Piezoelectric Transducers Based on Aluminum Nitride and Polyimide for Tactile Applications

The development of micro systems with smart sensing capabilities is paving the way to progresses in the technology for humanoid robotics. The importance of sensory feedback has been recognized the enabler of a high degree of autonomy for robotic systems. In tactile applications, it can be exploited not only to avoid objects slipping during their manipulation but also to allow safe interaction with humans and unknown objects and environments. In order to ensure the minimal deformation of an object during subtle manipulation tasks, information not only on contact forces between the object and fingers but also on contact geometry and contact friction characteristics has to be provided. Touch, unlike other senses, is a critical component that plays a fundamental role in dexterous manipulation capabilities and in the evaluation of objects properties such as type of material, shape, texture, stiffness, which is not easily possible by vision alone. Understanding of unstructured environments is made possible by touch through the determination of stress distribution in the surrounding area of physical contact. To this aim, tactile sensing and pressure detection systems should be integrated as an artificial tactile system. As illustrated in the Chapter I, the role of external stimuli detection in humans is provided by a great number of sensorial receptors: they are specialized endings whose structure and location in the skin determine their specific signal transmission characteristics. Especially, mechanoreceptors are specialized in the conversion of the mechanical deformations caused by force, vibration or slip on skin into electrical nerve impulses which are processed and encoded by the central nervous system. Highly miniaturized systems based on MEMS technology seem to imitate properly the large number of fast responsive mechanoreceptors present in human skin. Moreover, an artificial electronic skin should be lightweight, flexible, soft and wearable and it should be fabricated with compliant materials. In this respect a big challenge of bio-inspired technologies is the efficient application of flexible active materials to convert the mechanical pressure or stress into a usable electric signal (voltage or current). In the emerging field of soft active materials, able of large deformation, piezoelectrics have been recognized as a really promising and attractive material in both sensing and actuation applications. As outlined in Chapter II, there is a wide choice of materials and material forms (ceramics: PZT; polycrystalline films: ZnO, AlN; polymers and copolymers: PVDF, PVDF-TrFe) which are actively piezoelectric and exhibit features more or less attractive. Among them, aluminum nitride is a promising piezoelectric material for flexible technology. It has moderate piezoelectric coefficient, when available in c-axis oriented polycrystalline columnar structure, but, at same time, it exhibits low dielectric constant, high temperature stability, large band gap, large electrical resistivity, high breakdown voltage and low dielectric loss which make it suitable for transducers and high thermal conductivity which implies low thermal drifts. The high chemical stability allows AlN to be used in humid environments. Moreover, all the above properties and its deposition method make AlN compatible with CMOS technology. Exploiting the features of the AlN, three-dimensional AlN dome-shaped cells, embedded between two metal electrodes, are proposed in this thesis. They are fabricated on general purpose Kapton™ substrate, exploiting the flexibility of the polymer and the electrical stability of the semiconductor at the same time. As matter of fact, the crystalline layers release a compressive stress over the polymer, generating three-dimensional structures with reduced stiffness, compared to the semiconductor materials. In Chapter III, a mathematical model to calculate the residual stresses which arise because of mismatch in coefficient of thermal expansion between layers and because of mismatch in lattice constants between the substrate and the epitaxially grown films is adopted. The theoretical equation is then used to evaluate the dependence of geometrical features of the fabricated three-dimensional structures on compressive residual stress. Moreover, FEM simulations and theoretical models analysis are developed in order to qualitative explore the operation principle of curved membranes, which are labelled dome-shaped diaphragm transducers (DSDT), both as sensors and as piezo-actuators and for the related design optimization. For the reliability of the proposed device as a force/pressure sensor and piezo-actuator, an exhaustive electromechanical characterization of the devices is carried out. A complete description of the microfabrication processes is also provided. As shown in Chapter IV, standard microfabrication techniques are employed to fabricate the array of DSDTs. The overall microfabrication process involves deposition of metal and piezoelectric films, photolithography and plasma-based dry and wet etching to pattern thin films with the desired features. The DSDT devices are designed and developed according to FEM and theoretical analysis and following the typical requirements of force/pressure systems for tactile applications. Experimental analyses are also accomplished to extract the relationship between the compressive residual stress due to the aluminum nitride and the geometries of the devices. They reveal different deformations, proving the dependence of the geometrical features of the three-dimensional structures on residual stress. Moreover, electrical characterization is performed to determine capacitance and impedance of the DSDTs and to experimentally calculate the relative dielectric constant of sputtered AlN piezoelectric film. In order to investigate the mechanical behaviour of the curved circular transducers, a characterization of the flexural deflection modes of the DSDT membranes is carried out. The natural frequency of vibrations and the corresponding displacements are measured by a Laser Doppler Vibrometer when a suitable oscillating voltage, with known amplitude, is applied to drive the piezo-DSDTs. Finally, being developed for tactile sensing purpose, the proposed technology is tested in order to explore the electromechanical response of the device when impulsive dynamic and/or long static forces are applied. The study on the impulsive dynamic and long static stimuli detection is then performed by using an ad hoc setup measuring both the applied loading forces and the corresponding generated voltage and capacitance variation. These measurements allow a thorough test of the sensing abilities of the AlN-based DSDT cells. Finally, as stated in Chapter V, the proposed technology exhibits an improved electromechanical coupling with higher mechanical deformation per unit energy compared with the conventional plate structures, when the devices are used as piezo-actuator. On the other hand, it is well suited to realize large area tactile sensors for robotics applications, opening up new perspectives to the development of latest generation biomimetic sensors and allowing the design and the fabrication of miniaturized devices

The era of nano-bionic: 2D materials for wearable and implantable body sensors

Nano-bionics have the potential of revolutionizing modern medicine. Among nano-bionic devices, body sensors allow to monitor in real-time the health of patients, to achieve personalized medicine, and even to restore or enhance human functions. The advent of two-dimensional (2D) materials is facilitating the manufacturing of miniaturized and ultrathin bioelectronics, that can be easily integrated in the human body. Their unique electronic properties allow to efficiently transduce physical and chemical stimuli into electric current. Their flexibility and nanometric thickness facilitate the adaption and adhesion to human body. The low opacity permits to obtain transparent devices. The good cellular adhesion and reduced cytotoxicity are advantageous for the integration of the devices in vivo. Herein we review the latest and more significant examples of 2D material-based sensors for health monitoring, describing their architectures, sensing mechanisms, advantages and, as well, the challenges and drawbacks that hampers their translation into commercial clinical devices

Understanding the effect of skin mechanical properties on the friction of human finger-pads

The aim of this work is to achieve an understanding of the effect of skin mechanical properties on the friction of human finger-pads. This project primarily concentrates on gaining a more fundamental understanding of the frictional properties of skin. To achieve this, various parameters (epidermis thickness, sweat-gland counts, etc.) affecting skin friction were evaluated using an in-vivo technique, Optical Coherence Tomography (OCT) and a friction testing device. This project is also interested in investigating how those parameters alter the friction for different ages, genders, ethnicities and different contact conditions, such as moisture, temperature, loads, etc. Experimental studies were conducted to investigate the skin frictional behaviour. The findings showed that the skin friction obeys a two-term relationship. The skin friction was found to be strongly associated with its Young’s modulus. Tests on the skin structural properties showed the moisture level of the skin, skin thickness and skin morphological properties play important roles in determining the skin friction. The findings gained can be applied to explain how the skin friction varies among different participants. Further tests showed that physico-chemical properties of the skin can have a significant effect on the skin friction. The OCT system was combined with a multi-axis force plate to measure the contact area between fingers and smooth surfaces. Static measurement showed both apparent and real contact area increase with normal load following a power-law relationship. This is associated with the skin mechanical properties. The dynamic contact area was investigated using a Digital Image Correlation (DIC) method. As a finger was sliding along a flat surface, the dynamic apparent contact area was found to decrease with time

TACTILE SENSING WITH COMPLIANT STRUCTURES FOR HUMAN-ROBOT INTERACTION

This dissertation presents the research on tactile sensing with compliant structures towards human-robot interaction. It would be beneficial for robots working collaboratively with humans to be soft or padded and have compliant tactile sensing skins over the padding. To allow the robots to interact with humans via touch effectively and safely and to detect tactile stimuli in an unstructured environment, new tactile sensing concepts are needed that can detect a wide range of potential interactions and sense over an area. However, most highly sensitive tactile sensors are unable to cover the forces involved in human contacts, which ranges from 1 newton to thousand newtons; to implement area sensing capabilities, there have been challenges in creating traditional sensing arrays, where the associated supporting electronics become more complex with an increasing number of sensing elements. This dissertation develops a novel multi-layer cutaneous tactile sensing architecture for enhanced sensitivity and range, and employs an imaging technique based on boundary measurements called electrical impedance tomography (EIT) to achieve area tactile sensing capabilities. The multi-layer cutaneous tactile sensing architecture, which consists of stretchable piezoresistive strain-sensing layers over foam padding layers of different stiffness, allows for both sufficient sensitivity and an extended force range for human contacts. The role that the padding layer plays when placed under a stretchable sensing layer was investigated, and it was discovered that the padding layer magnifies the sensor signal under indentation compared to that obtained without padding layers. The roles of the multi-layer foams were investigated by changing stiffness and thickness, which allows tailoring the response of multi-layer architectures for different applications. To achieve both extended force range and distributed sensing, EIT technique was employed with the multi-layer sensing architecture. Machine and human touch were conducted on the developed multi-layer sensing system, revealing that the second sensing skin is required to detect the large variability in human touch. Although widely applied in the medical field for functional imaging, EIT applied in tactile sensing faces different challenges, such as unknown number and region of tactile stimuli. Current EIT tactile sensors have focused on qualitative demonstration. This dissertation aims at achieving quantitative information from piezoresistive EIT tactile sensors, by investigating spatial performance and the effect of sensor’s conductivity. A spatial correction method was developed for obtaining consistent spatial information, which was validated by both simulation and experiments from our stretchable piezoresistive EIT sensor with an underlying padding layer

The era of nano-bionic: 2D materials for wearable and implantable body sensors

Nano-bionics have the potential of revolutionizing modern medicine. Among nano-bionic devices, body sensors allow to monitor in real-time the health of patients, to achieve personalized medicine, and even to restore or enhance human functions. The advent of two-dimensional (2D) materials is facilitating the manufacturing of miniaturized and ultrathin bioelectronics, that can be easily integrated in the human body. Their unique electronic properties allow to efficiently transduce physical and chemical stimuli into electric current. Their flexibility and nanometric thickness facilitate the adaption and adhesion to human body. The low opacity permits to obtain transparent devices. The good cellular adhesion and reduced cytotoxicity are advantageous for the integration of the devices in vivo. Herein we review the latest and more significant examples of 2D material-based sensors for health monitoring, describing their architectures, sensing mechanisms, advantages and, as well, the challenges and drawbacks that hampers their translation into commercial clinical devices