The difficulty in maintaining good surface quality under conditions of high operational frequency suggests the need for an error analysis approach that can predict the dynamic errors. The machining requirements also impose great challenges on machine tool design and the control process. There has been a knowledge gap on how the mechanical structural design affects the achievable positioning stability. The goal of this study was to develop a tool positioning system capable of delivering fast motion with the required positioning accuracy and stiffness for ultra-precision freeform manufacturing. This goal is achieved through deterministic structural design, detailed error analysis, and novel control algorithms. Firstly, a novel stiff-support design was proposed to eliminate the structural and bearing compliances in the structural loop. To implement the concept, a fast positioning device was developed based on a new-type flat voice coil motor. Flexure bearing, magnet track, and motor coil parameters were designed and calculated in detail. A high-performance digital controller and a power amplifier were also built to meet the servo rate requirement of the closed-loop system. A thorough understanding was established of how signals propagated within the control system, which is fundamentally important in determining the loop performance of high-speed control. A systematic error analysis approach based on a detailed model of the system was proposed and verified for the first time that could reveal how disturbances contribute to the tool positioning errors. Each source of disturbance was treated as a stochastic process, and these disturbances were synthesised in the frequency domain. The differences between following error and real positioning error were discussed and clarified. The predicted spectrum of following errors agreed with the measured spectrum across the frequency range. It is found that the following errors read from the control software underestimated the real positioning errors at low frequencies and overestimated them at high frequencies. The error analysis approach thus successfully revealed the real tool positioning errors that are mingled with sensor noise. Approaches to suppress disturbances were discussed from the perspectives of both system design and control. A deterministic controller design approach was developed to preclude the uncertainty associated with controller tuning, resulting in a control law that can minimize positioning errors. The influences of mechanical parameters such as mass, damping, and stiffness were investigated within the closed-loop framework. Under a given disturbance condition, the optimal bearing stiffness and optimal damping coefficients were found. Experimental positioning tests showed that a larger moving mass helped to combat all disturbances but sensor noise. Because of power limits, the inertia of the fast tool positioning system could not be high. A control algorithm with an additional acceleration-feedback loop was then studied to enhance the dynamic stiffness of the cutting system without any need for large inertia. An analytical model of the dynamic stiffness of the system with acceleration feedback was established. The dynamic stiffness was tested by frequency response tests as well as by intermittent diamond-turning experiments. The following errors and the form errors of the machined surfaces were compared with the estimates provided by the model. It is found that the dynamic stiffness within the acceleration sensor bandwidth was proportionally improved. The additional acceleration sensor brought a new error source into the loop, and its contribution of errors increased with a larger acceleration gain. At a certain point, the error caused by the increased acceleration gain surpassed other disturbances and started to dominate, representing the practical upper limit of the acceleration gain. Finally, the developed positioning system was used to cut some typical freeform surfaces. A surface roughness of 1.2 nm (Ra) was achieved on a NiP alloy substrate in flat cutting experiments. Freeform surfaces—including beam integrator surface, sinusoidal surface, and arbitrary freeform surface—were successfully machined with optical-grade quality. Ideas for future improvements were proposed in the end of this thesis.Freeform surfaces are widely found in advanced imaging and illumination systems, orthopaedic implants, high-power beam shaping applications, and other high-end scientific instruments. They give the designers greater ability to cope with the performance limitations commonly encountered in simple-shape designs. However, the stringent requirements for surface roughness and form accuracy of freeform components pose significant challenges for current machining techniques—especially in the optical and display market where large surfaces with tens of thousands of micro features are to be machined. Such highly wavy surfaces require the machine tool cutter to move rapidly while keeping following errors small. Manufacturing efficiency has been a bottleneck in these applications. The rapidly changing cutting forces and inertial forces also contribute a great deal to the machining errors. The difficulty in maintaining good surface quality under conditions of high operational frequency suggests the need for an error analysis approach that can predict the dynamic errors. The machining requirements also impose great challenges on machine tool design and the control process. There has been a knowledge gap on how the mechanical structural design affects the achievable positioning stability. The goal of this study was to develop a tool positioning system capable of delivering fast motion with the required positioning accuracy and stiffness for ultra-precision freeform manufacturing. This goal is achieved through deterministic structural design, detailed error analysis, and novel control algorithms. Firstly, a novel stiff-support design was proposed to eliminate the structural and bearing compliances in the structural loop. To implement the concept, a fast positioning device was developed based on a new-type flat voice coil motor. Flexure bearing, magnet track, and motor coil parameters were designed and calculated in detail. A high-performance digital controller and a power amplifier were also built to meet the servo rate requirement of the closed-loop system. A thorough understanding was established of how signals propagated within the control system, which is fundamentally important in determining the loop performance of high-speed control. A systematic error analysis approach based on a detailed model of the system was proposed and verified for the first time that could reveal how disturbances contribute to the tool positioning errors. Each source of disturbance was treated as a stochastic process, and these disturbances were synthesised in the frequency domain. The differences between following error and real positioning error were discussed and clarified. The predicted spectrum of following errors agreed with the measured spectrum across the frequency range. It is found that the following errors read from the control software underestimated the real positioning errors at low frequencies and overestimated them at high frequencies. The error analysis approach thus successfully revealed the real tool positioning errors that are mingled with sensor noise. Approaches to suppress disturbances were discussed from the perspectives of both system design and control. A deterministic controller design approach was developed to preclude the uncertainty associated with controller tuning, resulting in a control law that can minimize positioning errors. The influences of mechanical parameters such as mass, damping, and stiffness were investigated within the closed-loop framework. Under a given disturbance condition, the optimal bearing stiffness and optimal damping coefficients were found. Experimental positioning tests showed that a larger moving mass helped to combat all disturbances but sensor noise. Because of power limits, the inertia of the fast tool positioning system could not be high. A control algorithm with an additional acceleration-feedback loop was then studied to enhance the dynamic stiffness of the cutting system without any need for large inertia. An analytical model of the dynamic stiffness of the system with acceleration feedback was established. The dynamic stiffness was tested by frequency response tests as well as by intermittent diamond-turning experiments. The following errors and the form errors of the machined surfaces were compared with the estimates provided by the model. It is found that the dynamic stiffness within the acceleration sensor bandwidth was proportionally improved. The additional acceleration sensor brought a new error source into the loop, and its contribution of errors increased with a larger acceleration gain. At a certain point, the error caused by the increased acceleration gain surpassed other disturbances and started to dominate, representing the practical upper limit of the acceleration gain. Finally, the developed positioning system was used to cut some typical freeform surfaces. A surface roughness of 1.2 nm (Ra) was achieved on a NiP alloy substrate in flat cutting experiments. Freeform surfaces—including beam integrator surface, sinusoidal surface, and arbitrary freeform surface—were successfully machined with optical-grade quality. Ideas for future improvements were proposed in the end of this thesis

Advanced sensors technology survey

This project assesses the state-of-the-art in advanced or 'smart' sensors technology for NASA Life Sciences research applications with an emphasis on those sensors with potential applications on the space station freedom (SSF). The objectives are: (1) to conduct literature reviews on relevant advanced sensor technology; (2) to interview various scientists and engineers in industry, academia, and government who are knowledgeable on this topic; (3) to provide viewpoints and opinions regarding the potential applications of this technology on the SSF; and (4) to provide summary charts of relevant technologies and centers where these technologies are being developed

Design, manufacture and test of a magnetic encoder

An new eddy current based magnetic position encoder structure is proposed and studied in this thesis. The encoder is composed of one read head and one scale with metal plates placed periodically on a substrate. The read head contains one emitter and two receiver pairs which are all rectangular planar coils. The electromagnetic coupling between the emitter and receivers were affected by the relative position of the scale. A system level analytical model of the proposed encoder structure has been derived, from which three different encoder signals forms were generated. An amplification and synchronous demodulation circuit has been designed and fabricated. The circuit board was used successfully to process the encoder output signals in the measurement. Four PCB encoder prototypes were fabricated. These encoder structures were studied using the ANSYS MaxwellTM software package. The simulated and measured results were compared. The best accuracy performance of the PCB encoder is -15 μm to 15 μm from the simulation results and -35 μm to 25 μm from the corresponding measurement. An alternative manufacturing process of the magnetic encoder based on multilayer Low Temperature Co-fired Ceramic (LTCC) technology has also been presented. The fabrication process of the LTCC encoder and equipment used were described. Two different methods were used to characterise the LTCC encoder with good agreement between all approaches attempted. The best accuracy performance of the LTCC encoder was -30 μm to 25 μm and after lookup table correction the improved accuracy ranged from -10 μm to 10 μm

A 2 degree-of-freedom SOI-MEMS translation stage with closed loop positioning

This research contains the design, analysis, fabrication, and characterization of a closed loop XY micro positioning stage. The XY micro positioning stage is developed by adapting parallel-kinematic mechanisms, which have been widely used for macro and meso scale positioning systems, to silicon-based micropositioner. Two orthogonal electrostatic comb drives are connected to moving table through 4-bar mechanism and independent hinges which restrict unwanted rotation in 2-degree-of-freedom translational stage. The XY micro positioning stage is fabricated on SOI wafer with three photolithography patterning processes followed by series of DRIE etching and HF etching to remove buried oxide layer to release the end-effector of the device. The fabricated XY micro positioning stage is shown in Fig1 with SEM images. The device provides a motion range of 20 microns in each direction at the driving voltage of 100V. The resonant frequency of the XY stage under ambient conditions is 811 Hz with a high quality factor of 40 achieved from parallel kinematics. The positioning loop is closed using a COTS capacitance-to-voltage conversion IC and a PID controller built in D-space is used to control position with an uncertainty characterized by a standard distribution of 5.24nm and a approximate closed-loop bandwidth of 27Hz. With the positioning loop, the rise time and settling time for closed-loop system are 50ms and 100ms. With sinusoidal input of ω=1Hz, the maximum phase difference of 108nm from reference input is obtained with total motion range of 8μm

Microfabricated tactile sensors for biomedical applications: a review

During the last decades, tactile sensors based on different sensing principles have been developed due to the growing interest in robotics and, mainly, in medical applications. Several technological solutions have been employed to design tactile sensors; in particular, solutions based on microfabrication present several attractive features. Microfabrication technologies allow for developing miniaturized sensors with good performance in terms of metrological properties (e.g., accuracy, sensitivity, low power consumption, and frequency response). Small size and good metrological properties heighten the potential role of tactile sensors in medicine, making them especially attractive to be integrated in smart interfaces and microsurgical tools. This paper provides an overview of microfabricated tactile sensors, focusing on the mean principles of sensing, i.e., piezoresistive, piezoelectric and capacitive sensors. These sensors are employed for measuring contact properties, in particular force and pressure, in three main medical fields, i.e., prosthetics and artificial skin, minimal access surgery and smart interfaces for biomechanical analysis. The working principles and the metrological properties of the most promising tactile, microfabricated sensors are analyzed, together with their application in medicine. Finally, the new emerging technologies in these fields are briefly described

Force Sensing Surgical Grasper with Folding Capacitive Sensor

Minimally-invasive surgery (MIS) has brought many benefits to the operating room, however, MIS procedures result in an absence of force feedback, and surgeons cannot as accurately feel the tissue they are working on, or the forces that they are applying. One of the barriers to introducing MIS instruments with force feedback systems is the high cost of manufacturing and assembly. Instruments must also be sterilized before every use, a process that can destroy embedded sensing systems. An instrument that can be disposed of after a single use and produced in bulk at a low cost is desirable. Printed circuit micro-electro-mechanical systems (PCMEMS) is an emerging manufacturing technology that may represent an economically viable method of bulk manufacturing small, single-use medical devices, including surgical graspers. This thesis presents the design and realization of a PCMEMS surgical grasper that can fit within a 5 mm trocar, and can accurately measure forces in 3 axes, over a range of +/-4 N. The designed instrument is the first PCMEMS grasper to feature multi-axis sensing, and has a sensing range twice as large as current PCMEMS devices. Experimental results suggest that the performance of the sensing system is similar to conventionally-manufactured MIS instruments that use capacitive force transducers. The techniques applied in this thesis may be useful for developing a range of PCMEMS devices with capacitive sensors. Improvements to the design of the grasper and sensing system are suggested, and several points are presented to inform the direction of future work related to PCMEMS MIS instruments